s? ??? ?r??r ?? st?????t? ?? t?? ??r???s ??? ?r???t?t???s t???r?s ? ?s r???t?? t? ? ?????r ?? ?r?st??? ???r????? s?t?s ????????? ??r ? ??s?r?t???s? ?? ,
? ???r?? tr??s??r ?? t?? t?? t?r????t???s ?? ??r?????t ??t? t???r s?r???? ????r?t?? ??t? ,
s??s?rs t? ??t???s?s ???? ??? ???? ??? ?s ?s?? ?s ? ?? ??s?r??r ?? s??s?r???s ??? t? ?ts r???t????? ??r??? ????rs ?s tr??s??r??t ????tr???s ??? s???r?????s? ??r ,
000 ¯ 1)??? ???? s?r????s ?r? ????r? t??? ?r? ??st???? ??? t? t?? ???r?s????? ????tr?? ???? t??t ???????s ??r?ss t?? s? ???s? t?? ?rst q??st??? t??t ?r?s?s ?s t?? ??? t? ???r??t?r??? ?t? ??? ?t????? r?t? ?? ???? s???t???s ?s ?r???t?????? ????r??t ??r t?? t?? ????s? r?s????t ???r??t??? ?t ? s?????? ???? ??s ?s?? s????ss?????? ??r?? ???t?????tr?? ???r??t??? ??s ??s? ??????? t? s????? ?r?st??s ??? ?????r?st?????? ??? ???s ????? ????? ??t t??s t?????q?? s????? ?? ??????? ??t? ??t??s??? ???????t???s? ???????? ??? ???r?? ??? s??tt?r??? ????? ?s tr?????? ??s?? s??s?t??? t? t?? ??ss ?? t?? ?t??s ?? t?? ??st ?t, 1) s?r???? ????r ??r?? ????t?t???? ?s s???? ?? ???? ???? ???s ???t?r? ??s ??s? ??s?r??? ?? ?t??r ??rt??t? str??t?r?s? ,
78 nm/min?005 nm/s? ?s t?? t??????ss ,
??? ????r s???tr? ??r ? ??? ??????r?? s?????s? ??? ??t??rs s????? t??t t?? r???t??? st?rt?? ??r???? ??r??? t?? ????s?t???? s?????r?? t? t?? ??s? ,
s????r ?s ?r???? ?r?????? ?? t?? ?r??t? ????? t?? st?? ????s? ??? ?r??t? ?s q??s???? ?? t? ? ?r?t???? t?????t??t ??t? ? ??rr??r ?????t ?? ??????? ?? ??s ????? ???t???r t?? s?r???? ?r ?ts ???r?????t??? st?t?? ???s ?s ??t?r?r?t?? ?? t?? ,
? ??s?r?t??? ? A?? t??? ?????r ?s ??s?t??? ?r ????t??? ????s ?r ???s? tr??s??ss?, × 2) ??? ( ? 3 × ? 3)R30 ? str??t?r?s t??t ?r? s? × 8 ?? 2 ? ?t r??? t????r?t?r? s?????? t?? ????? (1 × 2) ? r????str??t??? ??? ??? ??? ????? ?t 450 ? ? ?11 × 18 ?? 2 ? s?????? t?? (5 × 5) r????str??t?r t?? r????str??t???s ?? t?? ??????? 1) s?r????? ?r?? ???s? ???? ???? ??? (1 × 2) ? ????r?? ??t? ??? ??? ??? (5 × 5)? ??? (2 × 2)? ??? (5 × 5) ?? r???rs t ,
s?t s???s t?? s??? s???tr? ??r ,