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Quality and Reliability of RF-MEMS Switches for Space Applications

Abstract : The thesis deals with reliability of tiny electro-mechanical components called MEMS. MEMS stands for Micro-Electro-Mechanical Systems. These components, designed for switching applications, are suitable candidates for telecommunications due to their low power consumption, Radio-Frequencies (RF) performances, compactness and lightness. A MEMS is fabricated using processes of integrated circuit manufacturing that makes its cost relatively low. Few of these components are commercially available and more are expected to be in the market as soon as reliability issues will be solved. Reliability issues studied in the thesis regard mechanical creep and acceleration factors. The mechanical creep occurs in our suspended structures whilst enduring a constant force, it results in deformation of structures and shift of parameters. Two innovative test benches are developed to assess mechanical creep in RF-MEMS switches. The acceleration factors are keys to conduct accelerated testings and predict lifetime of RF-MEMS switches. Parameters such as bias voltage, input-to-output voltage, temperature are varied to assess lifetime of switches and extract these acceleration factors.
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Submitted on : Tuesday, June 9, 2015 - 10:12:46 AM
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  • HAL Id : tel-01161778, version 1



Emilien Lemoine. Quality and Reliability of RF-MEMS Switches for Space Applications. Micro and nanotechnologies/Microelectronics. Université de Limoges, 2014. English. ⟨NNT : 2014LIMO0062⟩. ⟨tel-01161778⟩



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