, 119 3.3.1 On-chip switching noise, p.122
, 134 3.4.1 Sub-circuit cells layouts, p.135
, INSA Lyon, tous droits réservés A Multistage Interleaved Synchronous Buck Converter With Integrated Output Filter in 0.18 um SiGe Process, IEEE Transactions on, vol.226, issue.12, pp.2164-2175, 2007.
, Agilent 4294A Precision Impedance Analyzer Data Sheet. Datasheet, 2008.
, A new toroidal-meander type integrated inductor with a multilevel meander magnetic core, IEEE Transactions on, vol.30, issue.1, pp.73-79, 1994.
, Micromachined planar inductors on silicon wafers for MEMS applications, IEEE Transactions on, vol.456, pp.866-876, 1998.
, An on-chip integrated autotuned hybrid current-sensor for high-frequency low-power dc-dc converters, Applied Power Electronics Conference and Exposition (APEC), 2015 IEEE, pp.445-450, 2015.
, A Fully Integrated 660 MHz Low-Swing Energy-Recycling DC–DC Converter, IEEE Transactions on Power Electronics, vol.24, issue.6, pp.1475-1485, 2009.
DOI : 10.1109/TPEL.2009.2013624
, Modeling and Pareto Optimization of Microfabricated Inductors for Power Supply on Chip, IEEE Transactions on, vol.28, issue.9, pp.4422-4430, 2013.
, A compact 120 MHz 1.8 V/1.2 V dual-output DC-DC converter with digital control, Custom Integrated Circuits Conference (CICC), p.2013
, High frequency EMC impact of switching to improve DC-DC converter performances, 15th European Conference on, 2013.
, Optimisation de convertisseurs DC-DC SoC (System On Chip) pour l'automobile, p.2015
, Effect of output capacitor ESR on dynamic performance of voltage-mode hysteretic controlled buck converter, Electronics Letters, vol.4920, 2013.
, A 200 MHz Integrated Buck Converter With Resonant Gate Drivers for an RF Power Amplifier, IEEE Transactions on, vol.27, issue.2, pp.610-613, 0193.
, Design Flow for High Switching Frequency and Large-Bandwidth Analog DC/DC Step-Down Converters for a Polar Transmitter, IEEE Transactions on Power Electronics, vol.27, issue.2, pp.838-847, 2012.
DOI : 10.1109/TPEL.2011.2158659
URL : https://hal.archives-ouvertes.fr/hal-00661407
, A 65 nm CMOS 100 MHz 87 % efficient DC-DC down converter based on dual-die system-in-package integration, 2009.
, A 50 MHz bandwidth multi-mode PA supply modulator for GSM, EDGE and UMTS application, Radio Frequency Integrated Circuits Symposium, pp.22-26, 0193.
, Fabrication and characterization of microinductors for distributed power converters, Magnetics, IEEE Transactions on 39, p.37, 2003.
DOI : 10.1109/TMAG.2003.812705
, FIVR -Fully Integrated Voltage Regulators on 4th Generation Intel Core SoCs Applied Power Electronics Conference and Exposition (APEC), 2014 Twenty-Ninth Annual IEEE, pp.432-439, 0198.
, Parasitic inductance of multilayer ceramic capacitors, In: AVX Tech. Bulletin, issue.4, 1997.
, Simple Low-Cost Hysteretic Controller for Single-Phase Synchronous Buck Converters, IEEE Transactions on Power Electronics, vol.22, issue.4, 2007.
DOI : 10.1109/TPEL.2007.900469
, Semiconductor structures with deep trench capacitor and methods of manufacture " . English. US 8987800 B2 (Armonk, NY (US)). US Patent 8,987,800, 2015.
, Monolithic CMOS low power digital level shifter, )). US Patent 4
, An active current-sensing constant-frequency HCC buck converter using phase-frequency-locked techniques, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.55, issue.4, pp.761-769, 2008.
DOI : 10.1109/TUFFC.2008.710
, A 10/30 MHz Fast Reference-Tracking Buck Converter With DDA-Based Type-III Compensator " . In: Solid-State Circuits, IEEE Journal, vol.4912, issue.28, pp.2788-2799, 0193.
