A. Rogalski, Infrared detectors: status and trends, Progress in Quantum Electronics, vol.27, issue.2-3, pp.59-210, 2003.
DOI : 10.1016/S0079-6727(02)00024-1

J. Kim, Micromachined epitaxial golossal magnetoresistors for uncooled uncooled infrared bolometer, Royal Institude of Technology, 2005.

A. Rogalski, Infrared detectors: 2 nd ed, 2011.

H. Budzier and G. Gerlach, Thermal infrared sensors: Theory, Optimisation and Practice, 2011.
DOI : 10.1002/9780470976913

P. Kruse, L. Mcglauchlin, and R. Mcquistan, Elements of Infrared Technology: Generation, Transmission and Detection, 1962.

P. R. Norton, Infrared detectors in the next millennium, Infrared Technology and Applications XXV, pp.652-665, 1999.
DOI : 10.1117/12.354568

M. Razeghi, Current status and future trends of infrared detectors, Opto-Electronics Rev, vol.6, pp.155-194, 1998.

A. Rogalski, Abstract, Opto-Electronics Review, vol.20, issue.3, pp.279-308, 2012.
DOI : 10.2478/s11772-012-0037-7

H. V. Hayes, A New Receiver of Radiant Energy, Review of Scientific Instruments, vol.7, issue.5, pp.202-204, 1936.
DOI : 10.1063/1.1752121

H. A. Zahl and M. J. Golay, Pneumatic Heat Detector, Review of Scientific Instruments, vol.17, issue.11, pp.511-515, 1946.
DOI : 10.1063/1.1770416

M. J. Golay, A Pneumatic Infra???Red Detector, Review of Scientific Instruments, vol.18, issue.5, pp.357-362, 1947.
DOI : 10.1063/1.1740949

R. A. Wood, Uncooled infrared imaging systems, Semiconductor and Semimetals, 1997.

A. Giani, F. Mailly, F. Pascal-delannoy, A. Foucaran, and A. Boyer, Investigation of Pt/Ti bilayer on SiNx/Si substrates for thermal sensor applications, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.20, issue.1, p.112, 2002.
DOI : 10.1116/1.1424272

URL : https://hal.archives-ouvertes.fr/hal-00324019

K. C. Liddiard, Thin-film resistance bolometer IR detectors, Infrared Physics, vol.24, issue.1, pp.57-64, 1984.
DOI : 10.1016/0020-0891(84)90048-4

V. Y. Zerov, Y. V. Kulikov, V. G. Malyarov, I. A. Khrebtov, I. I. Shaganov et al., Vanadium oxide films with improved characteristics for ir microbolometric matrices, Technical Physics Letters, vol.27, issue.5, pp.378-380, 2001.
DOI : 10.1134/1.1376757

A. J. Syllaios, T. R. Schimert, R. W. Gooch, W. L. Mccardel, B. A. Ritchey et al., Amorphous Silicon Microbolometer Technology, Proc. 609, 2000.
DOI : 10.1117/12.336954

A. G. Perera, Bolometers, 2012.
DOI : 10.5772/2030

V. S. Jagtap, A. Scheuring, M. Longhin, A. J. Kreisler, and A. F. Dégardin, From Superconducting to Semiconducting YBCO Thin Film Bolometers: Sensitivity and Crosstalk Investigations for Future THz Imagers, IEEE Transactions on Applied Superconductivity, vol.19, issue.3, 2009.
DOI : 10.1109/TASC.2009.2019285

URL : https://hal.archives-ouvertes.fr/hal-00446569

A. Goyal, M. Rajeswari, R. Shreekala, S. E. Lofland, S. M. Bhagat et al., Material characteristics of perovskite manganese oxide thin films for bolometric applications, Applied Physics Letters, vol.71, issue.17, p.2535, 1997.
DOI : 10.1063/1.120427

L. Méchin, J. Routoure, B. Guillet, F. Yang, S. Flament et al., Uncooled bolometer response of a low noise La 0.7 Sr 0.3 MnO 3 thin film, J. Appl. Phys, vol.87, p.204103, 2005.

