On the Temperature Dependence of Cooperative Relaxation Properties in Glass???Forming Liquids, The Journal of Chemical Physics, vol.250, issue.1, p.43139, 1965. ,
DOI : 10.1063/1.1729095
Encapsulated graphene field-effect transistors for air stable operation, Applied Physics Letters, vol.106, issue.11, p.113104, 2015. ,
DOI : 10.1016/0039-6028(72)90002-7
Glass transition and structural relaxation in semi-crystalline poly(ethylene terephthalate): a DSC study, Polymer, vol.43, issue.15, pp.4111-4122, 2002. ,
DOI : 10.1016/S0032-3861(02)00236-7
ac Conductivity analysis and dielectric relaxation behaviour of NaNO3???Al2O3 composites, Materials Science and Engineering: B, vol.121, issue.1-2, pp.12-19, 2005. ,
DOI : 10.1016/j.mseb.2004.12.005
Mobile amorphous phase fragility in semi-crystalline polymers: Comparison of PET and PLLA, Polymer, vol.48, issue.4, pp.1012-1019, 2007. ,
DOI : 10.1016/j.polymer.2006.12.053
High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments, Microelectronic Engineering, vol.153, pp.126-131, 2016. ,
DOI : 10.1016/j.mee.2016.03.057
F " xylylene polymer " , encyclopedia of chemical technology, Newyork, pp.863-901, 1988. ,
Chemical Vapor Jet Deposition of Parylene Polymer Films in Air, Macromolecules, vol.48, issue.16, pp.48-5550, 2015. ,
DOI : 10.1021/acs.macromol.5b00505
Characterization of Parylene C as protective layer on micro-piezoelectric printheads, Materials Science in Semiconductor Processing, vol.40, pp.811-816, 2015. ,
DOI : 10.1016/j.mssp.2015.07.037
Improvements of Permeation Barrier Coatings Using Encapsulated Parylene Interlayers for Flexible Electronic Applications, Plasma Processes Polym, vol.4, p.180, 2007. ,
Ionic Conduction and Relaxation in Melt Compounded Poly(Ethylene Oxide)-Lithium Perchlorate Trihydrate- Montmorillonite Nanocomposite Electrolyte, Ind. J. of Engi. and mat. Sciences, vol.18, issue.11, pp.147-156, 2011. ,
Dispersion and Absorption in Dielectrics I. Alternating Current Characteristics, The Journal of Chemical Physics, vol.7, issue.4, pp.341-351, 1941. ,
DOI : 10.1063/1.1745400
???Propanol, The Journal of Chemical Physics, vol.5, issue.12, pp.1484-1490, 1951. ,
DOI : 10.1039/tf946420a040
Polar molecules, 1929. ,
The random free???energy barrier model for ac conduction in disordered solids, Journal of Applied Physics, vol.27, issue.22, pp.2456-2468, 1988. ,
DOI : 10.1080/00018738700101971
-xylylene) (Parylene) Thin Films, Chemistry of Materials, vol.14, issue.5, pp.1945-1949, 2002. ,
DOI : 10.1021/cm010454a
Chemical Vapor Deposition Polymerization:The Growth and Properties of Parylene Thin Films, 2004. ,
Theory of dielectrics; dielectric constant and dielectric loss, second edition, 1958. ,
Bases théoriques » Techniques de l'ingénieur Génie électriqueGao 16] Fully integrated wearable sensor arrays for multiplexed in situ perspiration analysis, Hnin Yin Yin NyeinNature, vol.529, 2000. ,
Polymerization of paraxylylene derivatives (Parylene polymerization). III. Heat effects during deposition of Parylene-N at various temperatures, J. Polym. Sci.,Polym. Chem, pp.24-215, 1986. ,
Surface Film Formation by Chemical Vapor Deposition of Di-p-xylylene: Ellipsometrical, Atomic Force Microscopy, and X-ray Studies, Langmuir, vol.16, pp.2887-2892, 2000. ,
A New, General Synthetic Method for the Preparation of Linear Poly-p-xylylenes, Journal of Polymer Science Part A-1: Polymer Chemistry, vol.4, issue.12, pp.3027-3039, 1966. ,
DOI : 10.1002/pol.1966.150041209
Antibiotic nanoparticles embedded into the Parylene C layer as a new method to prevent medical device-associated infections, Journal of Materials Chemistry B, vol.16, issue.1, pp.59-64, 2015. ,
