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Cells(1 + J, 2)Value = "log xP" WorksheetsCells(1 + J, 3).Value ,
Cells(1 + J, 4)Value ,
Cells(1 + J, 5).Value ,
Cells(1 + J, 6).Value ,
Cells(1 + J, 7).Value = "log pSi(bar ,
Cells(1 + J, 8).Value = "log pSi2(bar ,
Cells(1 + J, 9).Value = "log pSi3(bar ,
Cells(1 + J, 10).Value = "log pP3(bar ,
Cells(1 + J, 11).Value = "log pO(bar ,
Cells(1 + J, 12).Value = "log pO2(bar ,
Cells(1 + J, 13).Value = "log pO3(bar ,
Cells(1 + J, 14).Value = "log pP(bar ,
Cells(1 + J, 15).Value = "log pP2(bar ,
Cells(1 + J, 16).Value = "log pP4(bar ,
Cells(1 + J, 17).Value = "log pPSi(bar ,
Cells(1 + J, 18).Value = "log pPSi2(bar ,
Cells(1 + J, 19).Value = "log pP2Si2(bar ,
Cells(1 + J, 20).Value = "log pSiO(bar ,
Cells(1 + J, 21).Value = "log pSiO2(bar ,
Cells(1 + J, 22).Value = "log pSi2O2(bar ,
Cells(1 + J, 23).Value = "log pPO(bar ,
Cells(1 + J, 24).Value = "log pPO2bar ,
Cells(1 + J, 25).Value = "log pP2O3(bar ,
Cells(1 + J, 26).Value = "log pP2O4(bar ,
Cells(1 + J, 27).Value = "log pP2O5(bar ,
Cells(1 + J, 28).Value = "log pP4O6(bar ,
Cells(1 + J, 29).Value = "log pP4O7(bar ,
Cells(1 + J, 30).Value = "log pP4O8(bar ,
Cells(1 + J, 31).Value = "log pP4O9(bar ,
Cells(1 + J, 32).Value = "log pP4O10(bar ,
Cells(1 + J, 33).Value = "log(NP_SiOP ,
Cells(1 + J, 34).Value = "log(NSi_SiOP ,
Cells(1 + J, 35).Value = "log(NO_SiOP ,
Cells(1 + J, 36).Value =, log NP_SiOP / NSi_SiOP ,
CellsValue = "log Flux P evapCells(1 + J, 38)Value = "log Flux Si evap" WorksheetsCells(1 + J, 39)Value = "log Flux O evap" WorksheetsCells(1 + J, 40)Value = "log Flux P/Flux Si evap" WorksheetsCells(1 + J, 41).Value = "log Flux O inc" WorksheetsCells(1 + J, 42).Value = "log Flux O evap, Cells(1 + J, 43).Value = "log x(O)" Worksheets("calc_four2").Cells(1 + J, 44).Value = "M" Line2 ,
CellsCellsCellsCellsCellsCells(1 + J, 7)Value = LogCells(1 + J, 8)Value = LogCells(1 + J, 9)Value = LogCells(1 + J, 10)Value = LogCells(1 + J, 11)Value = Log(pO) / Log(10) WorksheetsCells(1 + J, 12)Value = Log(pO2) / Log(10) WorksheetsCells(1 + J, 13)Value = Log(pO3) / Log(10) WorksheetsCells(1 + J, 14)Value = Log(pP) / Log(10) WorksheetsCells(1 + J, 15)Value = Log(pP2) / Log(10) WorksheetsCells(1 + J, 16)Value = Log(pP4) / Log(10) Worksheets("calc_four2")Cells(1 + J, 17)Value = Log(pPSi) / Log(10) Worksheets("calc_four2")Cells(1 + J, 18)Value = Log(pPSi2) / Log(10) Worksheets("calc_four2")Cells(1 + J, 19)Value = Log(pP2Si2) / Log(10) Worksheets("calc_four2")Cells(1 + J, 20)Value = Log(pSiO) / Log(10) Worksheets("calc_four2")Cells(1 + J, 21)Value = Log(pSiO2) / Log(10) WorksheetsCells(1 + J, 22)Value = Log(pSi2O2) / Log(10) WorksheetsCells(1 + J, 23)Value = Log(pPO) / Log(10) WorksheetsCells(1 + J, 24)Value = Log(pPO2) / Log(10) WorksheetsCells(1 + J, 25)Value = Log(pP2O3) / Log(10) WorksheetsCells(1 + J, 26)Value = Log(pP2O4) / Log(10) WorksheetsCells(1 + J, 27)Value = Log(pP2O5) / Log(10) WorksheetsCells(1 + J, 28)Value = Log(pP4O6) / Log(10) WorksheetsCells(1 + J, 29)Value = Log(pP4O7) / Log(10) WorksheetsCells(1 + J, 30)Value = Log(pP4O8) / Log(10) WorksheetsCells(1 + J, 36)Value = LogCells(1 + J, 37)Value = Log(fluxP) / Log(10) Worksheets("calc_four2").Cells(1 + J, 38)Value = Log(fluxSi) / Log(10) Worksheets("calc_four2").Cells(1 + J, 39)Value = Log(fluxO) / Log(10) Worksheets("calc_four2").Cells(1 + J, 25)Cells(1 + J, 33)Cells(1 + J, 34), Cells(1 + J, 5).Value = aSi WorksheetsCells(1 + J, 31).Value = Log(pP4O9) / Log(10) Worksheets("calc_four2").Cells(1 + J, 32).Value = Log(pP4O10) / Log(10) Worksheets("calc_four2").Cells(1 + J, 33).Value = Log(NP_SiOP) / Log(10) Worksheets("calc_four2").Cells(1 + J, 34).Value = Log(NSi_SiOP) / Log(10) Worksheets("calc_four2").Cells(1 + J, 35).Value = LogpP2O3) / Log(10) Worksheets("calc_four2").Cells(1 + J, 26).Value = Log(pP2O4) / Log(10) Worksheets("calc_four2").Cells(1 + J, 27).Value = Log(pP2O5) / Log(10) Worksheets("calc_four2").Cells(1 + J, 28).Value = Log(pP4O6) / Log(10) Worksheets("calc_four2").Cells(1 + J, 29).Value = Log(pP4O7) / Log(10) Worksheets("calc_four2").Cells(1 + J, 30).Value = Log(pP4O8) / Log(10) Worksheets("calc_four2").Cells(1 + J, 31).Value = Log(pP4O9) / Log(10) Worksheets("calc_four2").Cells(1 + J, 32).Value = LogCells(1 + J, 35).Value = Log(NO_SiOP) / Log(10) Worksheets("calc_four2").Cells(1 + J, 36).Value = Log(NP_SiOP / NSi_SiOP) / Log(10) Worksheets("calc_four2").Cells(1 + J, 37).Value = Log(fluxP) / Log(10) Worksheets("calc_four2").Cells(1 + J, 38).Value = Log(fluxSi) / Log(10) Worksheets("calc_four2").Cells(1 + J, 39).Value = Log(fluxO) / Log(10) Worksheets("calc_four2").Cells(1 + J, 40).Value = Log(fluxP / fluxSi) / Log(10) Worksheets("calc_four2").Cells(1 + J, 41).Value = Log(fluxO_inc) / Log(10) Worksheets("calc_four2").Cells(1 + J, 42).Value = Log(fluxO / fluxO_inc) / Log(10) Worksheets("calc_four2").Cells(1 + J, 43).Value = Log(xO) / Log(10) Worksheets("calc_four2").Cells(1 + J, 44).Value = M Next L ,
Cells(1 + J, 1)Value WorksheetsCells(1 + J, 2).Value = "m0Si(kg)" WorksheetsCells(1 + J, 3)Value, p.0 ,
Cells(1 + J, 4).Value = "x0P(fraction molaire ,
Cells(1 + J, 5)Value = "dxP (pas) WorksheetsCells(1 + J, 6)Value = "masse Si" WorksheetsCells(1 + J, 7).Value = "Delta mSi" Worksheets, Cells(1 + J, 8).Value = "Delta t ,
Cells(1 + J, 9)Value = "XP (frac molaire à tout instant WorksheetsCells(1 + J, 10).ValueCells(1 + J, 11)Value = "Temps(h) ,
Cells(1 + J, 12).Value =, log XP ,
Cells(1 + J, 13).Value = "rayon ,
Cells(1 + J, 14).Value =, Sbille ,
K -1) minitSi(K + 1) = minitSi(K) -dmSi rayon(K + 1) = (3 * minitSi ,
CellsCells(1 + J, 2)Value = m0Si WorksheetsCells(1 + J, 3)Value = m0P WorksheetsCells(1 + J, 4)Value = x0P WorksheetsCells(1 + J, 5)Value = dxP WorksheetsCells(1 + J, 6)Value = minitSi(K) WorksheetsCells(1 + J, 7)Value = dmSi WorksheetsCells(1 + J, 8)Value = dt WorksheetsCells(1 + J, 9)Value = X(K) Worksheets("bille").Cells(1 + J, 10).Value = K Worksheets, Cells(1 + J, 11).Value = Tps(K) Worksheets("bille").Cells(1 + J, 12).Value = Log(X(K)) / Log(10) Worksheets("bille").Cells(1 + J, 13).Value = rayon(K) Worksheets("bille").Cells(1 + J, 14).Value = Sbille(K) ,
Cells(1 + J, 1).Value ,
Cells(1 + J, 2).Value = "m0Si(kg ,
Cells(1 + J, 3).Value = "m0P(kg ,
Cells(1 + J, 4).Value = "x0P(fraction molaire ,
Cells(1 + J, 5).Value = "dxP (pas ,
Cells(1 + J, 6)Value = "masse Si" WorksheetsCells(1 + J, 7).Value = "Delta mSi" WorksheetsCells(1 + J, 8)Value =, Delta t ,
Cells(1 + J, 9)Value = "XP (frac molaire à tout instant WorksheetsCells(1 + J, 10).ValueCells(1 + J, 11)Value = "Temps(h) ,
Cells(1 + J, 12).Value =, log XPP ,
Cells(1 + J, 13).Value = "rayon ,
