Athermal micro-ablation of transparent materials by multiphoton absorption with an amplified Nd : Yag microchip laser generating green sub-nanosecond pulses

Abstract : Microchip lasers with sub-nanosecond pulses are attractive alternative to femtosecond lasers for micromachining in transparent materials by multiphoton absorption. These lasers can easily reach pulse peak powers that are needed to trigger ablation in all materials, including diamond, ceramics, plastics, and glasses. In addition, they are low cost with compact and rugged design. In this thesis, a microchip laser (532 nm, 300 ps) has been used for micro-engraving and marking different types of transparent materials such as borosilicate D263, BK7, and SBS thermoplastic. Experimental resultsare rationalized by the model of matter explosion following the plasma generation induced by the laser two-photon absorption. Sub-micron resolution embedded marking is demonstrated inside borosilicate glass. Micro fluidic channels for optical sensors are engraved on BK-7 glass with ion-doped waveguides. Arrays of dense micro channels are fabricated at the surface of thermoplastics with a zone affected by thermal effects limited to the micron range. In summary, this thesis demonstrates that this type of laser can be efficiently used for high-resolution micro-machining transparent materials with minimal thermal effects.
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Taghrid Mhalla. Athermal micro-ablation of transparent materials by multiphoton absorption with an amplified Nd : Yag microchip laser generating green sub-nanosecond pulses. Materials Science [cond-mat.mtrl-sci]. Université Grenoble Alpes, 2015. English. ⟨NNT : 2015GREAY059⟩. ⟨tel-01687375⟩

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