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Modeling, fabrication and characterization of resonant piezoelectric nano mechanical systems for high resolution chemical sensors

Abstract : Resonant MEMS and NEMS are excellent candidate for the realization of low cost and high resolution gas sensing systems that have several applications in security, defense, and environment and health care domains. However, the question of the transduction technique used to couple micro or nano scale signals to the macro scale is still a key issue. Piezoelectric transduction can be advantageously exploited but has been rarely studied at the nano-scale. The objective of this PhD is thus to progress toward the realization of high-resolution gas sensor using piezoelectric micro/nano cantilevers resonators and cover the whole prototyping chain from device fabrication to proof of principle experiment. Our first contribution in this research relates the analytical modeling of the sensing performance and the system and design optimization. In particular we demonstrate that decreasing the piezoelectric active film thickness below 100 nm is particularly beneficial. The second contribution relates the fabrication, characterization and demonstration of the high sensing performances of 80 μm long cantilevers embedding a 50 nm thick piezoelectric AlN film for transduction. These devices exhibit state of the art performances in terms of resonance frequency deviation down to the 〖10〗^(-8) range. They allow thus the detection of Di-Methyl-Methyl-Phosphonate vapors, a sarin gas simulant, with concentration as low as 10 ppb. Although the level of integration of our sensing system is not sufficient for real life application, these results prove the high potential of these piezoelectric cantilever resonators for future industrial development.
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https://tel.archives-ouvertes.fr/tel-01192918
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Submitted on : Thursday, September 3, 2015 - 7:42:05 PM
Last modification on : Thursday, June 11, 2020 - 5:04:06 PM
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  • HAL Id : tel-01192918, version 1

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Paul Ivaldi. Modeling, fabrication and characterization of resonant piezoelectric nano mechanical systems for high resolution chemical sensors. Micro and nanotechnologies/Microelectronics. Université de Grenoble, 2014. English. ⟨NNT : 2014GRENT109⟩. ⟨tel-01192918⟩

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