, v1 Concept: Designing a Voltage-Mode Control as Current Mode With Near Time-Optimal Response for Buck-Type Converters, IEEE Transactions on, vol.3010, 2015.
, Stability Analysis and Design Procedure of Multiloop Linear LDO Regulators via State Matrix Decomposition, IEEE Transactions on, vol.2811, pp.5352-5363, 2013.
, A 400 A fully integrated silicon voltage regulator with in-die magnetically coupled embedded inductors url: http : / / www . psma . com/sites/default/files/uploads/tech-forums-nanotechno logy/resources/400a-fully-integrated-silicon-voltage- regulator.pdf (cit, p.37, 2010.
, Fundamentals of Power Electronics, 2001.
, A design study of microscale magnetic components for operation in the MHz frequency range, In: Journal of Micromechanics and Microengineering, vol.16, issue.38, 2006.
, Modelling and control of DC- DC converters, Power Engineering Journal, vol.125, pp.229-236, 1998.
, Planar inductor with ferrite layers for DC-DC converter, IEEE Transactions on, vol.394, issue.38, p.37, 2003.
, Integrated on-chip inductors using magnetic material (invited), Journal of Applied Physics, vol.103, issue.7, pp.7-927, 2008.
DOI : 10.1063/1.2838012
, A comprehensive power analysis and a highly efficient, mode-hopping DC-DC converter, ASIC, 2002. Proceedings. 2002 IEEE Asia- Pacific Conference on, pp.153-156, 2002.
, An 80 % peak efficiency, 0.84 mW sleep power consumption, fully-integrated DC-DC converter with buck/LDO mode control, Custom Integrated Circuits Conference (CICC), 0193.
, Latch-Up in CMOS Integrated Circuits, In: Nuclear Science IEEE Transactions on, vol.206, pp.293-299, 1973.
, A 20 MHz 200-500 mA Monolithic Buck Converter for RF Applications Twenty-Fourth Annual, Applied Power Electronics Conference and Exposition, 2009.
, A 233 MHz 80 %-87 % efficient four-phase DC- DC converter utilizing air-core inductors on package In: Solid- State Circuits, IEEE Journal, vol.404, pp.838-845, 0193.
, Comments on the optimum CMOS tapered buffer problem " . In: Solid-State Circuits, IEEE Journal, vol.29, issue.2, pp.155-158, 1994.
, Logic with Multiple Threshold Voltages
, Magnetic components modeling including thermal effects for DC-DC converters virtual prototyping " . Theses. Université Claude Bernard -Lyon I, 2014.
URL : https://hal.archives-ouvertes.fr/tel-01127289
, Historical introduction to capacitor technology, Electrical Insulation Magazine, IEEE, vol.26, issue.1, pp.20-25, 2010.
, An 82.4 % efficiency packagebondwire-based four-phase fully integrated buck converter with flying capacitor for area reduction, Solid-State Circuits Conference Digest of Technical Papers (ISSCC), pp.21-26
, 3D stacked buck converter with 15 um thick spiral inductor on silicon interposer for fine-grain power-supply voltage control in SiP's, 3D Systems Integration Conference (3DIC), 2010 IEEE International, 0193.
, ITRS Report on RF and Analog/Mixed-Signal Technologies (RFAMS). ITRS. 2012. url: http://www.itrs.net, 2012.
, High-power-density MHz-switching monolithic DC-DC converter with thin-film inductor, IEEE 31st Annual, vol.33, issue.38, pp.1485-1490, 2000.
, A megahertz switching DC/DC converter using FeBN thin film inductor, IEEE Transactions on, vol.385, issue.38, pp.3162-3164, 2002.
, System level analysis of fast, per-core DVFS using on-chip switching regulators, High Performance Computer Architecture IEEE 14th International Symposium on. Feb, pp.123-134, 2008.
, A Fully-Integrated 3-Level DC-DC Converter for Nanosecond-Scale DVFS, IEEE Journal of Solid-State Circuits, vol.47, issue.1, pp.206-219, 0193.
