Robotic microassembly and micromanipulation at femto-st, Journal of Molecular Biology Research, vol.8, issue.2, pp.91-106, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00834084
An analytical generalized prandtlishlinskii model inversion for hysteresis compensation in micropositioning control ,
Scanning and tunable micro-optics for endoscopic optical coherence tomography, Journal of Microelectromechanical Systems, vol.20, issue.6, pp.1462-1472, 2011. ,
URL : https://hal.archives-ouvertes.fr/hal-00662984
Fiber optic tunable probe for endoscopic optical coherence tomography, Journal of Optics A: Pure and Applied Optics, vol.10, issue.4, p.44012, 2008. ,
Electrothermal microgrippers for pick-and-place operations, Microelectronic Engineering, vol.85, pp.5-6, 2008. ,
Self-sensing force control of a piezoelectric actuator, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.55, pp.12-2571, 2008. ,
URL : https://hal.archives-ouvertes.fr/hal-00391444
Design of a mems-based resonant force sensor for compliant, passive microgripping, p.7782, 2005. ,
Towards micro-assembly of hybrid moems components on a reconfigurable silicon free-space micro-optical bench, Journal of Micromechanics and Microengineering, vol.20, issue.4, p.45012, 2010. ,
A six-axis mems force-torque sensor with micro-newton and nano-newtonmeter resolution, Journal of Microelectromechanical Systems, vol.18, issue.2, pp.433-441, 2009. ,
Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field, Journal of Microelectromechanical Systems, vol.16, issue.1, pp.7-15, 2007. ,
Parallel microassembly with electrostatic force fields, IEEE International Conference on Robotics and Automation, vol.2, pp.1204-1211, 1998. ,
Modelling of a mems-based microgripper: application to dexterous micromanipulation, IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), pp.5634-5639, 2010. ,
URL : https://hal.archives-ouvertes.fr/hal-00544636
Modeling and optimal force control of a nonlinear electrostatic microgripper, IEEE/ASME Transactions on Mechatronics, vol.18, issue.3, pp.1130-1139, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00874563
Noise characterization in millimeter sized micromanipulation systems, International journal of Mechatronics, vol.21, pp.1087-1097, 2011. ,
URL : https://hal.archives-ouvertes.fr/hal-00672159
An inversion-based model predictive control with an integral-of-error state variable for piezoelectric actuators, IEEE/ASME Transactions on Mechatronics, vol.18, issue.3, p.895904, 2013. ,
A two dimensional vision-based force sensor for microrobotic applications. Sensors & Actuators: A Physical, pp.340-351, 2011. ,
Microrobotics for Micromanipulation, 2010. ,
DOI : 10.1002/9781118622810
URL : https://hal.archives-ouvertes.fr/hal-00490381
Hybrid microassembly for massively parallel assembly of microchips with water mist, International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), pp.38-43, 2012. ,
Mems-based miniature optical pickup, IEEE Transactions on Magnetics, vol.41, issue.2, pp.967-970, 2005. ,
Nonlinear hysteresis compensation of piezoelectric ceramic actuators, Journal of Intelligent Material Systems and Structures, vol.7, issue.2, pp.150-156, 1996. ,
Positioning accuracy characterization of assembled microscale components for micro-optical benches, Assembly Automation, vol.34, issue.1, pp.68-77, 2014. ,
URL : https://hal.archives-ouvertes.fr/hal-00972276
Signal Measurement and Estimation Techniques for Micro and Nanotechnology, 2011. ,
URL : https://hal.archives-ouvertes.fr/hal-00719981
Vibration compensation for high speed scanning tunneling microscopy, Review of Scientific Instruments, vol.70, issue.12, p.46004605, 1999. ,
A multiscale assembly and packaging system for manufacturing of complex micro-nano devices, IEEE Transactions on Automation Science and Engineering, vol.9, issue.1, pp.160-170, 2012. ,
Design and manufacturing of a fourier transform microspectrometer, IEEE Conference on Nanotechnology, pp.837-840, 2008. ,
On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer, IEEE Conference on Automation Science and Engineering, pp.959-966, 2008. ,
