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Conception, réalisation et commande d'un microrobot numérique, planaire, non-redondant et en technologie MEMS.

Abstract : With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics, optics, biomedical, . . .), came the necessity to build systems able to manipulate and make the assembly of smaller and smaller objects. Design of robotic stations, able to manipulate micro-objects, expanded all over the world, making use of high resolution actuators and numerous sensors adapted to the microworld. This thesis opens a new paradigm in the design of micromanipulation robotics. We present the design, modeling, fabrication and control of a new microrobot, the DiMiBot (Digital MicroroBot). It is the first digital microrobot -- inspired from digital electronics -- which makes use of binary actuators for the generation of discrete displacements with high accuracy without any sensors (open-loop control). These highly repeatable and robust binary actuators (bistable modules) generate an accurate displacement of 25 μm. They are monolithically conbined with a parallel flexible architecture, allowing the generation of a discrete workspace, in which all the 2N (N is the number of bistable modules used) distinct reachable positions are perfectly stable, repeatable and mechanically robust. They are evenly spread inside a 10.5 μm length square. After dimensioning, the first digital microrobot prototype in silicon was microfabricated in MIMENTO clean-room of FEMTO-ST institute. This DiMiBot has 4 bistable modules and generates a workspace of 3.5 μm resolution with 90 nm repeatability.
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Submitted on : Tuesday, December 3, 2013 - 3:05:37 PM
Last modification on : Thursday, January 13, 2022 - 12:00:07 PM
Long-term archiving on: : Monday, March 3, 2014 - 11:05:30 PM


  • HAL Id : tel-00913321, version 1


Vincent Chalvet. Conception, réalisation et commande d'un microrobot numérique, planaire, non-redondant et en technologie MEMS.. Micro et nanotechnologies/Microélectronique. Université de Franche-Comté, 2013. Français. ⟨tel-00913321⟩



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