Ordonnancement sur machines parallèles appliqué à la fabrication de semi-conducteurs : ateliers de photolithographie

Abstract : Semiconductor manufacturing has grown considerably in recent decades, due to new industrial applications of microelectronic devices. The related manufacturing process is known to be complex. A bottleneck process step, the photolithography workshop, gathers various types of constraints, related to the number of auxiliary resources and the tools characteristics. The aims of the thesis were to model this workstation as a parallel machine scheduling problem and to optimize various criteria, determined by industrial needs. Some complexity results are provided and optimization algorithms led to an industrial application, i.e. a software providing optimized schedules in a specific fab.
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Abdoul Bitar. Ordonnancement sur machines parallèles appliqué à la fabrication de semi-conducteurs : ateliers de photolithographie. Autre. Ecole Nationale Supérieure des Mines de Saint-Etienne, 2015. Français. ⟨NNT : 2015EMSE0808⟩. ⟨tel-01320281⟩

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