3 : Multiscale , deterministic micro-nano assembly system for construction of on-wafer microrobots, IEEE International Conference on Robotics and Automation, pp.10-14 ,
The constitutive equations of a piezoelectric duo-bimorph, Proceedings of the IEEE International Symposium on Assembly and Task Planning, pp.10-11, 2003. ,
A four???degree???of???freedom microprehensile microrobot on chip, Assembly Automation, vol.24, issue.1, pp.33-42, 2004. ,
DOI : 10.1108/01445150410517165
Microassembly of 3-d microstructures using a compliant, passive microgripper, Journal of Microelectromechanical Systems, vol.13, issue.2, pp.176-189, 2004. ,
Mechanical fastener designs for use in the microassembly of 3d microstructures, Proceeding of ASME International Mechanical Engineering Congress and Exposition, pp.19-21, 1319. ,
Development of a 6 degree of freedom robotic micromanipulator for use in 3d mems microassembly, IEEE International Conference on Robotics and Automation, pp.15-19, 2006. ,
Moems chip-level optical fiber interconnect Advanced Packaging External force control of an industrial puma 560 robot, IEEE Transactions on Journal of Robotic Systems, vol.2836, issue.6, pp.618-523, 1994. ,
Effect of contact deformations on the adhesion of particles, Journal of Colloid and Interface Science, vol.53, p.314326, 1975. ,
A survey of control issues in nanopositioning, IEEE Trans. on Control Systems Technology, vol.15, pp.15-802, 2007. ,
The Lucent LambdaRouter: MEMS technology of the future here today, IEEE Communications Magazine, vol.40, issue.3, p.7579, 2002. ,
DOI : 10.1109/35.989760
High-bandwidth piezoresistive force probes with integrated thermal actuation, Journal of Micromechanics and Microengineering, vol.22, issue.9, p.95012, 2012. ,
Design of a precision compliant parallel positioner driven by dual piezoelectric actuators, Sensors and Actuators A: Physical, vol.135, issue.1, pp.250-256, 2007. ,
Electrothermal microgripper with large jaw displacement and integrated force sensors, Journal of Microelectromechanical Systems, vol.17, issue.6, p.15461555, 2008. ,
Emerging digital micromirror device (dmd) applications, Proceedings SPIE 4985, MOEMS Display and Imaging Systems 4985, pp.14-25, 2003. ,
Pi force control of a microgripper for assembling biomedical microdevices, IEE Proceedings Circuits Devices Systems, pp.348-352, 2001. ,
Three-dimensional microfabrication for a multi-degreeof-freedom capacitive force sensor using fibre-chip coupling, Journal of Micromechanics and Microengineering, vol.10, 2000. ,
Understanding bandwidth limitations in robot force control, IEEE International Conference on Robotics and Automation, vol.4, pp.904-909, 1987. ,
Contact stiffness and damping estimation for robotic systems, The International Journal of Robotics Research, vol.22, issue.1, pp.41-57, 2003. ,
Piston motion performance analysis of a 3dof electrothermal mems scanner for medical applications, International Journal of Optomechatronics, vol.8, pp.3-179, 2014. ,
URL : https://hal.archives-ouvertes.fr/hal-01324538
An implantable optical blood pressure sensor based on pulse transit time, Biomed Microdevices, vol.15, issue.1, pp.73-81, 2013. ,
Hybrid position/force control: a correct formulation, The International journal of robotics research, vol.11, issue.4, pp.299-311, 1992. ,
New three-dimensional integration technology based on reconfigured wafer-on-wafer bonding technique, IEEE International Electron Devices Meeting (IEDM), pp.985-988, 2007. ,
Piezoelectric scanning mirrors for endoscopic optical coherence tomography, Journal of Micromechanics and Microengineering, vol.19, issue.9, p.95012, 2009. ,
Micromachined array-type mirau interferometer for mems metrology, Proc. SPIE 8494, Interferometry XVI: Applications, 2012. ,
Robotic micro-assembly of microparts using a piezogripper, Proc. of the, pp.4042-4047, 2008. ,
In-vitro sensing of biomechanical forces in live cells by a whispering gallery mode biosensor, Biosensors and Bioelectronics, vol.25, p.418427, 2009. ,
A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer, Journal of Micromechanics and Microengineering, vol.21, 2011. ,
