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Conception et réalisation d'un multicapteur de gaz intégré à base de plateformes chauffantes sur silicium et de couches sensibles à oxyde métallique pour le contrôle de la qualité de l'air habitacle

Nicolas Dufour 1
1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Many recent studies have shown the presence of high amounts of pollutants inside the car cabin. The proposed solution for this problem is the development of a gas sensor capable of detecting pollutants entering in the vehicle, resulting in the closing of vents in the case of a pollution peak. Metal-oxides chemical micro-sensors are the best candidates to solve this problem: they are highly sensitive to many gases, fast response times, and their production cost is low. Their main drawback is a lack of selectivity. The research work consisted of developing a micro-device incorporating a gas multi-sensor array based on conductivity detection: different sensitive layers are integrated on a single silicon micro-machined chip, in order to selectively detect several gases: carbon monoxide (CO), dioxide nitrogen (NO2), ammonia (NH3), acetaldehyde (C2H4O) and hydrogen sulfide (H2S). To do this, three main areas of research have emerged. The first part of this study focused on the design of the heating micro-platforms using a multiphysics simulations tool to optimize, on the one hand, their structure and geometry to achieve the expected thermal performances (thermoelectric efficiency optimization and minimizing interaction of a cell to another), and on the other hand, the thermo-mechanical performance given the possibility to use sensors in a fast thermal transient mode. The resulting model was validated by comparison with physical measurements. This has allowed us to improve the thermal behavior of the membrane surface and reduce manufacturing costs by simplifying the design. The manufacturing in clean room of the multisensor platform was then performed taking into account the improvements proposed by the modeling. A specific study on the integration process of an industrial technique to deposit sensitive materials by inkjet was conducted. A method for depositing quickly and at low costs several sensitive layers (ZnO, CuO and SnO2) on a single sensing structure has been developed. Finally, we proceeded to develop a decision-making system, including two elements: the development of an optimized profile to control the heating and sensitive resistors to improve the sensitivity, selectivity and stability, and a data multivariate analysis. It has therefore been possible to selectively detect most of the target gas (alone and mixed) at low concentrations (NO2-0.2ppm, C2H4O-2ppm, NH3-5ppm and CO-100ppm).
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  • HAL Id : tel-00956669, version 1

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Nicolas Dufour. Conception et réalisation d'un multicapteur de gaz intégré à base de plateformes chauffantes sur silicium et de couches sensibles à oxyde métallique pour le contrôle de la qualité de l'air habitacle. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2013. Français. ⟨tel-00956669⟩

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