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Microtexture characterization by Automated Crystal Orientation Mapping in TEM for the development of advanced technologies in microelectronics

Abstract : The development of advanced nodes in microelectronics requires to understand the impact of crystal size and orientation on the electrical, thermal and mechanical properties of materials. New tools have been developed to map the grains orientation and morphology of nanometer-scaled structures. Among them, the Automated Crystal Orientation Mapping technique used on a Transmission Electron Microscope (ACOM-TEM) is based on the indexation of electron diffraction patterns. The aim of this study was to evaluate the abilities and limitations of the ACOM-TEM technique for the characterization of microelectronics-related materials. Consequently, its ability to analyze nano-sized materials and the possibility of answering problematics related to microelectronics front-end fabrication challenges were investigated. The study highlighted in the first place the importance of the TEM illumination settings. The results showed that minimizing the electron probe convergence angle even at the cost of a larger size has decreased mis-indexation issues. These optimum settings were used to perform quantitative texture analysis of NiPt-silicide thin films. Finally, the case of superimposed diffraction patterns related to overlapping grains was analyzed. Experiments showed that mis-indexing remains limited despite the superimposition and that grains with larger fraction volume were preferentially selected by template matching. A dedicated method was also proposed to overcome crystal overlapping issues. The approach is based on iterative re-indexation of diffraction patterns after subtraction of the reflections related to the previous ACOM best match. Considering the same diffraction patterns data-set, the capabilities of this method to recover the grains size and morphology were compared to two recent techniques based respectively on the analysis of virtual dark field (VDF) images and non-negative matrix factorization (NMF).
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Submitted on : Friday, January 19, 2018 - 11:09:08 AM
Last modification on : Friday, March 25, 2022 - 9:42:28 AM
Long-term archiving on: : Thursday, May 24, 2018 - 2:30:12 AM


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  • HAL Id : tel-01688218, version 1



Alexia Valery. Microtexture characterization by Automated Crystal Orientation Mapping in TEM for the development of advanced technologies in microelectronics. Micro and nanotechnologies/Microelectronics. Université Grenoble Alpes, 2017. English. ⟨NNT : 2017GREAI018⟩. ⟨tel-01688218⟩



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