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Conception, réalisation et commande d'un microrobot numérique, planaire, non redondant et en technologie MEMS

Abstract : With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics,optics, biomedical, . . .), came the necessity to build systems able to manipulate and make the assembly ofsmaller and smaller objects. Design of robotic stations, able to manipulate micro-objects, expanded all over theworld, making use of high resolution actuators and numerous sensors adapted to the microworld.This thesis opens a new paradigm in the design of micromanipulation robotics. We present the design, modeling,fabrication and control of a new microrobot, the DiMiBot (Digital MicroroBot). It is the first digital microrobot— inspired from digital electronics — which makes use of binary actuators for the generation of discretedisplacements with high accuracy without any sensors (open-loop control). These highly repeatable and robustbinary actuators (bistable modules) generate an accurate displacement of 25 μm. They are monolithicallyconbined with a parallel flexible architecture, allowing the generation of a discrete workspace, in which all the2N (N is the number of bistable modules used) distinct reachable positions are perfectly stable, repeatable andmechanically robust. They are evenly spread inside a 10.5 μm length square.After dimensioning, the first digital microrobot prototype in silicon was microfabricated in MIMENTO clean-roomof FEMTO-ST institute. This DiMiBot has 4 bistable modules and generates a workspace of 3.5 μm resolutionwith 90 nm repeatability
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Vincent Chalvet. Conception, réalisation et commande d'un microrobot numérique, planaire, non redondant et en technologie MEMS. Autre. Université de Franche-Comté, 2013. Français. ⟨NNT : 2013BESA2003⟩. ⟨tel-00914595⟩

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