Optical coherence tomography, Science, vol.254, pp.5035-1178, 1991. ,
Visual-based impedance control of out-of-plane cell injection systems, IEEE Transactions on Automation Science and Engineering, vol.6, pp.3-565, 2009. ,
Piezoelectric force sensor for scanning force microscopy, Sensors and Actuators A: Physical, vol.43, pp.1-3, 1994. ,
Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy, Sensors and Actuators A: Physical, vol.54, pp.1-3, 1996. ,
Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators, Review of Scientific Instruments, vol.80, pp.12-126103, 2009. ,
URL : https://hal.archives-ouvertes.fr/hal-00440779
In vivo endoscopic optical coherence tomography of esophagitis, barrett's esophagus, and adenocarcinoma of the esophagus, Endoscopy, vol.32, pp.10-750755, 2000. ,
Piezoresistance and electrical resistivity of pd, au, and cu films, Thin Solid Films, vol.434, pp.316-322, 2003. ,
Contact mechanics Force tracking impedance control of robot manipulators under unknown environment, IEEE Transactions on Control Systems Technology, vol.12, pp.3-474, 1987. ,
Experimental studies of neural network impedance force control for robot manipulators, IEEE International Conference on Robotics and Automation, vol.4, pp.3453-3458, 2001. ,
Threedimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror, Applied Physics Letters, vol.88, issue.16, 2006. ,
Robust compliant motion for manipulators , parts i and ii, IEEE Journal of Robotics and Automation, vol.2, issue.2, pp.83-105, 1986. ,
Modélisation, identification et commande des robots, Hermes, 1999. ,
Nanonewton force-controlled manipulation of biological cells using a monolithic mems microgripper with two-axis force feedback, Journal of Micromechanics and Microengineering, vol.18, pp.5-055013, 2008. ,
Two-axis magnetically-driven mems scanning catheter for endoscopic high-speed optical coherence tomography, Optics Express, vol.15, pp.26-1813018140, 2007. ,
Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications, Journal of Micromechanics and Microengineering, vol.24, pp.3-035018, 2014. ,
URL : https://hal.archives-ouvertes.fr/hal-00958816
Explicit force control v.s. impedance control for micromanipulation, ASME International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC), pp.1-09, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00868627
Automated guiding task of a flexible micropart using a two-sensing-finger microgripper, IEEE Transactions on Automation, Science and Engineering, vol.10, issue.3, pp.515-524, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00869514
Emd-based filtering using similarity measure between probability density functions of imfs, IEEE Transactions on Instrumentation and Measurement, vol.63, issue.1, pp.27-34, 2014. ,
URL : https://hal.archives-ouvertes.fr/hal-01083721
Three-dimensional integration technology using through-si via based on reconfigured wafer-to-wafer bonding, IEEE Custom Integrated Circuits Conference (CICC), pp.1-4, 2010. ,
Real-time rigid-body visual tracking in a scanning electron microscope, The International Journal of Robotics Research, vol.28, p.498511, 2009. ,
Piezoelectric bimorph charge mode force sensor, Sensors and Actuators A: Physical, vol.153, issue.1, p.4249, 2009. ,
Closed-loop control of silicon nanotweezers for improvement of sensitivity to mechanical stiffness measurement and bio-sensing on dna molecules, IEEE/RSJ International Conference on Intelligent Robots and Systems, pp.1022-1027, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00912496
Non-contact batch micro-assembly by centrifugal force, IEEE International Conference on Micro Electro Mechanical Systems, pp.24-24, 2002. ,
Feedforward control of piezoactuators in atomic force microscope systems, IEEE Control Systems, vol.29, issue.1, pp.70-82, 2009. ,
Monolithic integration of a micromachined piezoresistive flow sensor, Journal of Micromechanics and Microengineering, vol.20, 2010. ,
Ultrasensitive nems-based cantilevers for sensing, scanned probe and very-high frequency applications, Nature Nanotechnology, vol.2, p.114120, 2007. ,
