L. Adouane, Architectures de contrôle comportementales et réactives pour la coopération d'un groupe de robots mobiles, 2005.

J. Barth and M. Kohl, A bistable magnetically enhanced shape memory microactuator with high blocking forces, MRS 2010 Spring Meeting, pp.189-196, 2010.
DOI : 10.1016/j.phpro.2010.11.097

P. Basset, B. Kaiser, M. Walenne, D. Collard, and L. Buchaillot, A 100v-ic for the remote powering and control of a microrobot using an electrostatic ciliary motion system, IEEE International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 2003.
URL : https://hal.archives-ouvertes.fr/hal-00146436

M. Bexell and S. Johansson, Fabrication and evaluation of a piezoelectric miniature motor, Sensors and Actuators A: Physical, vol.75, issue.1, pp.8-16, 1999.
DOI : 10.1016/S0924-4247(99)00017-5

F. Beyeler, A. Neild, S. Oberti, D. Bell, Y. Sun et al., Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field, Journal of Microelectromechanical Systems, vol.16, issue.1, pp.7-15, 2007.
DOI : 10.1109/JMEMS.2006.885853

M. Birch, R. Quinn, G. Hahm, S. Phillips, B. Drennan et al., Design of a cricket microrobot, Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065), 2000.
DOI : 10.1109/ROBOT.2000.844747

A. Bonvilain, C. , and N. , Prototypes of thermal actuated microlegs insect-like micro-robot, Journal Européen des Systèmes Automatisés, vol.36, pp.1277-1293, 2002.

D. Brouwer, B. De-jong, and H. Soemers, Design and modeling of a six DOFs MEMS-based precision manipulator, Precision Engineering, vol.34, issue.2, pp.307-319, 2010.
DOI : 10.1016/j.precisioneng.2009.08.001

J. Brufau, M. Puig-vidal, J. López-sánchez, J. Samitier, N. Snis et al., MICRON: Small Autonomous Robot for Cell Manipulation Applications, Proceedings of the 2005 IEEE International Conference on Robotics and Automation, pp.844-849, 2005.
DOI : 10.1109/ROBOT.2005.1570222

G. Caprari, P. Balmer, R. Piguet, and R. Siegwart, The autonomous micro robot "Alice": a platform for scientific and commercial applications, MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science., Creation of New Industry, (Cat. No.98TH8388), pp.231-235, 1998.
DOI : 10.1109/MHS.1998.745787

B. Charlot, W. Sun, K. Yamashita, H. Fujita, and H. Toshiyoshi, Bistable nanowire for micromechanical memory, Journal of Micromechanics and Microengineering, vol.18, issue.4, p.450057, 2008.
DOI : 10.1088/0960-1317/18/4/045005

Q. Chen, Microrobotique numérique fondée sur l'utilisation de modules bistables : conception, fabrication et commande de modules monolithiques, 2010.

Q. Chen, Y. Haddab, and P. Lutz, Digital Microrobotics Based on Bistable Modules: Design of Compliant Bistable Structures, 2008 IEEE/ASME International Conference on Mechtronic and Embedded Systems and Applications, pp.36-41, 2008.
DOI : 10.1109/MESA.2008.4735711
URL : https://hal.archives-ouvertes.fr/hal-00332445

Y. Chen, J. Suh, G. Kovacs, R. Darling, and K. Böhringer, Modeling and control of a 3-degree-of-freedom walking microrobot, 2006.

V. Chernonozhkin, Binary manipulator motion planning, 2006.

G. Chirikjian, A binary paradigm for robotic manipulators, Proceedings of the 1994 IEEE International Conference on Robotics and Automation, pp.3063-3069, 1994.
DOI : 10.1109/ROBOT.1994.351099

G. Chirikjian and I. Ebert-uphoff, Numerical convolution on the Euclidean group with applications to workspace generation, IEEE Transactions on Robotics and Automation, vol.14, issue.1, pp.123-136, 1998.
DOI : 10.1109/70.660856

K. Cho and H. Asada, Architecture design of a multi-axis cellular actuator array using segmented binary control of shape memory alloy, Robotics, 2006.

