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Développement de capteurs intégrés pour micropompes MEMS : applications biomédicales

Abstract : Injection Medical Devices are more and more developed. New devices bring innovations in terms of performances and use for classical syringes. Eveon develops a bio-inspired device including some sensors, a micropump, a reservoir and a needle. This automatic injection can be microliter precise with a small loss of medical liquid thanks to microfabrication techniques used for microsystems. Indeed, a silicon membrane micropump integrating sensors was fabricated using processes from microelectronic fabrication. Two actuation types were coupled to the membrane: an integrated bimetallic actuator and an external piezoelectric actuator. In the case of the bimetallic actuator, thermo-resistances were designed, fabricated and characterized to measure the thermal profile of the membrane during the actuation with a 5% error. In the case of piezoelectric actuation, piezoresistances were integrated within the membrane profile along the radial axis to control its stress, feedback the actuation as a function of the pressure and maximize the pump characteristics. To ensure that the dose of medicine was delivered, a flow rate sensor was integrated in the microfluidic channels of the micropump. This innovative sensor can detect liquid flow rate in a range specified for injection medical devices, namely flow rates from 0.5mL/min to 4mL/min.
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Submitted on : Wednesday, February 26, 2014 - 3:13:11 PM
Last modification on : Friday, March 25, 2022 - 9:40:23 AM
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  • HAL Id : tel-00952312, version 1



Arnaud Salette. Développement de capteurs intégrés pour micropompes MEMS : applications biomédicales. Autre. Université de Grenoble, 2012. Français. ⟨NNT : 2012GRENT105⟩. ⟨tel-00952312⟩



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