DOI : 10.1016/S0731-7085(97)00009-5
A complex plane analysis of ?? dispersions in some polymers, J. Polym. Sci. : Part B: Polymer Physics, vol.14, pp.99-117, 1966. ,
A complex plane representation of dielectric and mechanical relaxation processes in some polymers, Polymer, vol.8, pp.161-210, 1967. ,
DOI : 10.1016/0032-3861(67)90021-3
Dielectric and mechanical relaxation in materials, analysis and interpretation to polymers, 1997. ,
The temperature dependence of relaxation processes, Journal of Physics C: Solid State Physics, vol.15, issue.25, pp.5171-5193, 1982. ,
DOI : 10.1088/0022-3719/15/25/010
Impedance and modulus spectroscopy of polycrystalline solid electrolytes, Journal of Electroanalytical Chemistry and Interfacial Electrochemistry, vol.74, issue.2, pp.125-143, 1976. ,
DOI : 10.1016/S0022-0728(76)80229-X
Wei Wang and Zhihong Li A cable-tie-type parylene cuff electrode for peripheral nerve interfaces, MEMS, vol.2014, 2014. ,
DOI : 10.1109/memsys.2014.6765560
Characteristic Study on Parylene-C Film for Thermal Isolation on Chip, Applied Mechanics and Materials, vol.713, issue.715, pp.713-715, 2015. ,
DOI : 10.4028/www.scientific.net/AMM.713-715.2610
Dielectric relaxation in solids, Journal of Physics D: Applied Physics, vol.32, issue.14, 1983. ,
DOI : 10.1088/0022-3727/32/14/201
Dielectric relaxation law, 1996. ,
The universal dielectric response and its physical significance, IEEE Transactions on Electrical Insulation, vol.27, issue.3, pp.407-423, 1992. ,
DOI : 10.1109/14.142701
Dielectric and Conduction Mechanisms of Parylene N at High Temperature: Phase-Transition Effect, The Journal of Physical Chemistry A, vol.119, issue.24, p.6428, 2015. ,
DOI : 10.1021/acs.jpca.5b01379
Structural and dielectric study of parylene C thin films, Applied Physics Letters, vol.949, issue.15, p.152901152901, 2009. ,
DOI : 10.1143/JJAP.46.6363
Étude des propriétés physico-chimiques et (di)-électriques du parylène C e couche mince, 2011. ,
Effect of Cl H Aromatic Substitution on Structural and Dielectric Properties of Poly (p-xylylene) Polymer, pp.3001-3007, 2012. ,
Dielectric properties of parylene AF4 as low-k material for microelectronic applications, Thin Solid Films, vol.520, issue.7, pp.2493-2497, 2012. ,
DOI : 10.1016/j.tsf.2011.10.025
URL : https://hal.archives-ouvertes.fr/hal-00653266
Experimental and Theoretical Study of AC Electrical Conduction Mechanisms of Semicrystalline Parylene C Thin Films, The Journal of Physical Chemistry A, vol.116, issue.3, pp.1051-1058, 2012. ,
DOI : 10.1021/jp207114u
URL : https://hal.archives-ouvertes.fr/hal-00815181
Ac-conductivity and dielectric relaxations above glass transition temperature for parylene-C thin films, Applied Physics A, vol.33, issue.4, pp.909-913 ,
DOI : 10.1023/A:1004398514901
URL : https://hal.archives-ouvertes.fr/hal-00653215
Structure and Dielectric Study of Poly(??,?? difluoro-p-xylylene) Thin Films: Highlight of the Substrate Temperature Effect, Chemical Vapor Deposition, vol.62, issue.4-6, pp.147-150, 2012. ,
DOI : 10.1351/pac199062091689
URL : https://hal.archives-ouvertes.fr/hal-00815127
Lowfrequency dielectric functions of dense and chevronic thin films of Parylene- C, Materials Letters, pp.95-63, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00992210
Structural and dielectric properties of parylene-VT4 thin films, Materials Chemistry and Physics, vol.143, issue.3, pp.908-914, 2014. ,
DOI : 10.1016/j.matchemphys.2013.08.044
URL : https://hal.archives-ouvertes.fr/hal-00992230
Effects of deposition temperature on Parylene-C properties, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), 2013. ,
