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Nanotechnologie verte : des polymères de la biomasse comme résines éco-efficientes pour la lithographie

Mathieu Caillau 1
1 INL - C&N - INL - Chimie et Nanobiotechnologies
INL - Institut des Nanotechnologies de Lyon
Abstract : . Lithography is a key step in micro / nanotechnology with applications in the fields of microelectronics, flexible electronics, photonics, photovoltaics, microfluidics and biomedical. This lithography step requires the use of a writable resist to act as a temporary mask for transferring patterns in the underlying material by etching or deposition. Nowadays, lithography uses synthetic organic resin, organic solvents and hazardous chemicals which is contrary to environmental issues and generates additional costs associated with risk and waste management. Furthermore, regulation rules (REACh, US pollution act) tend to move toward the protection of human health and the environment from the risks that can be posed by chemicals and promote alternative chemicals. In this context, this PhD work aimed at replacing conventional synthetic organic resist with a biopolymer. This biopolymer will not be modified by synthetic organic chemistry, will be compatible with conventional lithography instruments and it should be developable in water. It was demonstrated that chitosan was a positive tone resist allowing accomplishing a complete lithography-etching process. The whole process was performed in aqueous solution without the use of hazardous chemicals. 50 nm features were obtained after ebeam lithography/plasma etching into a silica layer without the use of an additional masking layer. 0.3-0.5 μm feature were obtained using photolithography.
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Submitted on : Tuesday, December 12, 2017 - 12:07:31 AM
Last modification on : Wednesday, July 8, 2020 - 12:44:06 PM


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  • HAL Id : tel-01661444, version 1


Mathieu Caillau. Nanotechnologie verte : des polymères de la biomasse comme résines éco-efficientes pour la lithographie. Autre. Université de Lyon, 2017. Français. ⟨NNT : 2017LYSEC037⟩. ⟨tel-01661444⟩



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