L. Méchin, J. Routoure, S. Mercone, F. Yang, S. Flament et al., 1???f noise in patterned La2???3Sr1???3MnO3 thin films in the 300???400K range, Journal of Applied Physics, vol.103, issue.8, p.83709, 2008.
DOI : 10.1063/1.2907956

F. Yang, L. Méchin, J. Routoure, B. Guillet, and R. A. Chakalov, Low-noise La0.7Sr0.3MnO3 thermometers for uncooled bolometric applications, Journal of Applied Physics, vol.99, issue.2, p.24903, 2006.
DOI : 10.1063/1.2159546

URL : https://hal.archives-ouvertes.fr/hal-00018145

S. Wu, Bruit basse fréquence dans des couches minces La 0.7 Sr 0.3 MnO 3 gravées: vers la réalisation de microcapteurs performants, 2012.

S. Maine, C. Koechlin, R. Fleurier, R. Haidar, N. Bardou et al., Mid-infrared detectors based on carbon nanotube films, physica status solidi (c), vol.7, issue.11-12, pp.2743-2746, 2010.
DOI : 10.1002/pssc.200983827

S. Karanth, M. A. Sumesh, V. Shobha, H. Ganesh-shanbhogue, and C. L. Nagendra, Infrared detectors based on thin film thermistor of ternary Mn???Ni???Co???O on micro-machined thermal isolation structure, Sensors and Actuators A: Physical, vol.153, issue.1, pp.69-75, 2009.
DOI : 10.1016/j.sna.2009.04.032

D. Fobes, E. Vehstedt, J. Peng, G. C. Wang, and T. J. Liu, : Potential application in bolometric detection, Journal of Applied Physics, vol.111, issue.8, p.83709, 2012.
DOI : 10.1063/1.4704387

S. Verghese, P. L. Richards, K. Char, and S. A. Sachtjen, Fabrication of an infrared bolometer with a high T/sub c/ superconducting thermometer, IEEE Transactions on Magnetics, vol.27, issue.2, pp.3077-3080, 1991.
DOI : 10.1109/20.133862

P. L. Richards, Bolometers for infrared and millimeter waves, Journal of Applied Physics, vol.76, issue.1, p.1, 1994.
DOI : 10.1063/1.357128

P. W. Kruse, superconductors for infrared detectors, Semiconductor Science and Technology, vol.5, issue.3S, pp.229-239, 1990.
DOI : 10.1088/0268-1242/5/3S/051

J. C. Mather, Bolometer noise: nonequilibrium theory, Applied Optics, vol.21, issue.6, pp.1125-1129, 1984.
DOI : 10.1364/AO.21.001125

F. N. Hooge, 1/?? noise is no surface effect, Physics Letters A, vol.29, issue.3, pp.139-140, 1969.
DOI : 10.1016/0375-9601(69)90076-0

P. W. Kruse, The design of uncooled infrared imaging arrays, Proc. SPIE 2746, pp.34-37, 1996.

P. W. Kruse, Principles of Uncooled Infrared Focal Plane Arrays, Semiconductors and Semimetals ; v. 47), pp.17-40, 1997.

I. A. Khrebtov, Superconductor Infrared and Submillimeter Radiation Receivers, Sov. J. Opt. Technol, vol.58, p.261, 1991.

Y. Okimoto, T. Katsufuji, T. Ishikawa, T. Arima, and Y. Tokura, f(0???x???0.3) as investigated by optical conductivity spectra, Physical Review B, vol.55, issue.7, p.4206, 1997.
DOI : 10.1103/PhysRevB.55.4206

C. M. Sierra, New features in solution derived La 0.7 Sr 0.3 MnO 3 thin films: spontaneous outcropping and nanoscale reversible resistive switching, 2010.