DOI : 10.1109/MEMSYS.2013.6474260
Dielectric phenomena in solids, 2004. ,
Dielectric phenomena in solids with emphasis on physical concepts of electronic processes, 2004. ,
et al Parylene MEMS patency sensor for assessment of hydrocephalus shunt obstruction, Biomed Microdevices, vol.18, issue.87, 2016. ,
A novel fabrication method of Parylene-based microelectrodes utilizing inkjet printing, Sensors and Actuators B: Chemical, vol.238, pp.862-870, 2017. ,
DOI : 10.1016/j.snb.2016.07.122
Evaluation of the biocompatibility of a coating material for an implantable bladder volume sensor, The Kaohsiung Journal of Medical Sciences, vol.28, issue.3, pp.123-129, 2012. ,
DOI : 10.1016/j.kjms.2011.10.016
Polymerization of para-xylylene derivatives (parylene polymerization). I. Deposition kinetics for parylene N and parylene C, Journal of Polymer Science: Polymer Chemistry Edition, vol.22, issue.2, pp.22-475, 1984. ,
DOI : 10.1002/pol.1984.170220218
Crystallization during polymerization of poly-p-xylylene, Journal of Polymer Science Part A-2: Polymer Physics, vol.10, issue.10, pp.1949-1966, 1972. ,
DOI : 10.1002/pol.1972.180101007
???Xylylene, Journal of Applied Physics, vol.42, issue.12 ,
DOI : 10.1002/pol.1954.120136802
Organic transistors with high thermal stability for medical applications. DOI: 10, p.1721, 1038. ,
DOI : 10.1038/ncomms1721
Handbook of Raman spectroscopy, 2001. ,
Xiangfeng Duan §, and Zhiyong Fan " Large-Scale Integration of Semiconductor Nanowires for High- Performance Flexible, ACS Nano, vol.6, issue.3, pp.1888-1900, 2012. ,
The Role of Ionic Diffusion in Polarization in Vitreous Ionic Conductors, Physics and Chemistry Glasses. Phys. Chem. Glasses, vol.13, pp.171-179, 1972. ,
Parylene-C encapsulation for polymeric cantilever stability, 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) ,
DOI : 10.1109/DTIP.2015.7161032
X-ray study of crystalline structure of poly-p-xylylene films, J. Polym. Sci, vol.34, pp.761-765, 1992. ,
Glass transition dynamics and structural relaxation of PLLA studied by DSC: Influence of crystallinity, Polymer, vol.46, issue.19, pp.8258-8265, 2005. ,
DOI : 10.1016/j.polymer.2005.06.096
ELECTRICITY AND MAGNETISM, p.452 ,
DOI : 10.1017/CBO9780511709333.002
Dielectric Investigation of Parylene D Thin Films: Relaxation and Conduction Mechanisms, The Journal of Physical Chemistry A, vol.119, issue.35, pp.9210-9217, 2015. ,
DOI : 10.1021/acs.jpca.5b07459
Passivation of organic field effect transistor with photopatterned Parylene to improve environmental stability, Microelectronic Engineering, vol.163, pp.36-42, 2016. ,
DOI : 10.1016/j.mee.2016.06.001
Ray-Hua Horng., Improvements of Permeation Barrier Coatings Using Encapsulated Parylene Interlayers for Flexible Electronic, pp.180-185, 2007. ,
Dielectric dispersion and ac conductivity in???Iron particles loaded???polymer composites, Composites Part A: Applied Science and Manufacturing, vol.34, issue.12, p.1187, 2003. ,
DOI : 10.1016/j.compositesa.2003.08.002
Dielectric and thermal properties of parylene N and D films for power electronic surface insulation, 2015 IEEE 11th International Conference on the Properties and Applications of Dielectric Materials (ICPADM), 2015. ,
DOI : 10.1109/ICPADM.2015.7295320
Growth of sculptured polymer submicronwire assemblies by vapor deposition, Polymer, vol.46, issue.23, pp.9544-9548, 2005. ,
DOI : 10.1016/j.polymer.2005.07.092
Etudes Spectroscopy et cristallographique de nouveaux complexes et dérivés Nitrato, Chromato, Carboxylato et de PhN4CS-, thèse de doctorat, 2004. ,