N. Chronis, L. , and N. , Electrothermally activated SU-8 microgripper for single cell manipulation in solution, Journal of Microelectromechanical Systems, vol.14, issue.4, 2005.
DOI : 10.1109/JMEMS.2005.845445

X. Chu, Z. Xing, W. Gong, L. Li, G. et al., Vibration analysis of stepping piezoelectric micro-motor using wiggle mode, Materials Science and Engineering: B, vol.99, issue.1-3, 2003.
DOI : 10.1016/S0921-5107(02)00559-7

K. R. Cochran, L. Fan, and D. L. Devoe, High-power optical microswitch based on direct fiber actuation, Sensors and Actuators A: Physical, vol.119, issue.2, pp.512-519, 2005.
DOI : 10.1016/j.sna.2004.10.037

J. Daneman, N. Tien, O. Solgaard, A. Pisano, K. Lau et al., Linear microvibromotor for positioning optical components, Journal of Microelectromechanical Systems, vol.5, issue.3, pp.159-165, 1996.
DOI : 10.1109/84.536622

A. Das, S. , J. Popa, D. Stephanou, and H. , On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer, 2008 IEEE International Conference on Automation Science and Engineering, 2008.
DOI : 10.1109/COASE.2008.4626541

M. De-boer, D. Luck, W. Ashurst, R. Maboudian, R. Corwin et al., High-Performance Surface-Micromachined Inchworm Actuator, Journal of Microelectromechanical Systems, vol.13, issue.1, pp.63-74, 2004.
DOI : 10.1109/JMEMS.2003.823236

B. De-jong, D. Brouwer, M. De-boer, H. Jansen, H. Soemers et al., Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator, Journal of Microelectromechanical Systems, vol.19, issue.5, pp.1116-1130, 2010.
DOI : 10.1109/JMEMS.2010.2067196

B. De-jong, D. Brouwer, H. Jansen, M. De-boer, and G. Krijnen, Nanometer resolution tem sample manipulator for rotational and translational positioning, 19th European Conference on Solid-State Transducers, EuroSensors XIX 2005 This work has been made possible by the financial support of the Dutch ministry of economic affairs program IOP Precision Technology, 2005.

J. Dejeu, M. Gauthier, P. Rougeot, and W. Boireau, Adhesion Forces Controlled by Chemical Self-Assembly and pH: Application to Robotic Microhandling, ACS Applied Materials & Interfaces, vol.1, issue.9, pp.1966-1973, 2009.
DOI : 10.1021/am900343w
URL : https://hal.archives-ouvertes.fr/hal-00413803

L. Devita, J. Plante, and S. Dubowsky, The design of high precision parallel mechanisms using binary actuation and elastic averaging : with application to mri cancer treatment, 12th IF to MM World Congress, 2007.

E. W. Dijkstra, A note on two problems in connexion with graphs, Numerische Mathematik, vol.4, issue.1, pp.269-271, 1959.
DOI : 10.1007/BF01386390

B. Donald, C. Levey, C. Mcgray, I. Paprotny, R. et al., An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot, Journal of microelectromechanical systems, 2006.
DOI : 10.1109/JMEMS.2005.863697
URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.121.3279

B. Donald, C. Levey, and I. Paprotny, Planar Microassembly by Parallel Actuation of MEMS Microrobots, Journal of Microelectromechanical Systems, vol.17, issue.4, pp.789-808, 2008.
DOI : 10.1109/JMEMS.2008.924251

J. Dong, D. Mukhopadhyay, and P. M. Ferreira, stage, Journal of Micromechanics and Microengineering, vol.17, issue.6, pp.1154-1161, 2007.
DOI : 10.1088/0960-1317/17/6/008

T. Ebefors and J. U. Mattsson, A robust micro conveyer realized by arrayed polyimide joint actuators, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), pp.1-13, 2000.
DOI : 10.1109/MEMSYS.1999.746892

T. Ebefors, J. Ulfstedt-mattsson, E. Kälvesten, and G. Stemme, A walking silicon micro-robot, IEEE International Conference on TRANSDU- CERS, Solid-State Sensors, Actuators and Microsystems, 1999.

