MEMS à veine fluidique intégrée pour la caractérisation et la pesée d'échantillons liquides

Abstract : MEMS and NEMS allow sensitive and precise mass detection consistent with micro- and bio- objects analysis. These systems are promising for biomedical research and particle metrology, and can be easily integrated in miniaturized multifunctional systems. Thererfore, characterization in liquid media remains tricky due to viscous dissipation consequent to the movement induced in the fluidic environment.In order to overcome this technological lock, our laboratory previously designed and fabricated specific MEMS devices for fluidic analysis; these thin plate resonators with and embedded microchannel are actuated in liquid media, with four capacitive electrodes providing both actuation and detection. The circulating fluid mass can be precisely measured by monitoring the device’s resonant frequency. The long-term objective is to be able to detect and weigh one single particle transported by the fluid.Two main objectives were fulfilled during these three years. First, the MEMS behaviour in presence of various liquids was evaluated, providing a fine-grained analysis of their performances as mass sensors. The measured resolution of our sensors is about a few g.L-1 with a sensitivity of 100 Hz.(g.m-3)-1.Meanwhile, a new generation of NEMS sensors with innovative features was designed; the objective is to decrease the effective mass and reduce the frequency noise, both for a better mass resolution.This thesis includes four chapters. The first one consists in a review of the existing techniques for particles characterization in fluid as well as MEMS and NEMS solutions for particles metrology described in the litterature. The second part of the manuscript presents the results of the experimental characterizations carried out on the first generation of sensors. The third chapter gathers the conclusions of these measurements and gives an outlook on possible improvements on both the design and the characterization of the sensors. At last, the fourth part describes the new generation of devices and discusses their characteristics in terms of expected resolution and applications.
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Céline Hadji. MEMS à veine fluidique intégrée pour la caractérisation et la pesée d'échantillons liquides. Mécanique des fluides [physics.class-ph]. Université Grenoble Alpes, 2016. Français. ⟨NNT : 2016GREAY063⟩. ⟨tel-01592054⟩

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