Environment estimation for enhanced impedance control, IEEE International Conference on Robotics and Automation, vol.2, pp.1854-1859, 1995. ,
Modeling of a three-layer piezoelectric bimorph beam with hysteresis, Journal of Microelectromechanical Systems, vol.4, issue.4, pp.230-237, 1995. ,
A force-feedback control system for microassembly, Journal of Micromechanics and Microengineering, vol.16, issue.9, p.1861, 2006. ,
Force sensing and control in micromanipulation, IEEE Transactions on Systems, Man, and Cybernetics, Part C: Applications and Reviews, vol.36, issue.6, pp.713-724, 2006. ,
Robust impedance control and force regulation: Theory and experiments, The International Journal of Robotics Research, vol.14, issue.3, pp.225-254, 1995. ,
Polymer micro-grippers with an integrated force sensor for biological manipulation, Journal of Micromechanics and Microengineering, vol.23, issue.1, p.15005, 2013. ,
Batch transfer assembly of microcomponents onto surface and soi mems, Transducers'99 Conference, pp.1478-1481, 1999. ,
Force feedbackbased microinstrument for measuring tissue properties and pulse in microsurgery, IEEE International Conference on Robotics and Automation (ICRA), vol.1, pp.626-631, 2001. ,
MEMS and MOEMS Technology and Applications : The digital Micromirror Device -A Micro-Optical Electromechanical Device for Display Applications, 2001. ,
Environment parameter estimation during bilateral telemanipulation, 14th Symposium on Haptic Interfaces for Virtual Environment and Teleoperator Systems, pp.25-26, 2006. ,
Compensation of scanner creep and hysteresis for afm nanomanipulation, IEEE Trans. on Automation Science and Engineering, vol.5, issue.2, pp.197-208, 2008. ,
Electro-thermally actuated microgrippers with integrated force-feedback, Journal of Micromechanics and Microengineering, vol.15, issue.6, p.1265, 2005. ,
Development of a modular and compliant micro-assembly platform with integrated force and compliance measurement capabilities, ICOMM 7th International Conference on MicroManufacturing, 2012. ,
Three-axis micro-force sensor with sub-micro-newton measurement uncertainty and tunable force range, Journal of Micromechanics and Microengineering, vol.20, issue.2, p.25011, 2010. ,
Design and characterization of a 256x64-pixel single-photon imager in cmos for a mems-based laser scanning time-of-flight sensor, Optics Express, vol.20, pp.11-11863, 2012. ,
Applications of soi-based optical mems, IEEE Journal of Selected Topics in Quantum Electronics, vol.8, issue.1, pp.148-154, 2002. ,
Ocean optics spectrometers, 2014. ,
Endoscopic optical coherence tomography based on a microelectromechanical mirror, Optics Letters, vol.26, p.24, 2001. ,
Piezoresistive cantilever performancepart i: Analytical model for sensitivity, Journal of Microelectromechanical Systems, vol.19, issue.1, pp.137-148, 2010. ,
Modeling, fabrication , and validation of a high-performance 2-dof piezoactuator for micromanipulation ,
Design, modeling, and characterization of a mems micro-gripper with an integrated electrothermal force sensor, Conference on Advanced Intelligent Mechatronics (AIM), pp.9-12, 2013. ,
Design and control of a mems micro-gripper with integrated electro-thermal force sensor, 3rd Australian Control Conference (AUCC), pp.479-484, 2013. ,
M 3 -deterministic, multiscale, multirobot platform for microsystems packaging: Design and quasi-static precision evaluation, IEEE Transactions on Automation Science and Engineering, vol.6, issue.2, pp.345-361, 2009. ,
Imaging of macular diseases with optical coherence tomography, Ophthalmology, vol.102, issue.2, p.217229, 1995. ,
Study of forces during microassembly tasks using two-sensing-fingers grippers, IEEE/ASME Transactions on Mechatronics, vol.17, issue.5, pp.811-821, 2012. ,
URL : https://hal.archives-ouvertes.fr/hal-00806246
Measurement of pull-off force for planar contact at the microscale, Micro Nano Letters, vol.4, pp.148-154, 2009. ,
Hybrid position/force control of manipulators. Transactions of ASME, Journal of Dynamic Systems, Measurement, and Control, vol.102, pp.126-133, 1981. ,
