Theoretical phonon thermal conductivity of Si/Ge superlattice nanowires, Journal of Applied Physics, vol.95, issue.2, pp.682-693, 2004. ,
DOI : 10.1063/1.1631734
Fourier???s law: Insight from a simple derivation, Physical Review E, vol.79, issue.4, p.79, 2009. ,
DOI : 10.1103/PhysRevE.79.042101
Theory of thermal conduction in dielectric solids: Effects of radiation damage . Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with, Materials and Atoms, vol.1, pp.204-208, 1984. ,
Model for Lattice Thermal Conductivity at Low Temperatures, Physical Review, vol.113, issue.4, pp.1046-1051, 1959. ,
DOI : 10.1103/PhysRev.113.1046
Recent Developments in Semiconductor Thermoelectric Physics and Materials, Annual Review of Materials Research, vol.41, issue.1, pp.399-431, 2011. ,
DOI : 10.1146/annurev-matsci-062910-100445
Effect of quantum-well structures on the thermoelectric figure of merit, Physical Review B, vol.47, issue.19, pp.12727-12731, 1993. ,
DOI : 10.1103/PhysRevB.47.12727
On-chip Hot Spot Remediation with Miniaturized Thermoelectric Coolers, Microgravity Science and Technology, vol.30, issue.9, pp.351-359, 2009. ,
DOI : 10.1007/s12217-009-9162-4
Mesoscopic Size Effects on the Thermal Conductance of Silicon Nanowire, Nano Letters, vol.9, issue.5, pp.1861-1865, 2009. ,
DOI : 10.1021/nl803844j
URL : https://hal.archives-ouvertes.fr/hal-00725956
Thermal conductivity measurement from 30 to 750 K: the 3?? method, Review of Scientific Instruments, vol.61, issue.2, pp.802-808, 1990. ,
DOI : 10.1063/1.1141498
Thermal Transport in Nanostructured Solid-State Cooling Devices, Journal of Heat Transfer, vol.127, issue.1, pp.108-114, 2005. ,
DOI : 10.1115/1.1839588
Phonon scattering at silicon crystal surfaces, Physical Review B, vol.36, issue.12, pp.6551-6565, 1987. ,
DOI : 10.1103/PhysRevB.36.6551
Thermal conductivity of individual silicon nanowires, Applied Physics Letters, vol.83, issue.14, pp.2934-2936, 2003. ,
DOI : 10.1063/1.1616981
Heat transport in thin dielectric films, Journal of Applied Physics, vol.81, issue.6, pp.2590-2595, 1997. ,
DOI : 10.1063/1.363923
Transient ballistic and diffusive phonon heat transport in thin films, Journal of Applied Physics, vol.74, issue.1, pp.31-39, 1993. ,
DOI : 10.1063/1.354111
Enhanced thermoelectric performance of rough silicon nanowires, NATURE, vol.451, pp.163-168, 2008. ,
Blocking phonons via nanoscale geometrical design, PHYSICAL REVIEW B, vol.82, issue.29, p.2010 ,
Phonon heat conduction in corrugated silicon nanowires below the Casimir limit, Applied Physics Letters, vol.103, issue.4, p.43109, 2013. ,
DOI : 10.1063/1.4816590
URL : https://hal.archives-ouvertes.fr/hal-00789770
Note on the conduction of heat in crystals, Physica, vol.5, issue.6, pp.495-500, 1938. ,
DOI : 10.1016/S0031-8914(38)80162-2
Measurements of thermal transport in low stress silicon nitride films, Applied Physics Letters, vol.72, issue.18, pp.2250-2252, 1998. ,
DOI : 10.1063/1.121269
Phonon radiative heat transfer and surface scattering, Physical Review B, vol.38, issue.11, pp.7576-7594, 1988. ,
DOI : 10.1103/PhysRevB.38.7576
Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3??-V??lklein method, Review of Scientific Instruments, vol.83, issue.5, p.54902, 2012. ,
DOI : 10.1063/1.4704086
Erratum: ???Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3??-V??lklein method??? [Rev. Sci. Instrum. 83, 054902 (2012)], Review of Scientific Instruments, vol.84, issue.2, p.29901, 2013. ,
DOI : 10.1063/1.4793652
Measurement of the Thermal Conductivity and Heat Capacity of Freestanding Shape Memory Thin Films Using the 3?? Method, Journal of Heat Transfer, vol.130, issue.10, p.102402, 2008. ,
