Conception de miroirs à réseau sub-longueur d'onde pour application VCSEL dans le moyen infrarouge.

Abstract : In the mid infrared wavelength range, Vertical Cavity Surface Emitting Lasers (VCSEL) based on the antimony alloy is a promising solution to develop and enhance numerous applications such as polluting gas sensing. A new type of mirror based on High Contrast Grating (HCG) structures has shown similar reflectivities than the Bragg mirrors which are usually used in VCSELs. However, with a polarization selectivity and a reduction in thickness of a factor of 10, HCG mirrors can advantageously replace Bragg reflectors to enhance the properties of mid infrared VCSEL structures. The work presented in this manuscript is devoted to the design of high contrast grating mirrors for a VCSEL application and takes precisely into account the technological constraints and tolerance of fabrication. In a first part, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors for a VCSEL application. In a second part of this work, the tolerances of the grating dimensions have been precisely studied which has lead to the development of a robust optimization algorithm. This algorithm allows to design high contrast gratings which exhibit not only a high efficiency but also large tolerance values required by the manufacturing process. Finally, in a last part, a VCSEL structure using a high contrast grating as top mirror has been designed and simulated by FDTD to validate the use of HCG presented previously in a VCSEL structure.
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Christ-Yves Chevallier. Conception de miroirs à réseau sub-longueur d'onde pour application VCSEL dans le moyen infrarouge.. Autre. Supélec, 2013. Français. ⟨NNT : 2013SUPL0024⟩. ⟨tel-01024257⟩

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