DOI : 10.1109/JSSC.2011.2169309
, A 1.8 V 30-to-70 MHz 87 % peak-efficiency 0.32 mm 2 4-phase time-based buck converter consuming 3 µA/MHz quiescent current in 65 nm CMOS, Solid-State Circuits Conference -(ISSCC), 2015 IEEE International, pp.216-218, 0193.
URL : https://hal.archives-ouvertes.fr/in2p3-00420482
, A planar inductor using Mn-Zn ferrite/polyimide composite thick film for low-Voltage and large-current DC-DC converter, Magnetics, IEEE Transactions on 41, p.10, 2005.
, A 500 MHz, 68 % Efficient, Fully on- Die Digitally Controlled Buck Voltage Regulator on 22 nm Tri- Gate CMOS, 2014.
, Fully-Integrated On-Chip DC-DC Converter With a 450X Output Range In: Solid-State Circuits, IEEE Journal, vol.468, 0193.
, Low-voltage-swing monolithic dc-dc conversion " . In: Circuits and Systems II: Express Briefs, IEEE Transactions on, vol.515, pp.241-248, 2004.
, Cascode Monolithic DC-DC Converter for Reliable Operation at High Input Voltages, Analog Integrated Circuits and Signal Processing, vol.51, issue.5, pp.231-238, 2005.
DOI : 10.1007/s10470-005-6757-6
, Haswell: A Family of IA 22 nm Processors In: Solid-State Circuits, IEEE Journal, vol.501, pp.49-58, 2015.
, Silicon interposers with integrated passive devices, an excellent alternativ to discrete components, Microelectronics Packaging Conference (EMPC), 2013.
, Fabrication and Analysis of High-Performance Integrated Solenoid Inductor With Magnetic Core, IEEE Transactions on Magnetics, vol.44, issue.11, pp.4089-4095, 2008.
DOI : 10.1109/TMAG.2008.2003398
, A 90-240 MHz Hysteretic Controlled DC-DC Buck Converter With Digital Phase Locked Loop Synchronization In: Solid-State Circuits, IEEE Journal, vol.469, 0193.
, A Fully-Integrated Buck Converter Design and Implementation for On-Chip Power Supplies, Journal of Computers, vol.7, issue.5, 0193.
DOI : 10.4304/jcp.7.5.1270-1277
, Advances towards fully integrated, single chip power management, IEEE 33rd International, 2011.
, 30-MHz Power Inductor Using Nano-Granular Magnetic Material, 2007 IEEE Power Electronics Specialists Conference, pp.1773-1776, 2007.
DOI : 10.1109/PESC.2007.4342268
, A 1500 mA, 10 MHz on-time controlled buck converter with ripple compensation and efficiency optimization, Applied Power Electronics Conference and Exposition (APEC), 2012 Twenty-Seventh Annual IEEE, pp.1232-1237, 2012.
, Design of a 20 MHz DC-DC Buck Converter with 84 % Efficiency for Portable Applications, 24th International Conference on, pp.316-321, 0193.
, Planar inductor with ferrite layers for DC-DC converter " . In: Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on, pp.891-894, 2005.
, INSA Lyon, tous droits réservés BIBLIOGRAPHY Light Load Efficiency Improvement in High Frequency DC-DC Buck Converter Using Dynamic Width Segmentation of Power MOSFET, VLSI Design and 2014 13th International Conference on Embedded Systems 27th International Conference on, pp.563-568, 2014.
, Magnetics on silicon: an enabling technology for power supply on chip, IEEE Transactions on, vol.203, pp.585-592, 2005.
, Review of Integrated Magnetics for Power Supply on Chip (PwrSoC), IEEE Transactions on, vol.2711, pp.4799-4816, 2012.
, Power electronics : converters, applications, and design. Third, 2003.
, Design and Fabrication of On-Chip Coupled Inductors Integrated With Magnetic Material for Voltage Regulators, IEEE Transactions on, vol.476, issue.38, pp.1678-168621161, 2011.
, Optimization of CMOS Transistors for Low Power DC-DC Converters, pp.2151-2157, 2005.
, Micro-DC/DC converter that integrates planar inductor on power IC, IEEE Transactions on, vol.36, issue.38, 2000.