DOI : 10.1115/1.2945904
Characterization of heat transfer along a silicon nanowire using thermoreflectance technique, IEEE Transactions On Nanotechnology, vol.5, issue.1, pp.67-74, 2006. ,
DOI : 10.1109/TNANO.2005.861769
and noncontact measurement of silicon membrane thermal conductivity, Applied Physics Letters, vol.98, issue.17, p.174104, 2011. ,
DOI : 10.1063/1.3583603
Heat transport in ultrathin dielectric membranes and bridges, Physical Review B, vol.70, issue.12, p.125425, 2004. ,
DOI : 10.1103/PhysRevB.70.125425
Properties of the Phonon Gas in Ultrathin Membranes at Low Temperature, Physical Review Letters, vol.81, issue.14, pp.2958-2961, 1998. ,
DOI : 10.1103/PhysRevLett.81.2958
Thermal Management in 3-D Integrated Circuits with Graphene Heat Spreaders, Physics Procedia, vol.25, pp.311-316, 2012. ,
DOI : 10.1016/j.phpro.2012.03.089
Advances in mesoscale thermal management technologies for microelectronics, Microelectronics Journal, vol.37, pp.1165-1185, 2006. ,
Thermodynamics of the thermoelectric potential, Journal of Applied Physics, vol.106, issue.10, p.104907, 2009. ,
DOI : 10.1063/1.3257250
URL : https://hal.archives-ouvertes.fr/hal-00624253
High-Thermoelectric Performance of Nanostructured Bismuth Antimony Telluride Bulk Alloys, Science, vol.320, issue.5876, pp.634-638, 2008. ,
DOI : 10.1126/science.1156446
Enhanced Thermoelectric Figure-of-Merit in p-Type Nanostructured Bismuth Antimony Tellurium Alloys Made from Elemental Chunks, Nano Letters, vol.8, issue.8, pp.2580-2584, 2008. ,
DOI : 10.1021/nl8009928
Thermal Conductivity and Specific Heat of Noncrystalline Solids, Physical Review B, vol.4, issue.6, pp.2029-2041, 1971. ,
DOI : 10.1103/PhysRevB.4.2029
Amorphous materials at low temperatures: why are they so similar?, Physica B: Condensed Matter, vol.169, issue.1-4, pp.322-327, 1991. ,
DOI : 10.1016/0921-4526(91)90246-B
Tunneling states in amorphous solids, Journal of Low Temperature Physics, vol.27, issue.3-4, pp.351-360, 1972. ,
DOI : 10.1007/BF00660072
Anomalous low-temperature thermal properties of glasses and spin glasses, Philosophical Magazine, vol.16, issue.1, pp.1-9, 1972. ,
DOI : 10.1007/BF01399111
Quantum chaos in nanoelectromechanical systems, Physical Review B, vol.73, issue.3, p.35436, 2006. ,
DOI : 10.1103/PhysRevB.73.035436
Ultra-Low Thermal Conductivity in W/Al2O3 Nanolaminates, Ultralow thermal conductivity in W/Al 2 O 3 nanolaminates, pp.989-990, 2004. ,
DOI : 10.1126/science.1093711
Thermal conductivity of sputtered oxide films, Physical Review B, vol.52, issue.1, pp.253-257, 1995. ,
DOI : 10.1103/PhysRevB.52.253
Prediction and measurement of the thermal conductivity of amorphous dielectric layers, Journal of Heat Transfer, vol.116, p.317, 1994. ,
Low-temperature thermal conductivity and acoustic attenuation in amorphous solids, Reviews of Modern Physics, vol.74, issue.4, pp.991-1013, 2002. ,
DOI : 10.1103/RevModPhys.74.991
Thermal characteristics of silicon nitride membranes at sub-Kelvin temperatures, Applied Physics Letters, vol.72, issue.11, pp.1305-1307, 1998. ,
DOI : 10.1063/1.120979
Thermal conductance measurements of a silicon nitride membrane at low temperatures, Physica B: Condensed Matter, vol.284, issue.288, pp.284-2881968, 2000. ,
DOI : 10.1016/S0921-4526(99)02925-7
Specific heat and thermal conductivity of low-stress amorphous Si???N membranes, Solid State Communications, vol.129, issue.3, pp.199-204, 2004. ,
DOI : 10.1016/j.ssc.2003.08.048
Heat Transfer Regimes in Microstructures, Journal of Heat Transfer, vol.114, issue.3, pp.666-674, 1992. ,