Linear high-resolution biomems force sensors with large measurement range, Journal of Microelectromechanical Systems, vol.19, issue.6, pp.1380-1389, 2010. ,
Complete open loop control of hysteretic , creeped and oscillating piezoelectric cantilever, IEEE Trans. on Automation Science and Engineering, vol.7, issue.3, pp.440-450, 2010. ,
Presentation , force estimation and control of an instrumented platform dedicated to automated micromanipulation tasks, IEEE International Conference on Automation Science and Engineering (CASE), pp.722-727, 2010. ,
Quadrilateral modelling and robust control of a nonlinear piezoelectric cantilever, IEEE Transactions on Control Systems Technology, vol.17, issue.3, pp.528-539, 2009. ,
URL : https://hal.archives-ouvertes.fr/hal-00400364
Development and force/position control of a new hybrid thermo-piezoelectric microgripper dedicated to micromanipulation tasks, IEEE Transactions on Automation Science and Engineering, vol.8, issue.4, pp.824-834, 2011. ,
Miniature compliant grippers with vision-based force sensing, IEEE Transactions on Robotics, vol.26, issue.5, pp.867-877, 2010. ,
Miniaturized ftir-spectrometer based on optical mems translatory actuator, Proceedings of SPIE, vol.6466, issue.6466, 2007. ,
Hybrid Microassembly Combining Robotics and Water Droplet Self-Alignment, IEEE Transactions on Robotics, vol.26, issue.6, pp.965-977, 2010. ,
DOI : 10.1109/TRO.2010.2066830
Force tracking in impedance control, The International Journal of Robotics Research, vol.16, issue.1, pp.97-117, 1997. ,
Contact and force control in microassembly, Proceedings of the IEEE International Symposium on Assembly and Task Planning, pp.60-65, 2003. ,
High sensitivity 2-d force sensor for assembly of surface mems devices, Proceedings. IEEE/RSJ International Conference on Intelligent Robots and Systems, pp.3363-3368, 2004. ,
Digital optical switch, Applied Physics Letters, vol.51, p.1230, 1987. ,
Micropipet-Based Pico Force Transducer: In Depth Analysis and Experimental Verification, Biophysical Journal, vol.74, issue.4, pp.2080-2088, 1998. ,
DOI : 10.1016/S0006-3495(98)77915-9
Batch transfer of microstructures using flip-chip solder bonding, Journal of Microelectromechanical Systems, vol.8, issue.1, pp.27-33, 1999. ,
An analysis of some fundamental problems in adaptive control of force and impedance behavior: theory and experiments, IEEE Transactions on Robotics and Automation, vol.11, issue.6, pp.912-921, 1995. ,
High-resolution endoscopic imaging of the gi tract using optical coherence tomography, Gastrointestinal Endoscopy, vol.51, issue.4, p.474479, 2000. ,
The constituent equations of piezoelectric bimorphs, Sensors and Actuators A: Physical, vol.28, issue.1, pp.41-61, 1991. ,
Miniaturized liga fourier transformation spectrometer, Proceedings of IEEE Sensors, pp.773-776, 2003. ,
Microstructure to substrate self-assembly using capillary forces, Journal of Microelectromechanical Systems, vol.10, issue.1, pp.17-24, 2001. ,
DOI : 10.1109/84.911087
URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.432.6102
Force/motion control of constrained robots using sliding mode, IEEE Transactions on Automatic Control, vol.37, issue.5, pp.668-672, 1992. ,
Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration, Journal of Microelectromechanical Systems, vol.14, issue.1, pp.4-11, 2005. ,
A mems micro force sensor for drosophila flight characterization, ROBIO). 2005 IEEE International Conference on, p.505510, 2005. ,
Mems-based micro and nano grippers with two axis force sensors, U.S. Patent No, vol.8623, p.222, 2014. ,
Investigating protein structure change in the zona pellucida with a microrobotic system, The International Journal of Robotics Research, vol.24, pp.2-3, 2005. ,
A novel dual-axis electrostatic microactuation system for micromanipulation, IEEERSJ International Conference on Intelligent Robots and Systems, vol.2, pp.1796-1801, 2002. ,
Optical mems for telecoms, Materials Today, vol.5, issue.78, p.2635, 2002. ,
Robotic micromanipulation and microassembly using monoview and multiscale visual servoing, IEEE/ASME Transactions on Mechatronics, vol.16, issue.2, pp.277-287, 2011. ,
