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Applications du fluxmètre gazeux à pression constante ; caractérisation métrologique et comparaisons aux méthodes de référence pour les mesures de débit de 4×10-12 mol/s à 4×10-7 mol/s

Abstract : This dissertation concerns the development and applications of a constant pressure gas flowmeter, the primary reference instrument used by National metrology laboratories to measure very low gas flows. It guarantees the traceability of low absolute pressures, via the continuous expansion method, and that of helium leaks, both related to applications in the field of vacuum. In addition, we have shown that the Laboratoire commun de métrologie (LCM) constant pressure flowmeter is well suited to micro-flow measurements, a sub-field of flow metering. Besides key points of the design and metrological characterization, this document describes the study of the continuous expansion method and work on comparisons of the constant pressure gas flowmeter with reference methods used at LCM, in particular the dynamic gravimetric method.
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https://tel.archives-ouvertes.fr/tel-01542405
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Submitted on : Monday, June 19, 2017 - 4:47:09 PM
Last modification on : Wednesday, September 28, 2022 - 5:54:18 AM
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  • HAL Id : tel-01542405, version 1

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Frédéric Boineau. Applications du fluxmètre gazeux à pression constante ; caractérisation métrologique et comparaisons aux méthodes de référence pour les mesures de débit de 4×10-12 mol/s à 4×10-7 mol/s. Instrumentations et Détecteurs [physics.ins-det]. Conservatoire national des arts et metiers - CNAM, 2016. Français. ⟨NNT : 2016CNAM1072⟩. ⟨tel-01542405⟩

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