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Habilitation à diriger des recherches

From RF-microsystem technology to RF-nanotechnology

Fabio Coccetti 1
1 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The RF microsystem technology is believed to introduce a paradigm switch in the wireless revolution. Although only few companies are to date doing successful business with RF-MEMS, and on a case-by-case basis, important issues need yet to be addressed in order to maximize yield and performance stability and hence, outperform alternative competitive technologies (e.g. ferroelectric, SoS, SOI,…). Namely the behavior instability associated to: 1) internal stresses of the free standing thin layers (metal and/or dielectric) and 2) the mechanical contact degradation, be it ohmic or capacitive, which may occur due to low forces, on small areas, and while handling severe current densities. The investigation and understanding of these complex scenario, has been the core of theoretical and experimental investigations carried out in the framework of the research activity that will be presented. The reported results encompass activities which go from coupled physics (multiphysics) modeling, to the development of experimental platforms intended to tackles the underlying physics of failure. Several original findings on RF-MEMS reliability in particular with respect to the major failure mechanisms such as dielectric charging, metal contact degradation and thermal induced phenomena have been obtained. The original use of advanced experimental setup (surface scanning microscopy, light interferometer profilometry) has allowed the definition of innovative methodology capable to isolate and separately tackle the different degradation phenomena under arbitrary working conditions. This has finally permitted on the one hand to shed some light on possible optimization (e.g. packaging) conditions, and on the other to explore the limits of microsystem technology down to the nanoscale. At nanoscale indeed many phenomena take place and can be exploited to either enhance conventional functionalities and performances (e.g. miniaturization, speed or frequency) or introduce new ones (e.g. ballistic transport). At nanoscale, moreover, many phenomena exhibit their most interesting properties in the RF spectrum (e.g. micromechanical resonances). In particular owing to their superior electrical and mechanical properties, novel nanostructured materials (e.g. carbon based, as carbon nanotube (CNT) and graphene) may provide an answer to this endeavor. These subjects are the focus of presently on-going and future research activities and may represent a cornerstone of future wireless applications from microwave up to the THz range.
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Habilitation à diriger des recherches
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Submitted on : Monday, January 19, 2015 - 2:24:47 PM
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  • HAL Id : tel-01104910, version 1


Fabio Coccetti. From RF-microsystem technology to RF-nanotechnology. Micro and nanotechnologies/Microelectronics. Institut National Polytechnique de Toulouse - INPT, 2013. ⟨tel-01104910⟩



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