G. H. Jonker and J. H. Vansanten, Ferromagnetic compounds of manganese with perovskite structure, Physica, vol.16, issue.3, pp.337-349, 1950.
DOI : 10.1016/0031-8914(50)90033-4

R. Von-helmolt, J. Wecker, B. Holzapfel, L. Schultz, and K. Samwer, ferromagnetic films, Physical Review Letters, vol.71, issue.14, p.2331, 1993.
DOI : 10.1103/PhysRevLett.71.2331

S. Jin, T. H. Tiefel, M. Mccormack, R. A. Fastnacht, R. Ramesh et al., Thousandfold Change in Resistivity in Magnetoresistive La-Ca-Mn-O Films, Science, vol.264, issue.5157, pp.413-415, 1994.
DOI : 10.1126/science.264.5157.413

Y. Tokura, Y. Tomioka, H. Kuwahara, A. Asamitsu, Y. Morimoto et al., Origins of colossal magnetoresistance in perovskite-type manganese oxides (invited), Journal of Applied Physics, vol.79, issue.8, pp.5288-5291, 1996.
DOI : 10.1063/1.361353

D. Fadil, S. Wu, P. Perna, B. Renault, M. Saïb et al., (001) thin films at room temperature, Journal of Applied Physics, vol.112, issue.1, p.13906, 2012.
DOI : 10.1063/1.4730966

URL : https://hal.archives-ouvertes.fr/hal-00976072

S. Liu, B. Guillet, A. Aryan, C. Adamo, C. Fur et al., La0.7Sr0.3MnO3 suspended microbridges for uncooled bolometers made using reactive ion etching of the silicon substrates, Microelectronic Engineering, vol.111, issue.3
DOI : 10.1016/j.mee.2013.02.024

URL : https://hal.archives-ouvertes.fr/hal-00978970

S. Wu, D. Fadil, S. Liu, A. Aryan, B. Renault et al., Thin films for magnetic and Temperature Sensors at Room Temperature, Sensor & Transd. J, vol.141, pp.253-265, 2012.
URL : https://hal.archives-ouvertes.fr/hal-00977383

A. Hammouche, E. Siebert, and A. Hammou, Crystallographic, thermal and electrochemical properties of the system La1???xSrxMnO3 for high temperature solid electrolyte fuel cells, Materials Research Bulletin, vol.24, issue.3, pp.367-380, 1989.
DOI : 10.1016/0025-5408(89)90223-7

T. Venkatesan, M. Rajeswari, Z. Dong, S. B. Ogale, and R. Ramesh, Manganite-based devices: opportunities, bottlenecks and challenges, Phil. Trans. R. Soc. Lond. A, vol.356, issue.1742, pp.1661-1680, 1998.

L. M. Wang, J. Lai, J. Wu, Y. Kuo, and C. L. Chang, Effects of Ru substitution for Mn on La0.7Sr0.3MnO3 perovskites, Journal of Applied Physics, vol.102, issue.2, p.23915, 2007.
DOI : 10.1063/1.2761690

Y. K. Kuo, R. T. Jiang, and L. M. Wang, Anomalous Behavior in Ru, Chinese J. of Physics, vol.43, p.745, 2005.

M. N. Khlopkin, G. Kh, A. A. Panova, V. F. Shikov, D. A. Sinyavski? et al., Heat capacity of La1???x SrxMnO3 single crystals in different magnetic states, Physics of the Solid State, vol.42, issue.1, p.114, 2000.
DOI : 10.1134/1.1131177

I. El-kassab, A. M. Ahmed, P. Mandal, K. Barner, A. Kattwinkel et al., Heat conductivity of La1???xSrxMnO3 surface layers, Physica B: Condensed Matter, vol.305, issue.3-4, p.233, 2001.
DOI : 10.1016/S0921-4526(01)00618-4

S. Liu, Fabrication et caractérisation électrique et thermique de microbolomètres non refroidis suspendus à base de couches minces La 0.7 Sr 0.3 MnO 3 sur silicium, 2013.

