S. Xpark, respectivement à 3000 et 1260 cm -1 ) mais aussi dans l'intervalle 700-1300 cm -1 , caractéristiques de matériaux de nature polymère, 1990.

. Si-h, 2900 et 2110 cm -1 ) Le fait que l'on soit en présence d'un (Figure 52), ce qui indique qu'il n'y a presque pas de pénétration dans les matériaux préparés à haute température

. En-outre, eau (WCA) des échantillons préparés à 230°C sont plus élevés que ceux des échantillons préparés à température ambiante. Par exemple, WCA = 64° pour MO-Etude1-03 alors que WCA = 84° pour MO-Etude1-07. Cette tendance reflète une plus faible

. Ainsi, analyse ellipsométrique-porosimétrique, complétés de ceux des mesures d'angles de contact de l'eau, confirment clairement que le réseau des films déposés à température ambiante peut accueillir facilement de petites molécules (telles que l'eau ou l'éthanol)

. Haacké, Les résultats présentés dans cette partie ont fait l'objet d'une publication, 2015.

. Afin, analyse des spectres, nous avons décomposé le massif 1300-630 cm -1 . Les positions et les attributions des bandes sont répertoriées dans le Tableau 19 La Figure 62 (a) montre une décomposition typique pour MO-Etude3-03 (6,5 sccm en NH 3 ) dans la gamme de 1300 à 600 cm -1 . L'évolution des aires des bandes d'absorption correspondantes est tracée en fonction du débit d'ammoniac sur la Figure 62 (b)

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