URL : https://hal.archives-ouvertes.fr/hal-00672139
Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical wheatstone bridge arrangement, Sensors and Actuators A: Physical, vol.83, pp.47-53, 2000. ,
Optical coherence tomographya review of the principles and contemporary uses in retinal investigation, Eye, vol.18, p.561570, 2004. ,
Automating microassembly with ortho-tweezers and force sensing, IEEERSJ International Conference on Intelligent Robots and Systems, vol.3, pp.1327-1334, 2001. ,
Commercializing Micro-Nanotechnology Products, 2006. ,
Atomic resolution with an atomic force microscope using piezoresistive detection, Appl. Phys. Lett, vol.62, issue.8, p.834836, 1993. ,
Design and analysis of planar compliant microgripper based on kinematic approach, Journal of Micromechanics and Microengineering, vol.15, issue.1, p.143, 2005. ,
Micromachined endeffector and techniques for directed mems assembly, Journal of Micromechanics and Microengineering, vol.14, issue.4, p.542, 2004. ,
A theoretical and experimental investigation of explicit force control strategies for manipulators, IEEE Transactions on Automatic Control, vol.38, issue.11, pp.1634-1650, 1993. ,
Position and force control for constrained manipulator motion: Lyapunov's direct method, IEEE Transactions on Robotics and Automation, vol.9, issue.3, pp.308-313, 1993. ,
A monolithic compliant piezoelectric-driven microgripper: Design, modeling, and testing, IEEE/ASME Transactions on Mechatronics, vol.18, issue.1, pp.138-147, 2013. ,
A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors. 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUC- ERS'11), pp.410-413, 2011. ,
Automatic microassembly using visual servo control, IEEE Transactions on Electronics Packaging Manufacturing, vol.31, issue.4, pp.316-325, 2008. ,
Automated multiprobe microassembly using vision feedback, IEEE Transactions on Robotics, vol.28, pp.5-1090, 2012. ,
A tunable optofluidic silicon optical bench, Journal of Microelectromechanical Systems, vol.21, issue.6, pp.1357-1364, 2012. ,
Suspended submicron silicon-beam for high sensitivity piezoresistive force sensing cantilevers, Sensors and Actuators A: Physical, vol.186, p.8085, 2012. ,
Integrated piezoresistive force and position detection sensors for micro-handling applications, Journal of Microelectromechanical Systems, vol.22, issue.6, p.13101326, 2013. ,
Low cost thin film based piezoresistive mems tactile sensor, Sensors and Actuators A, vol.139, p.1722, 2007. ,
Modeling and high dynamic compensating the rate-dependent hysteresis of piezoelectric actuators via a novel modified inverse preisach model, IEEE Transactions on Control Systems Technology, vol.21, issue.5, pp.1549-1557, 2013. ,
Endoscopic optical coherence tomographic imaging with a cmos-mems micromirror, Sensors and Actuators A, vol.103, pp.1-2, 2003. ,
Three-dimensional automated micromanipulation using a nanotip gripper with multi-feedback, Journal of Micromechanics and Microengineering, vol.19, issue.7, p.75009, 2009. ,
DOI : 10.1088/0960-1317/19/7/075009
An adaptive impedance force control approach for robotic cell microinjection, IEEERSJ International Conference on Intelligent Robots and Systems, pp.907-912, 2008. ,
A force control approach to a robot-assisted cell microinjection system, The International Journal of Robotics Research, vol.29, issue.9, pp.1222-1232, 2010. ,
Force sensing and manipulation strategy in robot-assisted microinjection on zebrafish embryos, IEEE/ASME Transactions on Mechatronics, vol.16, issue.6, pp.1002-1010, 2011. ,
Discrete-time output integral sliding-mode control for a piezomotor-driven linear motion stage, IEEE Transactions on Industrial Electronics, vol.55, pp.11-3917, 2008. ,
Model predictive discrete-time sliding mode control of a nanopositioning piezostage without modeling hysteresis, IEEE Transactions on Control Systems Technology, vol.20, issue.4, pp.983-994, 2012. ,
Time-varying force tracking in impedance control, IEEE 51st Annual Conference on Decision and Control (CDC), pp.344-349, 2012. ,
Mems optical switches, IEEE Communications Magazine, vol.39, issue.11, pp.158-163, 2001. ,