A. Lisauskas, S. I. Khartsev, and A. Grishin, Tailoring the colossal magnetoresistivity: La0.7(Pb0.63Sr0.37)0.3MnO3 thin-film uncooled bolometer, Applied Physics Letters, vol.77, issue.5, p.756, 2000.
DOI : 10.1063/1.127109

K. Hayashi, E. Ohta, H. Wada, H. Higuma, and S. Miyashita, Fabrication of Bi???La???Sr???Mn???O Uncooled Microbolometer, Japanese Journal of Applied Physics, vol.40, issue.Part 1, No. 9A, pp.5281-5284, 2001.
DOI : 10.1143/JJAP.40.5281

M. Rajeswari, C. H. Chen, A. Goyal, C. Kwon, M. C. Robson et al., exhibiting colossal magnetoresistance, Applied Physics Letters, vol.68, issue.25, p.3555, 1996.
DOI : 10.1063/1.116635

M. Hong, Y. Chen, C. Hsu, W. Wu, T. Chow et al., Thin-Film Microbridge, Japanese Journal of Applied Physics, vol.40, issue.Part 1, No. 8, pp.4886-4890, 2001.
DOI : 10.1143/JJAP.40.4886

J. H. Hao, X. Mao, C. H. Chen, and D. X. Lu, Room Temperature Bolometric Applications Using Manganese Oxide Thin Films, International Journal of Infrared and Millimeter Waves, vol.20, issue.12, pp.2113-2120, 1999.
DOI : 10.1023/A:1022699005844

J. H. Hao, X. T. Zeng, and H. K. Wong, thin films, Journal of Applied Physics, vol.79, issue.3, pp.1810-1812, 1996.
DOI : 10.1063/1.360974

R. J. Choudhary, A. S. Ogale, S. R. Shinde, S. Hullavarad, S. B. Ogale et al., Evaluation of manganite films on silicon for uncooled bolometric applications, Applied Physics Letters, vol.84, issue.19, pp.3846-3848, 2004.
DOI : 10.1063/1.1748837

W. Song and J. J. Talghader, Design and characterization of adaptive microbolometers, Journal of Micromechanics and Microengineering, vol.16, issue.5, pp.1073-1079, 2006.
DOI : 10.1088/0960-1317/16/5/028

V. S. Jagtap, A. Scheuring, M. Longhin, A. J. Kreisler, and A. F. Dégardin, From Superconducting to Semiconducting YBCO Thin Film Bolometers: Sensitivity and Crosstalk Investigations for Future THz Imagers, IEEE Transactions on Applied Superconductivity, vol.19, issue.3, pp.287-292, 2006.
DOI : 10.1109/TASC.2009.2019285

URL : https://hal.archives-ouvertes.fr/hal-00446569

A. Mahmood, D. P. Butler, and Z. Çelik-butler, Micromachined bolometers on polyimide, Sensors and Actuators A: Physical, vol.132, issue.2, pp.452-459, 2006.
DOI : 10.1016/j.sna.2006.03.006

X. Liu, H. Fang, and L. Liu, Study on new structure uncooled a-Si microbolometer for infrared detection, Microelectronics Journal, vol.38, issue.6-7, pp.735-739, 2007.
DOI : 10.1016/j.mejo.2007.04.018

T. Ma, Y. Liu, and T. Li, A (100) direction front-etched membrane structure for a micro-bolometer, J. Micromech. Microeng, vol.19, p.129901, 2009.