I. Ebert-uphoff and G. Chirikjian, Efficient workspace generation for binary manipulators with many actuators, Journal of Robotic Systems, vol.22, issue.5, pp.383-400, 1995.
DOI : 10.1002/rob.4620120605

I. Ebert-uphoff and G. Chirikjian, Inverse kinematics of discretely actuated hyper-redundant manipulators using workspace densities, Proceedings of IEEE International Conference on Robotics and Automation, pp.1012-1017, 1996.
DOI : 10.1109/ROBOT.1996.503586

E. Edqvist, N. Snis, R. Mohr, O. Scholz, P. Corradi et al., Evaluation of building technology for mass producible millimetre-sized robots using flexible printed circuit boards, Journal of Micromechanics and Microengineering, vol.19, issue.7, p.75011, 2009.
DOI : 10.1088/0960-1317/19/7/075011

M. A. Erismis, H. P. Neves, R. Puers, and C. Hoof, Saw-tooth vernier ratchets for electrostatic inchworm actuators, Sensors and Actuators A: Physical, vol.156, issue.1, pp.66-71, 2008.
DOI : 10.1016/j.sna.2009.02.017

S. Fatikow, T. Wich, H. Hulsen, T. Sievers, and M. Jahnisch, Microrobot system for automatic nanohandling inside a scanning electron microscope, IEEE International Conference on Robotics and Automation, 2006.

M. Freudenreich, U. Mescheder, and G. Somogyi, Simulation and realization of a novel micromechanical bi-stable switch, Sensors and Actuators A: Physical, vol.114, issue.2-3, pp.2-3, 2004.
DOI : 10.1016/j.sna.2004.01.034

D. Frutiger, B. Kratochvil, N. , and B. , MagMites - Microrobots for wireless microhandling in dry and wet environments, 2010 IEEE International Conference on Robotics and Automation, pp.1112-1113, 2010.
DOI : 10.1109/ROBOT.2010.5509678

T. Gomm, L. L. Howell, and R. H. Selfridge, In-plane linear displacement bistable microrelay, Journal of Micromechanics and Microengineering, vol.12, issue.3, pp.257-264, 2002.
DOI : 10.1088/0960-1317/12/3/310

M. Hafez, M. Lichter, and S. Dubowsky, Optimized binary modular reconfigurable robotic devices, IEEE/ASME Transactions on Mechatronics, vol.8, issue.1, pp.18-25, 2003.
DOI : 10.1109/TMECH.2003.809156
URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.573.8429

P. Hart, N. Nilsson, R. , and B. , A Formal Basis for the Heuristic Determination of Minimum Cost Paths, IEEE Transactions on Systems Science and Cybernetics, vol.4, issue.2, pp.100-107, 1968.
DOI : 10.1109/TSSC.1968.300136

D. Hériban, J. Agnus, and M. Gauthier, Micro-manipulation of silicate micro-sized particles for biological applications, 5th International Workshop on Microfactories, 2006.

L. Howell, Compliant Mechanisms, 2001.

W. Hu, K. S. Ishii, and A. Ohta, Micro-assembly using optically controlled bubble microrobots, Applied Physics Letters, vol.99, issue.9, p.94103, 2011.
DOI : 10.1063/1.3631662

I. Ivan, G. Hwang, J. Agnus, M. Rakotondrabe, N. Chaillet et al., First experiments on MagPieR: A planar wireless magnetic and piezoelectric microrobot, 2011 IEEE International Conference on Robotics and Automation, pp.102-108, 2011.
DOI : 10.1109/ICRA.2011.5979885
URL : https://hal.archives-ouvertes.fr/hal-00797894

V. Kaajakari, S. Rodgers, and A. Lal, Ultrasonically driven surface micromachined motor, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000.
DOI : 10.1109/MEMSYS.2000.838487

M. Kharboutly, M. Gauthier, C. , and N. , Modeling the trajectory of a micro particle in a dielectrophoresis device for dynamic control, 2010 IEEE International Conference on Robotics and Automation, pp.4125-4130, 2010.
DOI : 10.1109/ROBOT.2010.5509981

K. Kim, S. Liu, Y. Zhang, and Y. Sun, Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback, Journal of Micromechanics and Microengineering, vol.18, issue.5, 2008.
DOI : 10.1088/0960-1317/18/5/055013

S. Kim, I. Hwang, K. Jo, E. Yoon, L. et al., Highresolution inchworm linear motor based on electrostatic twisting microactuators, Journal of Micromechanics and Microengineering, vol.15, pp.9-1674, 2005.

