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Croissance latérale MPCVD de diamant en homoépitaxie pour dispositifs électroniques de puissance

Abstract : Diamond is the ultimate semiconductor for power electronic devices. Consequently, diamond growth techniques and diamond-base devices have been intensively investigated over the last two decades all over the world. Among these power devices, diamond based Schottky diodes are the most advanced. However, for diamond to substitute present Si and SiC for power electronics, a substantial technological progress is still needed.The improvement of power devices depends not only on the intrinsic characteristic of the semiconductor, but also on the device architecture. Vertical and pseudo-vertical devices offer many advantages such as low-specific on-resistance, high breakdown voltage and a smaller size. Moreover, three-dimensional (3D) design allows to reduce the electric field inside the material and would make the most out of the superb material qualities of diamond, if only the diamond growth mechanism over patterned diamond substrates would be better studied and understood.Thus, the aim of this thesis manuscript is to understand the mechanisms governing the three-dimensional (3-D) shaped diamond substrates homoepitaxial overgrowth, in order to implement them in the design and fabrication of a Schottky device.To reach this goal, the main mechanisms of CVD growth over patterned substrates were experimentally investigated by transmission electronic microscopy using a novel stratigraphic approach that allowed to follow the growth direction and generation of defects at various stages. Evidence was provided for many sectors of growth, and a tendency to planarization, while the methane concentration and resulting growth rates were shown to be key parameters. Various interpretation models, from the atomistic to the macroscopic scale, were discussed. The origin of dislocations, and of other extended and superficial defects was determined. Low methane concentrations led to high quality 3-D overgrowth. The overgrowth of micro-terraces is proposed as a method to achieve large areas free of defects. A novel method based in solid solution strengthening was introduced as an alternative to cathodoluminescence to evaluate boron doping in dislocation-rich regions where extended defects usually hinder this approach. All the results obtained above have been taken into account to reduce the number of technological steps leading to a diamond based 3D device (Schottky diode or even MOSFET). In the case of Schottky diodes, a 3D design was proposed with the following advantages:-To “filter” dislocations.-To allow an arbitrary large field region.-To spare photolithography steps.-To improve ohmic contacts, as the p+ layer is grown on a {111} facet.
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Submitted on : Monday, February 12, 2018 - 2:38:07 PM
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Fernando Lloret Vieira. Croissance latérale MPCVD de diamant en homoépitaxie pour dispositifs électroniques de puissance. Science des matériaux [cond-mat.mtrl-sci]. Universidad de Cádiz, 2017. Français. ⟨NNT : 2017GREAY041⟩. ⟨tel-01707012⟩



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