M. M. Rana and D. P. Butler, High Responsivity <formula formulatype="inline"> <tex>${\rm a\!-\!Si}_{\rm x}{\rm Ge}_{1-{\rm x}}{\rm O}_{\rm y}:{\rm H}$</tex> </formula> Microbolometers, IEEE Sensors Journal, vol.7, issue.10, pp.1413-1419, 2007.
DOI : 10.1109/JSEN.2007.904881

E. Iborra, M. Clement, L. V. Herrero, and J. Sangrador, IR uncooled bolometers based on amorphous Ge/sub x/Si/sub 1-x/O/sub y/ on silicon micromachined structures, Journal of Microelectromechanical Systems, vol.11, issue.4, pp.322-328, 2002.
DOI : 10.1109/JMEMS.2002.800926

A. H. Ahmed and R. N. Tait, Characterization of an Amorphous<tex>$hbox Ge_xhbox Si_1-xhbox O_y$</tex>Microbolometer for Thermal Imaging Applications, IEEE Transactions on Electron Devices, vol.52, issue.8, pp.1900-1906, 2005.
DOI : 10.1109/TED.2005.852545

M. Moreno, A. Kosarev, A. Torres, and R. Ambrosio, Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer, Thin Solid Films, vol.515, issue.19, pp.7607-7610, 2007.
DOI : 10.1016/j.tsf.2006.11.172

L. Dong, R. Yue, and L. Liuff, An uncooled microbolometer infrared detector based on poly-SiGe thermistor, Sensors and Actuators A: Physical, vol.105, issue.3, pp.286-292, 2003.
DOI : 10.1016/S0924-4247(03)00232-2

M. Garcia, R. Ambrosio, A. Torres, and A. Kosarev, IR bolometers based on amorphous silicon germanium alloys, J. Non-Cryst. Solids, pp.338-340, 2004.

A. Torres, A. Kosarev, M. L. Garcia-cruz, and R. Ambrosio, Uncooled micro-bolometer based on amorphous germanium film, Journal of Non-Crystalline Solids, vol.329, issue.1-3, pp.179-183, 2003.
DOI : 10.1016/j.jnoncrysol.2003.08.037

H. Chi-anh, K. Shin, Y. Kim, S. Han, and . Moon, Characterization of uncooled bolometer with vanadium tungsten oxide infrared active layer, Sensors and Actuators A: Physical, vol.123, issue.124, pp.123-124, 2005.
DOI : 10.1016/j.sna.2005.04.024

C. Chen, X. Yi, X. Zhao, and B. Xiong, Characterizations of VO2-based uncooled microbolometer linear array, Sensors and Actuators A: Physical, vol.90, issue.3, pp.212-214, 2001.
DOI : 10.1016/S0924-4247(01)00495-2

A. J. Kreisler, V. S. Jagtap, and A. F. Dégardin, Infrared Response in the 95 to 300K Temperature Range of Detectors Based on Oxygen-depleted Y-Ba-Cu-O Thin Films, Physics Procedia, vol.36, pp.223-228, 2012.
DOI : 10.1016/j.phpro.2012.06.150

URL : https://hal.archives-ouvertes.fr/hal-00778835

S. A. Dayeh, D. P. Butler, and Z. Celik-butler, Micromachined infrared bolometers on flexible polyimide substrates, Sensors and Actuators A: Physical, vol.118, issue.1, pp.49-56, 2005.
DOI : 10.1016/j.sna.2004.07.009

H. K. Lee, J. B. Yoon, E. Yoon, S. B. Ju, Y. J. Yong et al., A High Fill-Factor Infrared Bolometer using Micromachined Multilevel Electrothermal Structures, IEEE T. Electr. Dev, vol.46, pp.1489-1491, 1999.

M. I. Nathan, W. P. Dumke, G. Burns, J. F. Dill, and G. Lasher, JUNCTIONS, Applied Physics Letters, vol.1, issue.3, pp.62-64, 1962.
DOI : 10.1063/1.1777371

. Sanyo-electric and . Co, Laser Diodes, 2007.

