Skip to Main content Skip to Navigation
Theses

Modélisation, conception et intégration de nouvelles architectures différentielles pour des capteurs M/NEMS résonants

Abstract : M/NEMS resonant sensors, due to their small size, consumption and quasi-digital output (a frequency most of the time) are unavoidable tools for on-board systems, from smartphones to aeronautic technology. However, they suffer from environmental drifts, and even though the effect of these drifts can be limited by the design, it is sometimes necessary to use differential architectures to properly remove the drifts from the measurements and ensure the output reliability even in harsh environments. In this work, a special technique for differential measurement is studied, consisting in the synchronization of two resonators, one reference and one sensor. Placed in a single feedback loop, they oscillate at the same frequency and eventual phase shift when the physical quantity to be sensed is applied. This phase shift is a theoretically drift-free way to measure this physical quantity. This technique also benefits from its ease of integration, making it a good candidate for large scale integration. After studying the theoretical framework, several design guidelines are found, which are used in the fabrication of a proof of concept. The theoretical performances are found as well, and compared to the experimental ones.
Document type :
Theses
Complete list of metadatas

https://tel.archives-ouvertes.fr/tel-01682483
Contributor : Abes Star :  Contact
Submitted on : Friday, January 12, 2018 - 11:57:08 AM
Last modification on : Tuesday, September 29, 2020 - 4:48:31 AM
Long-term archiving on: : Sunday, May 6, 2018 - 11:33:00 AM

File

73658_PRACHE_2017_archivage.pd...
Version validated by the jury (STAR)

Identifiers

  • HAL Id : tel-01682483, version 1

Citation

Pierre Prache. Modélisation, conception et intégration de nouvelles architectures différentielles pour des capteurs M/NEMS résonants. Autre. Université Paris Saclay (COmUE); Universitat autònoma de Barcelona, 2017. Français. ⟨NNT : 2017SACLC054⟩. ⟨tel-01682483⟩

Share

Metrics

Record views

399

Files downloads

309