P. E. Kladatis and V. M. Bright, Prototype microrobots for micro-positioning and micro-unmanned vehicles, Sensors and Actuators A: Physical, vol.80, issue.2, pp.132-137, 2000.
DOI : 10.1016/S0924-4247(99)00258-7

Y. Koseki, T. Tanikawa, N. Koyachi, and T. Arai, Kinematic analysis of translational 3-DOF micro parallel mechanism using matrix method, Proceedings. 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2000) (Cat. No.00CH37113), 2000.
DOI : 10.1109/IROS.2000.894700

H. N. Kwon, I. Hwang, L. , and J. , A pulse-operating electrostatic microactuator for bi-stable latching, Journal of Micromechanics and Microengineering, vol.15, issue.8, pp.1511-1516, 2005.
DOI : 10.1088/0960-1317/15/8/019

J. Kwon, J. Yang, S. Lee, S. K. , and C. , Electromagnetically actuated micromanipulator using an acoustically oscillating bubble, Journal of Micromechanics and Microengineering, vol.21, issue.11, pp.115023-115132, 2011.
DOI : 10.1088/0960-1317/21/11/115023

A. B. Kyatkin and G. Chirikjian, Computation of Robot Configuration and Workspaces via the Fourier Transform on the Discrete-Motion Group, The International Journal of Robotics Research, vol.18, issue.6, pp.601-615, 1999.
DOI : 10.1177/02783649922066420

K. Lee, L. , and S. S. , Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication, based on contributions revised from the Technical Digest of the 16th IEEE International conference on Micro Electro mechanical Systems (MEMS 2003)</ce :title>, pp.37-43, 2004.
DOI : 10.1016/j.sna.2003.10.008

D. Lees and G. Chirikjian, A combinatorial approach to trajectory planning for binary manipulators, Proceedings of IEEE International Conference on Robotics and Automation, pp.2749-2754, 1996.
DOI : 10.1109/ROBOT.1996.506578

D. Lees and G. Chirikjian, An efficient method for computing the forward kinematics of binary manipulators, Proceedings of IEEE International Conference on Robotics and Automation, pp.1012-1017, 1996.
DOI : 10.1109/ROBOT.1996.506841

C. Lenders, M. Gauthier, L. , and P. , Parallel microrobot actuated by capillary effects, 2011 IEEE International Conference on Robotics and Automation, 2011.
DOI : 10.1109/ICRA.2011.5980290
URL : https://hal.archives-ouvertes.fr/hal-00648640

Y. Li and Q. Xu, A novel design and analysis of a 2-dof compliant parallel micromanipulator for nanomanipulation, Automation Science and Engineering IEEE Transactions on, vol.3, pp.247-254, 2006.

Y. Li and Q. Xu, Design and analysis of a totally decoupled flexure-based xy parallel micromanipulator, Robotics IEEE Transactions on, vol.25, issue.3, pp.645-657, 2009.

M. Lichter, V. Sujan, and S. Dubowsky, Computational issues in the planning and kinematics of binary robots, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292), pp.341-346, 2002.
DOI : 10.1109/ROBOT.2002.1013384

Q. Liu and Q. Huang, Micro-electro-mechanical digital-to-analog converter based on a novel bimorph thermal actuator, IEEE International Conference on Sensors, pp.1036-1041, 2002.

N. Lobontiu, J. S. Paine, E. O-'malley, and M. Samuelson, Parabolic and hyperbolic flexure hinges: flexibility, motion precision and stress characterization based on compliance closed-form equations, Precision Engineering, vol.26, issue.2, pp.183-192, 2002.
DOI : 10.1016/S0141-6359(01)00108-8

B. Lopez-walle, M. Gauthier, C. , and N. , Principle of a Submerged Freeze Gripper for Microassembly, IEEE Transactions on Robotics, vol.24, issue.4, pp.4-897, 2008.
DOI : 10.1109/TRO.2008.924944
URL : https://hal.archives-ouvertes.fr/hal-00335322

R. Luharuka and P. J. Hesketh, A Fully-Compliant, In-Plane Rotary, Bistable Micromechanism, Microelectromechanical Systems, pp.4224-481, 2005.
DOI : 10.1115/IMECE2005-81220

R. Luharuka and P. J. Hesketh, Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications, Sensors and Actuators A: Physical, vol.134, issue.1, pp.231-238, 2007.
DOI : 10.1016/j.sna.2006.04.030

R. Luharuka and P. J. Hesketh, A bistable electromagnetically actuated rotary gate microvalve, Journal of Micromechanics and Microengineering, vol.18, issue.3, p.3501514, 2008.
DOI : 10.1088/0960-1317/18/3/035015