, Review of high frequency, highly integrated inductive DC-DC converters, Integrated Power Systems (CIPS), 2014 8th International Conference on
, url: https://hal.archives-ouvertes.fr/ hal-01191413v1 (cit, pp.1-7, 2014.
, Improved on-chip components for integrated DC-DC converters in 0.13 µm CMOS, ESSCIRC, 2009. ESSCIRC '09. Proceedings of, pp.448-451, 2009.
, CMOS current reference without resistance " . In: Solid-State Circuits, IEEE Journal, vol.327, 1997.
, Stacked-chip Implementation of On-Chip Buck Converter for Power-Aware Distributed Power Supply Systems In: Solid-State Circuits Conference, ASSCC 2006. IEEE Asian, 0193.
, Proposed Switching Losses Model for Integrated Point-of-Load Synchronous Buck Converters, IEEE Transactions on, vol.30, issue.9, 2015.
, Low-Resistance Integrated Toroidal Inductor for Power Management, IEEE Transactions on, vol.4210, issue.38, p.37, 2006.
, A 3.6-to-1.8 V Cascode Buck Converter With a Stacked LC Filter in 65-nm CMOS " . In: Circuits and Systems II: Express Briefs, IEEE Transactions on PP, pp.99-130, 0193.
, Embedding active components inside printed circuit board (PCB) -a solution for miniaturization of electronics, Advanced Packaging Materials: Processes, Properties and Interfaces , 2005. Proceedings. International Symposium on, pp.1-4, 2005.
, Calculation and stability investigation of periodic steady states of the voltage controlled Buck DC-DC converter, IEEE Transactions on, vol.19, issue.4, 2004.
, Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: application to low-megahertz DC-DC converters, In: Magnetics, IEEE Transactions on, vol.395, issue.38, pp.3184-3186, 2003.
, Planar spiral inductors with multilayer micrometer-scale laminated cores for compactpackaging power converter applications, IEEE Transactions on, vol.40, issue.4, pp.2020-2022, 2004.
, Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices, Journal of Micromechanics and Microengineering, vol.848, issue.4, pp.3070960-1317, 1998.
, Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores, Magnetics, IEEE Transactions on, vol.355, issue.38, 1999.
, High efficiency, high switching speed, AlGaAs/GaAs P-HEMT DC???DC converter for integrated power amplifier modules, Analog Integrated Circuits and Signal Processing, vol.3, issue.11, pp.331-348, 0193.
DOI : 10.1007/s10470-010-9543-z
, A 100 MHz Two-Phase Four-Segment DC-DC Converter With Light Load Efficiency Enhancement in 0.18 µm CMOS " . In: Circuits and Systems I: Regular Papers, IEEE Transactions on, vol.608, pp.21-26, 0193.
, Microfabricated V-Groove Power Inductors for High-Current Low-Voltage Fast-Transient DC-DC Converters, 2005.
, Thin film inductor for microswitching converters using a high resistive Fe-Zr-O film, Proceedings of the International Power Electronics Conference, IPEC'00, pp.315-319, 2000.
, Planar power inductor using FeCoBN magnetic film with high saturation magnetization and high electrical resistivity, Proceedings of the International Power Electronics Conference, IPEC'00, pp.303-308, 2000.
, Understanding and applying current-mode control theory In: Power Electronics Technology Exhibition and Conference (PES07), 2007.
, A 6 A 40 MHz four-phase ZDS hysteretic DC-DC converter with 118 mV droop and 230 ns response time for a 5 A/5 ns load transient " . In: Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2014 IEEE International, pp.80-81, 0193.
, A VHF-Level Fully Integrated Multi-Phase Switching Converter Using Bond-Wire Inductors, On-Chip Decoupling Capacitors and DLL Phase Synchronization, Applied Power Electronics Conference and Exposition, p.2014
, A simple approach to a linear control of switched capacitor DC-DC converters in system-on-chip, Control and Modeling for Power Electronics (COMPEL), 2014 IEEE 15th Workshop on, 2014.