The Rise of Organic Bioelectronics, Chemistry of Materials, vol.26, issue.1, p.679, 2014. ,
DOI : 10.1021/cm4022003
polymers: Parylene and polynaphthalene, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.17, issue.1, pp.17-266, 1999. ,
DOI : 10.1116/1.581544
Dielectric Spectroscopy of Polymeric Materials: Fundamentals and Applications, 1997. ,
-relaxations in aromatic polymers, Physical Review E, vol.91, issue.2, pp.21502-021502, 2004. ,
DOI : 10.1103/PhysRevLett.91.115701
Differential scanning calorimetry (DSC) of semicrystalline polymers, Analytical and Bioanalytical Chemistry, vol.408, issue.414, 2009. ,
DOI : 10.1016/j.polymer.2005.01.105
Low frequency dielectric relaxation processes and ionic conductivity of montmorillonite clay nanoparticles colloidal suspension in poly(vinyl pyrrolidone)???ethylene glycol blends, Express Polymer Letters, vol.2, issue.11, pp.800-809, 2008. ,
DOI : 10.3144/expresspolymlett.2008.93
Temperature studies of optical birefringence and X-ray diffraction with poly( p -xylylene), poly(chloro- p -xylylene) and poly(tetrafluoro- p -xylylene) CVD thin films, Polymer, vol.41, issue.7, pp.2379-2390, 2000. ,
DOI : 10.1016/S0032-3861(99)00419-X
Polymerization of para-xylylene derivatives. V. Effects of the sublimation rate of di-p-xylylene on the crystallinity of parylene C deposited at different temperatures, Journal of Polymer Science Part A: Polymer Chemistry, vol.25, issue.8, pp.2089-2106, 1987. ,
DOI : 10.1002/pola.1987.080250806
Novel Low Dielectric Constant Thin Film Materials by Chemical Vapor Deposition, 1999. ,
Crystallization during polymerization of poly-p-xylylene. II. Polymerization at low temperature, Journal of Polymer Science Part A-2: Polymer Physics, vol.11, issue.6, pp.11-1111, 1973. ,
DOI : 10.1002/pol.1973.180110606
Dongyang Kang ; Lingqian Zhang ; Yu-Chong Tai Advanced conformal parylene fabrication for micro/nano devices, SENSORS, p.2015 ,
Focus-tunable low-power electrowetting lenses with thin parylene films, Applied Optics, vol.54, issue.20, pp.6224-6229, 2015. ,
DOI : 10.1364/AO.54.006224
Human fibroblast attachment on fibrous parylene-C thin-film substrates, Materials Science and Engineering: C, vol.30, issue.8, pp.1252-1259, 2010. ,
DOI : 10.1016/j.msec.2010.07.003
Sub-monolayer percolation of pentacene on rough parylene-C dielectrics, Organic Electronics, vol.26, pp.439-442, 2015. ,
DOI : 10.1016/j.orgel.2015.08.009
A Model for the Vapor Deposition Polymerization of p - Xylylene, Macromolecules, vol.11, pp.72-76, 1978. ,
Malliaras Localized Neuron Stimulation with Organic Electrochemical Transistors on Delaminating Depth Probes Adv, pp.4405-4410, 2015. ,
DOI : 10.1002/adma.201500218
Ngo Survey of High- Temperature Polymeric Encapsulants for Power Electronics Packaging, IEEE Transactions on Components, Packaging and Manufacturing Technology, vol.15, issue.2, p.5, 2015. ,
High deposition rate parylene films, Journal of Crystal Growth, vol.183, issue.3, pp.385-390, 1998. ,
DOI : 10.1016/S0022-0248(97)00428-4
Polymerization of Paraxylylene Derivatives. VI. Morphology of Parylene-N and Parylene-C Films Investigated by Gas Transport Characteristics, Sci., Part B: Polym. Phys, pp.28-545, 1990. ,
Cheerios Effect Controlled by Electrowetting, Langmuir, vol.31, issue.30, pp.31-8502, 2015. ,
DOI : 10.1021/acs.langmuir.5b01479
Triboelectric Charging at the Nanostructured Solid/Liquid Interface for Area- Scalable Wave Energy Conversion and Its Use in Corrosion Protection, pp.7671-7677, 2015. ,
Etude de la mobilité moléculaire du PEN destine à la fabrication des condensateurs : influence de la microstructure, Thèse de Doctorat, 2002. ,