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Conception et optimisation de thyristors optiques en carbure de silicium pour des applications d'électronique impulsionnelle

Abstract : In order to reduce the losses, the weight and the volume of the power supply of its pulse power systems, the French German research institute of Saint-Louis (ISL) intends to replace the currently used silicon switches by silicon carbide thyristors. This work, in the frame of the collaboration between Ampere laboratory and ISL, deals with the design the fabrication and the characterization of light triggered thyristors in silicon carbide. In the first place, two device terminations, the graded etched JTE and the guard ring assisted etched JTE, have been optimized using finite element simulation. These two structures are tolerant to technological uncertainties and don’t need ion implantation. Two series of light triggered thyristors were also fabricated. Concerning the first run, the light triggering of SiC thyristor with UV light-emitting diodes was demonstrated. The guard ring assisted etched JTE was tested on the second run. The best blocking voltage measured on devices with this termination was 6.3 kV. These devices also aim at assessing the pulse current capabilities of silicon carbide thyristors. To this end, two characterizations were performed and a peak current of 156 A (15.6 kA/cm2) was reached with a pulse width of 10 IJS and 40 A (4 kA/cm2) with a pulse width of 650 IJS. These results show a significant progress compared to previous achievements of the laboratory on silicon carbide thyristor. They also validate the good stability of the fabrication technology of the ISL cleanroom (Etching process, ohm le contact). However, the fabrication yield needs to be improved by the optimization of the device passivation, which is currently under progress at ISL.
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Nicolas Dheilly. Conception et optimisation de thyristors optiques en carbure de silicium pour des applications d'électronique impulsionnelle. Autre. INSA de Lyon, 2011. Français. ⟨NNT : 2011ISAL0004⟩. ⟨tel-01128250⟩

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