, Contribution to the design of switchedcapacitor voltage regulators in 28 nm FDSOI CMOS, p.2015
URL : https://hal.archives-ouvertes.fr/tel-01278508
, An integrated four-phase buck converter delivering 1 A/mm 2 with 700 ps controller delay and network-on-chip load in 45 nm SOI, Custom Integrated Circuits Conference (CICC), 0193.
, A 2.5D Integrated Voltage Regulator Using Coupled-Magnetic-Core Inductors on Silicon Interposer " . In: Solid- State Circuits, IEEE Journal, vol.481, pp.244-254, 2013.
, Integrated Magnetic Core Inductors with Interleaved Windings
, url: https : / / www . google.fr/patents/US20140203398 (cit, p.36, 2014.
, 3D Power Delivery for Microprocessors and High-Performance ASICs, APEC 07, Twenty-Second Annual IEEE Applied Power Electronics Conference and Exposition, pp.127-133, 2007.
DOI : 10.1109/APEX.2007.357505
, Synchronous Buck Converter With Output Impedance Correction Circuit, IEEE Transactions on, vol.287, pp.3415-3427, 2013.
, Power metal oxide semiconductor field effect transistors with accurate current sensing function over a wide temperature range, pp.503-507, 2011.
, On the Practical Design of a Sliding Mode Voltage Controlled Buck Converter, IEEE Transactions on Power Electronics, vol.20, issue.2, pp.425-437, 2005.
DOI : 10.1109/TPEL.2004.842977
, Wide Band Gap Semiconductors Benefits for High Power, High Voltage and High Temperature Applications, Advanced Materials Research Advances in Innovative Materials and Applications, pp.46-51, 2011.
DOI : 10.4028/www.scientific.net/AMR.324.46
URL : https://hal.archives-ouvertes.fr/hal-00799902
, Sliding mode control in electromechanical systems Taylor & Francis systems and control book series, these.pdf © [F. Neveu], p.325, 1999.
, Fast control technique for high frequency DC/DC integrated converter based on non-invasive output capacitance current estimation, Control and Modeling for Power Electronics (COMPEL), 2010.
, Monolithic integration of a 3-level DCM-operated low-floating-capacitor buck converter for DC-DC step-down donversion in standard CMOS, Power Electronics Specialists Conference, pp.4229-4235, 0193.
, Level shifter for ultra-deep submicron CMOS designs, 2002.
, High-frequency micro-machined power inductors, Proceedings of the Joint European Magnetic Symposia, pp.290-291, 2005.
DOI : 10.1016/j.jmmm.2004.11.434
, Micro-inductors integrated on silicon for power supply on chip, Proceedings of the Joint European Magnetic Symposia, pp.233-237, 2007.
DOI : 10.1016/j.jmmm.2007.02.098
, Thin-Film-Integrated Power Inductor on Si and its Performance in an 8 MHz Buck Converter
, Integrated magnetics on silicon for power supply in package (PSiP) and power supply on chip (PwrSoC), 3rd Electronics System Integration Technology Conference ESTC, 2010.
DOI : 10.1109/ESTC.2010.5642892
, A fully-integrated 0.18 m CMOS DC- DC step-down converter, using a bondwire spiral inductor, Custom Integrated Circuits Conference, pp.20-26, 0193.
, A Fully Integrated CMOS 800 mW Four-Phase Semiconstant ON/OFF-Time Step-Down Converter, IEEE Transactions on, vol.262, issue.26, pp.326-333, 2011.
, Basic DC-DC Converter Theory, pp.27-63978, 2011.
DOI : 10.1007/978-94-007-1436-6_2
, Inductive DC-DC Converter Topologies, pp.65-122978, 2011.
DOI : 10.1007/978-94-007-1436-6_3
, A High-Efficiency DC-DC Converter Using 2 nH Integrated Inductors In: Solid-State Circuits, IEEE Journal, vol.434, issue.37, pp.21-26, 0193.
, Analysis of coupled inductors for low-ripple fast-response buck converter, Circuits and Systems, 2008.
, Microfabricated V-groove power inductors using multilayer Co-Zr-O thin films for very-high-frequency DC-DC converters, 2011 IEEE Energy Conversion Congress and Exposition, pp.4384-4394, 2013.
DOI : 10.1109/ECCE.2011.6064010