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Conception de protections périphériques applicables aux diodes Schottky réalisées sur diamant monocristallin

Fabien Thion 1
1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : This thesis work is part of the Diamonix project, which is about forming a France-based supply and fabrication of diamond electronics devices. Work in this thesis is centered upon designing a peripheral junction protection suitable for diamond Schottky diodes, a vital structure for the right behavior of power electronics components. Such design on monocristalline diamond substrates needs several steps. After a first chapter dealing with diamond state of the art in power electronics, emphasis is brought upon the design of a field plate protection using several dielectric materials and a semi-resistive component in the second chapter. Those simulations are carried out using SENTAURUS TCAD software suite. The third chapter tries to answer any technological difficulties met in the second chapter. For instance, a new etching technique based upon a succession of steps has been developed. Then, Metal/Dielectric/Diamond capacitors were made to determine the electrical behavior of those dielectrics on diamond. Their behavior is problematic but it is to our knowledge the first time such devices are characterized in such extent. The fourth chapter deals with the processing and characterizing of diamond Schottky diodes protected using field plates on several dielectrics, which measurements results are a bit disappointing. Finally, the conclusion insists on the main results of the thesis and then opens up to a discussion over the perspectives of future works around diamond.
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  • HAL Id : tel-01071666, version 1

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Fabien Thion. Conception de protections périphériques applicables aux diodes Schottky réalisées sur diamant monocristallin. Micro et nanotechnologies/Microélectronique. INSA de Lyon, 2012. Français. ⟨tel-01071666⟩

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