T. Cvi-melles-griot and . Guide, Fundamental of beam profileing and beam measurement

T. Cvi-melles-griot and . Guide, Beamsplitters

R. E. Ficher, B. Galeb, and P. R. Yoder, Optical System Design, pp.199-208, 2008.

A. Sakaki, F. Yamada, and T. Masui, A Simple and Accurate Measuring Technique of the Spot Size of Gaussian Laster Beams, Japanese Journal of Applied Physics, vol.17, issue.6, pp.1163-1164, 1978.
DOI : 10.1143/JJAP.17.1163

W. J. Marshall, Two methods for measuring laser beam diameter, Journal of Laser Applications, vol.22, issue.4, p.132, 2010.
DOI : 10.2351/1.3523051

Y. A. Alsultanny, Laser Beam Analysis Using Image Processing, Journal of Computer Science, vol.2, issue.1, pp.109-113, 2006.
DOI : 10.3844/jcssp.2006.109.113

N. S. Nishioka, D. P. Bua, and T. F. Deutsch, Measurement of laser-beam profile by using a video camera, Lasers in Medical Science, vol.4, issue.10, pp.21-23, 1987.
DOI : 10.1007/BF02594126

S. Mallidi and S. Emelianov, Photoacoustic technique to measure beam profile of pulsed laser systems, Review of Scientific Instruments, vol.80, issue.5, p.54901, 2009.
DOI : 10.1063/1.3125625

D. Wright, P. Greve, J. Fleischer, and L. Austin, Laser beam width, divergence and beam propagation factor ??? an international standardization approach, Optical and Quantum Electronics, vol.24, issue.9, pp.993-1000, 1992.
DOI : 10.1007/BF01588600

P. Inc, Technical guide " Beam profilers

F. M. Dickey and S. C. Holswade, Laser Beam Shaping: Theory and Techniques, pp.395-400, 2000.
DOI : 10.1201/9780824741631

C. E. Webb and J. Jones, Handbook of Laser Technology and Applications_ Volume II: Laser Design and Laser Systems, pp.1211-1216, 2004.

K. G. Libbrecht and J. L. Hall, A low???noise high???speed diode laser current controller, Review of Scientific Instruments, vol.64, issue.8, p.2133, 1993.
DOI : 10.1063/1.1143949

B. Guillet, D. Robbes, and L. Méchin, YBCO transition edge sensors used for very low noise thermal control, IEEE Transactions on Appiled Superconductivity, vol.13, issue.2, pp.657-660, 2003.
DOI : 10.1109/TASC.2003.813987

URL : https://hal.archives-ouvertes.fr/hal-00000377

S. Wu, Bruit basse fréquence dans des couches minces La 0.7 Sr 0.3 MnO 3 gravées: vers la réalisation de microcapteurs performants, 2012.

S. Liu, Fabrication et caractérisation électrique et thermique de microbolomètres non refroidis suspendus à base de couches minces La 0.7 Sr 0.3 MnO 3 sur silicium, 2013.

Y. Okimoto, T. Katsufuji, T. Ishikawa, T. Arima, and Y. Tokura, f(0???x???0.3) as investigated by optical conductivity spectra, Physical Review B, vol.55, issue.7, p.4206, 1997.
DOI : 10.1103/PhysRevB.55.4206

A. Lisauskas, S. Khartsev, and A. Grishin, Studies of 1/f Noise in La 1-x M x MnO 3 (M= Sr, Pb) Epitaxial Thin Films, Journal of Low Temperature Physics, vol.117, issue.5/6, pp.1647-1651, 1999.
DOI : 10.1023/A:1022524002015

J. Dho, Y. N. Kim, Y. S. Hwang, J. C. Kim, and N. H. Hur, Strain-induced magnetic stripe domains in La0.7Sr0.3MnO3 thin films, Applied Physics Letters, vol.82, issue.9, p.1434, 2003.
DOI : 10.1063/1.1556967

K. Daoudi, T. Tsuchiya, I. Yamaguchi, T. Manabe, S. Mizuta et al., Substrate effect on the temperature coefficient of resistance of La0.7Ca0.3MnO3 thin films prepared by metal organic deposition, Journal of Electroceramics, vol.2746, issue.43, pp.527-532, 2006.
DOI : 10.1007/s10832-006-9911-3

J. Kim, A. M. Grishin, and H. H. Radamson, Properties of La0.75Sr0.25MnO3 films grown on Si substrate with Si1???xGex and Si1???yCy buffer layers, Thin Solid Films, vol.515, issue.2, pp.411-415, 2006.
DOI : 10.1016/j.tsf.2005.12.222

R. Prasad, H. K. Singh, M. P. Singh, W. Prellier, and P. K. Siwach, Thickness dependent transport properties of compressively strained La 0.88 Sr 0.12 MnO 3 ultrathin films, J. Appl. Phys, vol.103, 2008.