K. Miura, Variable geometry truss concept. Tech. rep., The Institute of Space ans Astronautical Science, 1984.

T. Morita, M. Kurosawa, and T. Higuchi, An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film, Sensor and Actuators A, 1995.
DOI : 10.1016/0924-4247(96)80087-2

D. Mukhopadhyay, J. Dong, E. Pengwang, and P. Ferreira, A SOI-MEMS-based 3-DOF planar parallel-kinematics nanopositioning stage, Sensors and Actuators A: Physical, vol.147, issue.1, pp.340-351, 2008.
DOI : 10.1016/j.sna.2008.04.018

J. Paros, How to design flexure hinges, Mach Des, vol.37, pp.151-156, 1965.

C. Pawashe, S. Floyd, and M. Sitti, Dynamic modeling of stick slip motion in an untethered magnetic micro-robot, Proceedings of Robotics : Science and Systems IV, 2008.

C. Pawashe, S. Floyd, and M. Sitti, Multiple magnetic microrobot control using electrostatic anchoring, Applied Physics Letters, vol.94, issue.16, p.164108, 2009.
DOI : 10.1063/1.3123231

D. Pieper, The kinematics of manipulators under computer control, 1968.

J. Plante and S. Dubowsky, Dielectric elastomers as electromechanical transducers, pp.270-278, 2008.

J. Qiu, J. Lang, A. Slocum, and R. Strumpler, A high-current electrothermal bistable mems relay, IEEE International Conference on Micro Electro Mechanical Systems, pp.64-67, 2003.

M. Rakotondrabe, C. Clévy, and P. Lutz, Complete Open Loop Control of Hysteretic, Creeped, and Oscillating Piezoelectric Cantilevers, IEEE Transactions on Automation Science and Engineering, vol.7, issue.3, pp.440-450, 2010.
DOI : 10.1109/TASE.2009.2028617
URL : https://hal.archives-ouvertes.fr/hal-00436606

M. Rakotondrabe, Y. Haddab, and P. Lutz, Development, Modeling, and Control of a Micro-/Nanopositioning 2-DOF Stick&#x2013;Slip Device, IEEE/ASME Transactions on Mechatronics, vol.14, issue.6, pp.733-745, 2009.
DOI : 10.1109/TMECH.2009.2011134

S. Régnier, C. , and N. L. Microrobotique, Applications à la Micromanipulation, 2008.

D. Ruffieux, An AlN piezoelectric microactuator array, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000.
DOI : 10.1109/MEMSYS.2000.838597

M. Santer and S. Pellegrino, Compliant multistable structural elements, International Journal of Solids and Structures, vol.45, issue.24, pp.6190-6204, 2008.
DOI : 10.1016/j.ijsolstr.2008.07.014

F. Schmoeckel and H. Wörn, Remotely controllable mobile microrobots acting as nano positioners and intellignet tweezers in scanning electron microscopes (sems), IEEE International Conference on Robotics and Automation, 2001.

B. Shay, T. Hubbard, and M. Kujath, Linear frictional micro-conveyors, Sensor and Actuators A : Physical, 2008.
DOI : 10.1016/j.sna.2008.08.014

U. Simu and S. Johansson, Analysis of quasi-static and dynamic motion mechanisms for piezoelectric miniature robots, Sensor and Actuators A, 2006.
DOI : 10.1016/j.sna.2006.02.023

V. Sujan, M. Lichter, and S. Dubowsky, Lightweight hyper-redundant binary elements for planetary exploration robots, 2001 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Proceedings (Cat. No.01TH8556), pp.1273-1278, 2001.
DOI : 10.1109/AIM.2001.936904

J. Suthakorn and G. Chirikjian, A new inverse kinematics algorithm for binary manipulators with many actuators, Advanced Robotics, vol.15, issue.2, pp.225-244, 2001.
DOI : 10.1163/15685530152116245

M. Takeda, Applications of MEMS to industrial inspection, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), pp.182-191, 2001.
DOI : 10.1109/MEMSYS.2001.906510

Y. Tian, B. Shirinzadeh, D. Zhang, X. Liu, C. et al., Design and forward kinematics of the compliant micro-manipulator with lever mechanisms, Precision Engineering, vol.33, issue.4, pp.466-475, 2009.
DOI : 10.1016/j.precisioneng.2009.01.003

