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Optimisation et analyses des propriétés physico-chimiques et diélectriques du parylène D

Abstract : This work is mainly focused on the elaboration and the characterization of parylene D thin films of few micrometers deposited by chemical vapor deposition (CVD). The goal of this study is to evaluate the potentialities of this polymer in order to replace the parylene N or C for specific applications or to integrate it in new applications. A first study consisted in evaluating the impact of the CVD process parameters (temperature of sublimation, temperature of pyrolysis, substrate temperature) on the surface morphology, the molecular structure and dielectric changes of parylene D. For that, we were based on several analyzes techniques as FTIR, XRD, DSC, TGA, AFM, SEM, DMA. Thermal stresses were applied to parylene D to evaluate their performance at high temperature (>200°C) and the changes on the crystal structure (size of crystallites, percentage of crystallinity,…) or the stability of the thermal properties (temperature of transition, temperature of crystallization, melting point) and dielectric properties (the dielectric permittivity, the dissipation factor, the electrical conductivity and the electric modulus). Dielectric and electrical properties of Parylene D were investigated by dielectric spectroscopy in a wide temperature ranges from -140°C to 350°C and frequency from 0.1 Hz to 1 MHz, respectively. (a, b and g)-relaxation mechanisms, interfacial polarization related to Maxwell-Wagner-Sillars and electrode polarization have been identified in this polymers. The dielectric performances of Parylene D have been also compared with parylenes N and C which are used in wide industrial applications. Optimized and controlled conditions of the CVD process of parylenes D are proposed in this work in relation to the properties. The obtained results open a new way for specific applications.
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Marwa Mokni. Optimisation et analyses des propriétés physico-chimiques et diélectriques du parylène D. Science des matériaux [cond-mat.mtrl-sci]. Université de Tunis El-Manar. Faculté des Sciences de Tunis (Tunisie), 2016. Français. ⟨NNT : 2016GREAY080⟩. ⟨tel-01664998⟩

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