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Fabrication and optical simulation of periodic nanostructures and their applications

Jia Liu 1
1 INL - Photonique - INL - Nanophotonique
INL - Institut des Nanotechnologies de Lyon
Abstract : Periodic nanostructures play an important role in the domain of nanotechnology, especially in photon control. While there exist many general purpose techniques for fabrication and optical simulation, we show tailored fabrication and optical simulation methods for periodic structures to accelerate lab-scale prototyping and optical design. In the first part of this dissertation, we describe a low-cost lithographic technique named Laser Interference Lithography (LIL) for fabricating periodic nanostructures. LIL technique is combined with dry-etching, wet-etching and electrochemical etching technique to realize, respectively, cylindrical holes, inverted pyramids and high aspect ratio pore arrays on silicon based substrate. The one-dimensional patterns on glass substrates are also used as nanofilters in realizing low-cost preconcentration chip. In the second part, we first describe Rigorous Coupled-Wave Analysis (RCWA), a rigorous electromagnetic calculation method designed for periodic structures. A detailed derivation is given to explain the numerical method. Then, we combine the RCWA method and a new proposed pseudo-disordered patterns design approach to investigate photon control. As an example, we demonstrate that by adding ‘appropriate’ engineered fine stripes to each long period the absorption performance of thin silicon slab can be largely enhanced.
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Submitted on : Friday, January 26, 2018 - 6:38:07 PM
Last modification on : Wednesday, July 8, 2020 - 12:44:02 PM
Long-term archiving on: : Friday, May 25, 2018 - 2:13:38 PM


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  • HAL Id : tel-01694130, version 1


Jia Liu. Fabrication and optical simulation of periodic nanostructures and their applications. Electronics. Université de Lyon, 2016. English. ⟨NNT : 2016LYSEI027⟩. ⟨tel-01694130⟩



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