H. Toshiyoshi, D. Kobayashi, M. Mita, G. Hashiguchi, H. Fujita et al., Microelectromechanical digital-to-analog converters of displacement for step motion actuators, Journal of Microelectromechanical Systems, vol.9, issue.2, pp.218-225, 2000.
DOI : 10.1109/84.846702

Y. Wang, A fast workspace-density-driven inverse kinematics method for hyper-redundant manipulators, Robotica, vol.24, issue.05, pp.649-655, 2006.
DOI : 10.1017/S0263574706002827

A. Wingert, M. Lichter, and S. Dubowsky, On the Kinematics of Parallel Mechanisms with Bi-Stable Polymer Actuators, In Int. Symp. Advances Robot Kinematics, 2002.
DOI : 10.1007/978-94-017-0657-5_32

A. Wingert, M. Lichter, and S. Dubowsky, On the design of large degree-of-freedom digital mechatronic devices based on bistable dielectric elastomer actuators, IEEE/ASME Transactions on Mechatronics, vol.11, issue.4, pp.448-456, 2006.
DOI : 10.1109/TMECH.2006.878542

R. Wood, The First Takeoff of a Biologically Inspired At-Scale Robotic Insect, IEEE Transactions on Robotics, vol.24, issue.2, pp.341-347, 2008.
DOI : 10.1109/TRO.2008.916997

Y. Wu and Z. Zhou, Design calculations for flexure hinges, Review of Scientific Instruments, vol.73, issue.8, pp.3101-3106, 2002.
DOI : 10.1063/1.1494855

T. Yasuda, I. Shimoyama, and H. Miura, Microrobot actuated by a vibration energy field, Sensors and Actuators A: Physical, vol.43, issue.1-3, pp.366-370, 1994.
DOI : 10.1016/0924-4247(93)00709-D

R. Yeh, R. Conant, and K. Pister, Mechanical digital-to-analog converters, Tenth International Solid-State Sensors and Actuators Conference, pp.998-1001, 1999.

K. Yesin, K. Vollmers, N. , and B. , Actuation, Sensing, and Fabrication for In Vivo Magnetic Microrobots, Experiments Robotics IX, vol.21, pp.321-330, 2006.
DOI : 10.1007/11552246_31

B. Yi, G. B. Chung, H. Y. Na, W. K. Kim, and I. H. Suh, Design and experiment of a 3-dof parallel micromechanism utilizing flexure hinges, Robotics and Automation IEEE Transactions on, vol.19, issue.4, pp.604-612, 2003.

Y. Yong, S. Aphale, and S. Moheimani, Design, identification, and control of a flexure-based xy stage for fast nanoscale positioning, IEEE Transactions on Nanotechnology, vol.8, pp.1-46, 2009.

Y. Yong, L. , and T. , Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges, Mechanism and Machine Theory, vol.44, issue.6, pp.1156-1175, 2009.
DOI : 10.1016/j.mechmachtheory.2008.09.005

Y. Yong, T. Lu, and D. Handley, Review of circular flexure hinge design equations and derivation of empirical formulations, Precision Engineering, vol.32, issue.2, pp.63-70, 2008.
DOI : 10.1016/j.precisioneng.2007.05.002

Y. Yue, F. Gao, X. Zhao, and Q. J. Ge, Relationship among input-force, payload, stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator, Mechanism and Machine Theory, vol.45, issue.5, pp.756-771, 2010.
DOI : 10.1016/j.mechmachtheory.2009.12.006

B. Zettl, W. Szyszkowski, and W. Zhang, Accurate low DOF modeling of a planar compliant mechanism with flexure hinges: the equivalent beam methodology, Precision Engineering, vol.29, issue.2, pp.237-245, 2005.
DOI : 10.1016/j.precisioneng.2004.09.001

G. Zhou, F. E. Tay, F. S. Chau, Y. Zhao, and V. Logeeswaran, Micromechanical torsional digital-to-analog converter for open-loop angular positioning applications, Journal of Micromechanics and Microengineering, vol.14, issue.5, pp.737-745, 2004.
DOI : 10.1088/0960-1317/14/5/012

. Le-maillage-de-la, outil de maillage automatique interne à Ansys avec un maillage le plus fin possible. Des détails de maillage de cette structure sont représentés sur la Figure A.2, dans laquelle nous observons naturellement une finesse de maillage accrue au niveau des articulations flexibles. Les caractéristiques utilisés lors de cette étude sont les suivantes : ? module d'Young du silicium E = 1,69 GPa