Skip to Main content Skip to Navigation

Développement de filières technologiques pour la réalisation de micro-supercondensateurs intégrés sur silicium

Thi Ty Mai Dinh 1
1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The recent advances in microelectronics have led, during the last decade, to the development of embedded systems, particularly wireless sensor networks. Many applications of these systems (industrial process optimization, traffic and environmental monitoring...) have attracted the attention of researchers and investors. One of the main challenges limiting the implementation of these wireless sensor networks remains the autonomy of energy. Harvesting micro-devices extracting renewable energy from various ambient environmental sources (thermal, mechanical, solar energy) have received in this sense an increasing research interest in recent years, with the objective to obtain autonomous self-powered systems. The harvested energy is usually stored in micro-batteries. However, these devices have low power, limited lifetime and restricted operation temperatures. The use of micro-supercapacitors, as an alternative or a complementary device to micro-batteries, could overcome these limitations. In this thesis, we have focused on the development of technological fields to realize on-chip micro-supercapacitors, with good properties in terms of power and energy density, operating voltage, size and lifetime. High resolution micro-supercapacitors with high performance have been obtained in this thesis. Innovative electrolytes as gels allowed to develop all-solid-state micro-devices, which can be produced on a large scale. Ultra-high specific capacitance has been also obtained by combining materials of high specific surface and materials of high specific capacitance within an electrode. Finally, asymmetric micro-supercapacitors have been developed for extending the potential window and, therefore, improving the energy density of the micro-devices.
Complete list of metadata

Cited literature [17 references]  Display  Hide  Download
Contributor : Arlette Evrard <>
Submitted on : Tuesday, May 12, 2015 - 8:19:04 AM
Last modification on : Thursday, June 10, 2021 - 3:02:20 AM
Long-term archiving on: : Wednesday, April 19, 2017 - 8:44:56 PM


  • HAL Id : tel-01150481, version 1


Thi Ty Mai Dinh. Développement de filières technologiques pour la réalisation de micro-supercondensateurs intégrés sur silicium. Micro et nanotechnologies/Microélectronique. Universite Toulouse III Paul Sabatier, 2014. Français. ⟨tel-01150481⟩



Record views


Files downloads