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Conception et réalisation de micro-résonateurs piezoélectriques sur substrat de silicium sur isolant

Abstract : The acoustic waves, theoretically demonstrated in 1885 by the English scientist Lord Rayleigh, are nowadays an interesting research subject. It became essential to the fabrication of miniature and efficient systems of telecommunication, such as filters, oscillators or sensors. Devices using the acoustic waves are known as piezoelectric devices, because they transform RF signal into acoustic waves, and vice versa, thanks to the direct piezoelectric phenomenon. The development of these piezoelectric devices was essential to meet the particular and extreme requirements of the current systems of telecommunication (selectivity, miniaturization, low cost, ease of manufacturing and integration). This thesis is part of a global approach to develop the piezoelectric devices, notably the piezoelectric micro-resonators which constitute the latest generation. Two main axes have been developed during the research work: the theoretical study of piezoelectric micro-resonators through an electric modelling, on one hand, and, on the other hand, the description of the manufacturing processes accomplished in clean room of XLIM’s laboratory.
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  • HAL Id : tel-01405497, version 1

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Oussama Mortada. Conception et réalisation de micro-résonateurs piezoélectriques sur substrat de silicium sur isolant. Micro et nanotechnologies/Microélectronique. Université de Limoges, 2016. Français. ⟨NNT : 2016LIMO0075⟩. ⟨tel-01405497⟩

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