Cells(1 + J, 14).Value =, Sbille ,
Cells(1 + J, 15).Value = "log pSi(bar ,
Cells(1 + J, 16).Value = "log pSi2(bar ,
Cells(1 + J, 17).Value = "log pSi3(bar ,
Cells(1 + J, 18).Value = "log pP3(bar ,
Cells(1 + J, 19).Value = "log pO(bar ,
Cells(1 + J, 20).Value = "log pO2(bar ,
Cells(1 + J, 21).Value = "log pO3(bar ,
Cells(1 + J, 22).Value = "log pP(bar ,
Cells(1 + J, 23).Value = "log pP2(bar ,
Cells(1 + J, 24).Value = "log pP4(bar ,
Cells(1 + J, 25).Value = "log pPSi(bar ,
Cells(1 + J, 26).Value = "log pPSi2(bar ,
Cells(1 + J, 27).Value = "log pP2Si2(bar ,
Cells(1 + J, 28).Value = "log pSiO(bar ,
Cells(1 + J, 29).Value = "log pSiO2(bar ,
Cells(1 + J, 30).Value = "log pSi2O2(bar ,
Cells(1 + J, 31).Value = "log pPO(bar ,
Cells(1 + J, 32).Value = "log pPO2bar ,
Cells(1 + J, 33).Value = "log pP2O3(bar ,
Cells(1 + J, 34).Value = "log pP2O4(bar ,
Cells(1 + J, 35).Value = "log pP2O5(bar ,
Cells(1 + J, 36).Value = "log pP4O6(bar ,
Cells(1 + J, 37).Value = "log pP4O7(bar ,
Cells(1 + J, 38).Value = "log pP4O8(bar ,
Cells(1 + J, 39).Value = "log pP4O9(bar ,
Cells(1 + J, 40).Value = "log pP4O10(bar ,
CellsCells(1 + J, 42)Value = "xO1(K) WorksheetsCells(1 + J, 43)Value = "xP" WorksheetsCells(1 + J, 44)Value = "EpsilonOP" WorksheetsCells(1 + J, 45).Value = "EpsilonPP" WorksheetsCells(1 + J, 46).Value = "GammaInfiniP" Worksheets, Cells(1 + J, 47).Value = "GammaInfiniO" DEPHOSPHORIZATION If K = 0 Then Tps(K) = dt minitSi(K + 1) = m0Si -dmSi rayon(K + 1) = (3 * minitSi(K + 1) / (4 * Pi * dSi)) ^ ,
K -1) minitSi(K + 1) = minitSi(K) -dmSi rayon(K + 1) = (3 * minitSi ,
CellsCellsCells(1 + J, 6)Value = minitSiCells(1 + J, 7)Value = dmSi WorksheetsCells(1 + J, 8)Value = dt WorksheetsCells(1 + J, 9)Value = xP WorksheetsCells(1 + J, 10)Value = K WorksheetsCells(1 + J, 11)Value = Tps(K) WorksheetsCells(1 + J, 12)Value = Log(xPP(K)) / Log(10) WorksheetsCells(1 + J, 13)Value = rayon(K) WorksheetsCells(1 + J, 14)Value = Sbille(K) WorksheetsCells(1 + J, 15)Value = Log(pSi) / Log(10) Worksheets("billeO2")Cells(1 + J, 16)Value = Log(pSi2) / Log(10) Worksheets("billeO2")Cells(1 + J, 17)Value = Log(pSi3) / Log(10) Worksheets("billeO2")Cells(1 + J, 18)Value = Log(pP3) / Log(10) Worksheets("billeO2")Cells(1 + J, 19)Value = Log(pO) / Log(10) WorksheetsCells(1 + J, 20)Value = Log(pO2) / Log(10) WorksheetsCells(1 + J, 21)Value = Log(pO3) / Log(10) WorksheetsCells(1 + J, 22)Value = Log(pP) / Log(10) WorksheetsCells(1 + J, 23)Value = Log(pP2) / Log(10) WorksheetsCells(1 + J, 24)Value = Log(pP4) / Log(10) WorksheetsCells(1 + J, 25)Value = Log(pPSi) / Log(10) WorksheetsCells(1 + J, 26)Value = Log(pPSi2) / Log(10) WorksheetsCells(1 + J, 31)Value = Log(pPO) / Log(10) Worksheets("billeO2").Cells(1 + J, 32)Value = Log(pPO2) / Log(10) Worksheets("billeO2").Cells(1 + J, 33)Value = Log(pP2O3) / Log(10) Worksheets("billeO2").Cells(1 + J, 34), Cells(1 + J, 2).Value = m0Si WorksheetsCells(1 + J, 3).Value = m0P WorksheetsCells(1 + J, 4).Value = x0P WorksheetsCells(1 + J, 27).Value = Log(pP2Si2) / Log(10) Worksheets("billeO2").Cells(1 + J, 28).Value = Log(pSiO) / Log(10) Worksheets("billeO2").Cells(1 + J, 29).Value = Log(pSiO2) / Log(10) Worksheets("billeO2").Cells(1 + J, 30).Value = Log(pSi2O2) / Log(10) WorksheetspP2O4) / Log(10) Worksheets("billeO2").Cells(1 + J, 35).Value = Log(pP2O5) / Log(10) Worksheets("billeO2").Cells(1 + J, 36).Value = Log(pP4O6) / Log(10) Worksheets("billeO2").Cells(1 + J, 37).Value = Log(pP4O7) / Log(10) Worksheets("billeO2").Cells(1 + J, 38).Value = Log(pP4O8) / Log(10) Worksheets("billeO2").Cells(1 + J, 39).Value = Log(pP4O9) / Log(10) Worksheets("billeO2").Cells(1 + J, 40).Value = Log(pP4O10) / Log(10) Worksheets("billeO2").Cells(1 + J, 41).Value = Rapp Worksheets("billeO2").Cells(1 + J, 42).Value = xO1(K) Worksheets("billeO2").Cells(1 + J, 43).Value = xP Worksheets("billeO2").Cells(1 + J, 44).Value = EpsilonOP Worksheets("billeO2").Cells(1 + J, 45).Value = EpsilonPP Worksheets("billeO2").Cells(1 + J, 46).Value = GammaInfiniP Worksheets("billeO2").Cells(1 + J, 47).Value = GammaInfiniO Worksheets("billeO2").Cells(1 + J, 48).Value = GammaPter Worksheets("billeO2").Cells(1 + J, 49).Value = GammaOter Worksheets("billeO2").Cells(1 + J, 50).Value = aO Worksheets("billeO2").Cells(1 + J, 51).Value = Lmax Worksheets("billeO2").Cells(1 + J, 52).Value = pO2lim K = K + 1 'Next L 'Stop Next I Line3 ,
sndividul nd joint soluilities of luminium nd phosphorus in germnium nd silion, Russian journal of inorganic chemistry, vol.7, issue.1, p.429431, 1962. ,
enlysis of thermoE dynmi properties nd phse equiliri in the siEp system, Russian Journal of Physical Chemistry A, vol.85, p.911915, 2011. ,
itude expérimentle et numérique de l préipittion d9impuretés et de l formtion des grins dns le siliium photovoltïque, 2009. ,
ilion purity ontrolled under eletromgneti levittion @spyeAX in)uenes on underooling, Journal of materials science, pp.45-22182222, 2010. ,
grystllogrphy of sip nd sis single rystls nd of sip preipittes in si, Journal of Applied Physics, vol.37, p.46834687, 1966. ,
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The dash lines are the data from Giessen and Vogel [17], and the points are experimental data of (1) Kooi ,
Removing Phosphorus from Molten Silicon: A Thermodynamic Evaluation of Distillation, ECS Journal of Solid State Science and Technology, vol.5, issue.3, pp.129-137, 2016. ,
DOI : 10.1149/2.0361602jss
URL : https://hal.archives-ouvertes.fr/hal-01367839
Within the framework of purication of molten silicon for solar cells, phosphorus is one of few impurities that remains problematic. The present purpose is to develop a new method that leads to a nal phosphorus concentration around 0.5 wppm. We have rst focused on the main thermodynamic parameters that control the process: relevant thermodynamic parameters are taken from literature, such as activities, partial pressures and interaction coecients. According to our results, distillation of phosphorus under vacuum occurs at high temperatures. Yet, the residual oxygen present in the vacuum is a hindrance to the distillation, since it evaporates in the form of silicon oxides ,
Removing phosphorus from molten silicon: solubility prediction of P in Si ,
After a thorough critical literature review of the available thermodynamic data, a Calphad assessment has been performed on the Si P binary system ,
emoving phosphorus from molten silionX thermodynmi evlution of distilltionComputer Coupling of Phase Diagrams and Thermochemistry, the 45 th International Conference on ,
iletromgneti levittion method for silion puri(tion, the 18 th International Conference on "Crystal Growth and Epitaxy" (ICCGE18) ,