DOI : 10.1115/1.2911332
Microscale Heat Conduction in Dielectric Thin Films, Journal of Heat Transfer, vol.115, issue.1, pp.7-16, 1993. ,
DOI : 10.1115/1.2910673
Ballistic phonon transport in dielectric membranes. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, pp.724-726, 2006. ,
Acoustic Fields and Waves in Solids, volume II, 1990. ,
Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures, Applied Physics Letters, vol.86, issue.25, p.251903, 2005. ,
DOI : 10.1063/1.1949269
Wafer-level mechanical characterization of silicon nitride MEMS, Journal of Microelectromechanical Systems, vol.14, issue.2, pp.359-367, 2005. ,
DOI : 10.1109/JMEMS.2004.839315
Antenna-coupled bolometer with a micromachined-beam thermal link, Applied Physics Letters, vol.71, issue.16, pp.2361-2363, 1997. ,
DOI : 10.1063/1.120028
Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K, Review of Scientific Instruments, vol.65, issue.4, pp.946-959, 1994. ,
DOI : 10.1063/1.1144925
Mechanical property characterization of lpcvd silicon nitride thin films at cryogenic temperatures. Microelectromechanical Systems, Journal, vol.13, pp.870-879, 2004. ,
Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films, Materials Science and Engineering A, pp.453-459, 2006. ,
Stress and Silicon Nitride: A Crack in the Universal Dissipation of Glasses, Physical Review Letters, vol.102, issue.22, 2009. ,
DOI : 10.1103/PhysRevLett.102.225503
Wide-frequency specific heat spectrometer, Review of Scientific Instruments, vol.58, pp.1464-1470, 1987. ,
Application of the three omega thermal conductivity measurement method to a film on a substrate of finite thickness, Journal of Applied Physics, vol.86, pp.3959-3963, 1999. ,
In-plane thermal conductivity of nanoscale polyaniline thin films, Applied Physics Letters, vol.95, issue.3, p.33113, 2009. ,
DOI : 10.1063/1.3184786
Measurement of the thermal conductance of silicon nanowires at low temperature, Journal of Applied Physics, vol.101, issue.1, p.16104, 2007. ,
DOI : 10.1063/1.2400093
3-Omega Measurements of Vertically Oriented Carbon Nanotubes on Silicon, Journal of Heat Transfer, vol.128, issue.11, pp.1109-1113, 2006. ,
DOI : 10.1115/1.2352778
Improved 3-omega measurement of thermal conductivity in liquid, gases, and powders using a metal-coated optical fiber, Review of Scientific Instruments, vol.82, 2011. ,
Liquid nitrogen to room-temperature thermometry using niobium nitride thin films, Review of Scientific Instruments, vol.77, issue.12, p.126108, 2006. ,
DOI : 10.1063/1.2403934
URL : https://hal.archives-ouvertes.fr/hal-00132485
-Si:H thin films, Physical Review B, vol.50, issue.9, pp.6077-6081, 1994. ,
DOI : 10.1103/PhysRevB.50.6077
URL : https://hal.archives-ouvertes.fr/hal-01301905
Nb-Si thin films as thermometers for low temperature bolometers, Journal of Low Temperature Physics, vol.41, issue.3-4, pp.301-306, 1993. ,
DOI : 10.1007/BF00693437
Beneficial effects of annealing on amorphous Nb???Si thin-film thermometers, Applied Physics Letters, vol.87, issue.22, p.221901, 2005. ,
DOI : 10.1063/1.2135380
Highly sensitive parylene membrane-based ac-calorimeter for small mass magnetic samples, Review of Scientific Instruments, vol.81, issue.5, p.53901, 2010. ,
DOI : 10.1063/1.3422247
URL : https://hal.archives-ouvertes.fr/hal-00725966
Analytical Methods in Conduction Heat Transfer, AMCHT, 1998. ,
Thermal issues in MEMS and microscale systems. Components and Packaging Technologies, IEEE Transactions on, vol.25, pp.576-583, 2002. ,
