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Conception et réalisation de microsystèmes optiques (MOEMS) en polymère pour l'optique adaptative intégrée sur diodes laser verticales (VCSELs)

Abstract : This thesis deals with the study and the fabrication of a novel type of polymer MOEMS (Micro Optical Electrical Mechanical Systems) to achieve passive or active beam shaping of Vertical-Cavity Surface-Emitting Lasers (VCSELs). To improve the photonic integration of these compact laser sources in optical communication and detection systems (sensors, biomedical analysis), we designed a polymer-based optical microsystem that is suitable with a post-processing integration on VCSELs. Its operation principle is based on the out-of-plane displacement of a suspended SU-8 membrane including a polymer refractive microlens at its surface. Thanks to electro-thermal actuation, the vertical displacement of the membrane allows to dynamically modify the microlens-source distance and leads to a vertical shift of the laser beam waist position. MOEMS actuation power and reliability were optimized owing to a comprehensive tri-dimensional thermo-electro-mechanical model that takes into account SU-8 material properties and precise geometry of the device. Technological steps necessary for the collective fabrication of such MOEMS on VCSELs arrays were also developed. In particular, we report on a new photoresist film transfer method we developed to achieve a highly uniform fabrication of high aspect ratio MOEMS on small-sized or fragile samples such as GaAs-based VCSELs wafers. This method that we call "soft thermal printing" is based on the use of a thermal nano-imprint set-up. Moreover, a simple and planar process for MOEMS fabrication was successfully tested. A dedicated inkjet printing process for drop-on-demand deposition of the microlens on the membrane center was also developed. Finally, the fabricated MOEMS were characterized. A vertical displacement as high as 8µm was observed for only 12.5mW applied, in good agreement with our 3D modeling results and first results on 850nm VCSEL dynamic beam focusing were obtained, demonstrating the interest of our approach.
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Submitted on : Tuesday, November 7, 2017 - 5:46:07 PM
Last modification on : Thursday, June 10, 2021 - 3:07:14 AM
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  • HAL Id : tel-01630568, version 1


Sami Abada. Conception et réalisation de microsystèmes optiques (MOEMS) en polymère pour l'optique adaptative intégrée sur diodes laser verticales (VCSELs). Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2015. Français. ⟨NNT : 2015TOU30374⟩. ⟨tel-01630568⟩



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