Characterization of physico-chemical environment of Co-based multilayer mirrors working in the soft x-ray and EUV ranges

Abstract : In this work, we focus on the characterization of physico-chemical environment of the element present in Co-based multilayers working in the soft x-ray and EUV ranges. The observation of interface changes of both systems Co/Mo2C and Co/Mo2C/Y upon annealing is important for improving their optical performance. They were studied by combining non-destructive methods, x-ray emission spectroscopy, nuclear magnetic resonance spectroscopy, x-ray reflectometry and destructive methods, time-of-flight secondary ions mass spectroscopy and transmission electron microscopy to investigate their interface properties. This work aims not only at designing and fabricating new optical elements to face the development of sources and applications in the EUV and soft x-ray ranges, but also at developing a methodology combining simulations and experiments devoted to the interface analysis in these multilayer structures in order to improve their optical properties.
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Yanyan Yuan. Characterization of physico-chemical environment of Co-based multilayer mirrors working in the soft x-ray and EUV ranges. Chemical Physics [physics.chem-ph]. Université Pierre et Marie Curie - Paris VI, 2014. English. ⟨NNT : 2014PA066444⟩. ⟨tel-01080753v2⟩

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