Design, identification, and control of a flexure-based xy stage for fast nanoscale positioning, IEEE Transactions on Nanotechnology, vol.8, issue.1, pp.46-54, 2009. ,
In-plane silicon-on-insulator optical mems accelerometer using waveguide fabryperot microcavity with silicon/air bragg mirrors, IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp.24-28, 2010. ,
Microgripping force measuring device based on su-8 microcantilever sensor, Journal of Micro/Nanolithography, MEMS and MOEMS, vol.13, issue.1, pp.13007-013007, 2014. ,
Force-controlled automatic microassembly of tissue engineering scaffolds, Journal of Micromechanics and Microengineering, vol.20, pp.3-035001, 2010. ,
Feedforward controllers and tracking accuracy in the presence of plant uncertainties, ASME Journal of Dynamic Systems, Measurement, and Control, vol.117, issue.4, p.490495, 1995. ,
Robust position and force control of robots using sliding mode, IEEE International Conference on Robotics and Automation, vol.1, pp.623-628, 1994. ,
Fusion of robotic microassembly and self-assembly for microsystem integration and thin-chip micro-assembly for 3d integration, IEEE International Conference on Robotics and Automation, 2013. ,
A micromachined gas inertial sensor based on thermal expansion, Sensors and Actuators A: Physical, vol.212, issue.1, pp.173-180, 2014. ,
Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing, Journal of Microelectromechanical Systems, vol.20, issue.3, p.711719, 2011. ,
A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift, Sensors and Actuators A: Physical, vol.167, issue.2, pp.495-501, 2011. ,
Plastic deformation magnetic assembly (pdma) of out-of-plane microstructures: Technology and application, Journal of Microelectromechanical Systems, vol.10, issue.2, pp.302-309, 2001. ,
works have raised several publications. The publications appear in the following way: -Chapter 2 has been presented in [2], -Chapter 3 has been presented in [4] and ,
Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications, International Journal of Optomechatronics, vol.19, issue.3, pp.179-194, 2014. ,
DOI : 10.1109/JMEMS.2011.2127449
URL : https://hal.archives-ouvertes.fr/hal-01324538
Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications, Journal of Micromechanics and Microengineering, vol.24, issue.3, p.35018, 2014. ,
DOI : 10.1088/0960-1317/24/3/035018
URL : https://hal.archives-ouvertes.fr/hal-00958816
Automated Guiding Task of a Flexible Micropart Using a Two-Sensing-Finger Microgripper, IEEE Transactions on Automation Science and Engineering, vol.10, issue.3, pp.515-524, 2013. ,
DOI : 10.1109/TASE.2013.2241761
URL : https://hal.archives-ouvertes.fr/hal-00869514
Dynamic force/position modeling of a one-DOF smart piezoelectric micro-finger with sensorized end-effector, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 2014. ,
DOI : 10.1109/AIM.2014.6878291
URL : https://hal.archives-ouvertes.fr/hal-01026535
Force tracking impedance control with unknown environment at the microscale, 2014 IEEE International Conference on Robotics and Automation (ICRA), 2014. ,
DOI : 10.1109/ICRA.2014.6907623
URL : https://hal.archives-ouvertes.fr/hal-01051650
Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications, International Symposium on Optomechatronic Technologies (ISOT'13), 2013. ,
DOI : 10.1109/JMEMS.2011.2127449
URL : https://hal.archives-ouvertes.fr/hal-01324538
Explicit Force Control v.s. Impedance Control for Micromanipulation, ASME-IDETC International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-00868627
A Piezoelectric Microgripper with Integrated Force Sensors and Position Detection Algorithm for the Grasp of Multistiffness Microcomponents ,
A Fully and High Dynamic Automated Microassembly Using an Active Microgripper with Integrated Force Sensors and Hybrid Force/Position Control " . Communication skills and oral presentations Towards Fully Automated Microassembly Using an Active Microgripper with Integrated Force Sensors and Hybrid Force/Position Control, 2014. ,
Hybrid Force/Position Control for the Microassembly, Robotics Day (JJCR'13), 2013. ,