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Développement d'une nouvelle génération de plasmas micro-onde à conditions opératoires étendues

Abstract : This work was done in the « Laboratoire de Physique Subatomique et de Cosmologie (IN2P3,Grenoble) » during a collaboration with Thales. The aim of the project was the development of a newgeneration of microwave plasma with extended operating conditions in the pressure range 0.5 mtorr to10 torr in argon. The presented work consists of: i) designing applicators based on sections of λ/4length serving as impedance transformers between the generator and the plasma with impedance ofgiven assumed value (approximate impedance adaptation); ii) experimentally determine the realplasma impedance (the real part and the imaginary part) for given operating conditions from themeasurement of modulus and phase of the reflection coefficient S11; iii) resize the different sections ofthe applicator by digital simulation taking the real plasma impedance into account; iv) finally, verifyexperimentally that the impedance adaptation between the generator and the plasma is correct. Theobtained results clearly demonstrate that it is possible, at a given frequency (here 2.45 GHz), to designand size a plasma source with an efficiency greater than 80 % for a window in pressure (at least onedecade) equivalent to an operating window in terms of plasma parameters. These individual sourceswith localized absorption of microwaves can be used in numbers to achieve uniform plasmas via theirdistribution over two-dimensional (planar sources) or tri-dimensional (volume plasma) networks, andthus for industrial surface treatments.
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  • HAL Id : tel-01089534, version 1

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IN2P3 | LPSC | CNRS | STAR | GEPI | UGA

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Guillaume Regnard. Développement d'une nouvelle génération de plasmas micro-onde à conditions opératoires étendues. Physique des plasmas [physics.plasm-ph]. Université de Grenoble, 2011. Français. ⟨NNT : 2011GRENY060⟩. ⟨tel-01089534⟩

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