Thermo-mechanical properties of nano-scale freestanding aluminum films, Thin Solid Films, vol.484, issue.1-2, pp.364-368, 2005. ,
DOI : 10.1016/j.tsf.2005.02.036
Stress and Silicon Nitride: A Crack in the Universal Dissipation of Glasses, Physical Review Letters, vol.102, issue.22, p.225503, 2009. ,
DOI : 10.1103/PhysRevLett.102.225503
How stress can reduce dissipation in glasses, Physical Review B, vol.84, issue.17, p.174109, 2011. ,
DOI : 10.1103/PhysRevB.84.174109
Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.16, issue.4, pp.2003-2007, 1998. ,
DOI : 10.1116/1.581302
Stresses and deformation processes in thin films on substrates, Critical Review in Solid state and Material Science, vol.14, 1988. ,
The Tension of Metallic Films Deposited by Electrolysis, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.82, issue.553, pp.172-175, 1909. ,
DOI : 10.1098/rspa.1909.0021
Surface dissipation in nanoelectromechanical systems: Unified description with the standard tunneling model and effects of metallic electrodes, Physical Review B, vol.77, issue.12, p.125107, 2008. ,
DOI : 10.1103/PhysRevB.77.125107
Thermal conductivity and specific heat of glasses, Physical Review B, vol.36, issue.14, pp.7620-7624, 1987. ,
DOI : 10.1103/PhysRevB.36.7620
Chapter 3: Thermal and Elastic Anomalies in Glasses at Low Temperatures, of Progress in Low Temperature Physics, pp.265-344, 1986. ,
DOI : 10.1016/S0079-6417(08)60015-3
Thermally activated relaxation processes in vitreous silica: An investigation by Brillouin scattering at high pressures, Physical Review B, vol.45, issue.6, pp.2750-2760, 1992. ,
DOI : 10.1103/PhysRevB.45.2750
Vibrational anomalies and phonon localization in glasses, Solid State Communications, vol.86, issue.9, pp.597-603, 1993. ,
DOI : 10.1016/0038-1098(93)90147-F
Amorphous Solid without Low Energy Excitations, Physical Review Letters, vol.78, issue.23, pp.4418-4421, 1997. ,
DOI : 10.1103/PhysRevLett.78.4418
URL : http://mediatum.ub.tum.de/doc/958856/document.pdf
Dissipation mechanisms in pendulums and their implications for gravitational wave interferometers, Review of Scientific Instruments, vol.69, issue.2, pp.544-553, 1998. ,
DOI : 10.1063/1.1148692
Thin film nanocalorimeter for heat capacity measurements of 30 nm films, Review of Scientific Instruments, vol.80, issue.6, p.63901, 2009. ,
DOI : 10.1063/1.3142463
Low-frequency modes in vitreous silica, Physical Review B, vol.34, issue.8, pp.5665-5673, 1986. ,
DOI : 10.1103/PhysRevB.34.5665
Interaction of soft modes and sound waves in glasses, Physical Review B, vol.46, issue.5, pp.2798-2808, 1992. ,
DOI : 10.1103/PhysRevB.46.2798
Low-temperature specific heat and thermal conductivity of glasses, Physical Review Letters, vol.70, issue.2, pp.182-185, 1993. ,
DOI : 10.1103/PhysRevLett.70.182
Vibrational instability, two-level systems, and the boson peak in glasses, Physical Review B, vol.76, issue.6, p.64206, 2007. ,
DOI : 10.1103/PhysRevB.76.064206
Phonon thermal transport in noncrystalline materials, Physical Review B, vol.12, issue.10, pp.4475-4486, 1975. ,
DOI : 10.1103/PhysRevB.12.4475
Heat transport by long mean free path vibrations in amorphous silicon nitride near room temperature, Physical Review B, vol.87, issue.21, p.214305, 2013. ,
DOI : 10.1103/PhysRevB.87.214305
Lattice Vibrations and Heat Transport in Crystals and Glasses, Annual Review of Physical Chemistry, vol.39, issue.1, pp.93-121, 1988. ,
DOI : 10.1146/annurev.pc.39.100188.000521
Ultra low thermal conductivity of disordered layered p-type bismuth telluride, Journal of Materials Chemistry C, vol.500, issue.12, pp.2362-2367, 2013. ,
DOI : 10.1039/c3tc30152d