S. Liu, Fabrication et caractérisation électrique et thermique de microbolomètres non refroidis suspendus à base de couches minces La 0.7 Sr 0.3 MnO 3 sur silicium, 2013.

H. Neff, superconducting bolometers: The effect of film thickness, Journal of Applied Physics, vol.69, issue.12, p.8375, 1991.
DOI : 10.1063/1.347401

T. Tsuchiya, T. Yoshitake, Y. Shimakawa, Y. Kubo, Y. Yamaguchi et al., Preparation and characterization of La0.8Sr0.2MnO3 thin films by an excimer laser MOD process for a bolometer, Applied Physics A, vol.5, issue.4-6, pp.1537-1539, 2004.
DOI : 10.1016/S1369-8001(02)00074-4

M. Rajeswari, C. H. Chen, A. Goyal, C. Kwon, M. C. Robson et al., exhibiting colossal magnetoresistance, Applied Physics Letters, vol.68, issue.25, p.3555, 1996.
DOI : 10.1063/1.116635

J. H. Hao, X. T. Zeng, and H. K. Wong, thin films, Journal of Applied Physics, vol.79, issue.3, p.1810, 1996.
DOI : 10.1063/1.360974

A. Aryan, J. Routoure, B. Guillet, P. Langlois, C. Fur et al., Optical Characterisation of La 0.7 Sr 0.3 MnO 3 Thin Film Based Uncooled Bolometers, IARIA Sensor Devices Proceeding, pp.61-65, 2012.
URL : https://hal.archives-ouvertes.fr/hal-00976640

A. J. Kreisler, V. S. Jagtap, and A. F. Dégardin, Infrared Response in the 95 to 300K Temperature Range of Detectors Based on Oxygen-depleted Y-Ba-Cu-O Thin Films, Physics Procedia, vol.36, pp.223-228, 2012.
DOI : 10.1016/j.phpro.2012.06.150

URL : https://hal.archives-ouvertes.fr/hal-00778835

B. Guillet, S. Wu, B. Cretu, R. Talmat, H. Achour et al., Uncertainties in the estimation of low frequency noise level extracted from noise spectral density measurements, 2011 21st International Conference on Noise and Fluctuations, pp.433-436, 2011.
DOI : 10.1109/ICNF.2011.5994363

URL : https://hal.archives-ouvertes.fr/hal-00993924

F. Kreith, R. M. Manglik, and M. S. Bohn, Priciple of heat transfert, Cengage Learning, pp.10-90, 2011.

J. H. Lienhard, A Heat Transfer Textbook, pp.4-77, 2008.

A. Bozbey, YBCO Transition Edge Bolometers: Effect of Superconductivity Transition on the Phase and Magnitude of Response, 2003.

M. Nahum, S. Verghese, P. L. Richards, and K. Char, films, Applied Physics Letters, vol.59, issue.16, p.2034, 1991.
DOI : 10.1063/1.106123

M. Kelkar, P. E. Phelan, and B. Gu, Thermal boundary resistance for thin-film high-Tc superconductors at varying interfacial temperature drops, International Journal of Heat and Mass Transfer, vol.40, issue.11, pp.2631-2645, 1997.
DOI : 10.1016/S0017-9310(96)00279-7

C. D. Marshall, I. M. Fishman, R. C. Dorfman, C. B. Eom, and M. D. Fayer, thin films: Surface-selective transient-grating experiments, Physical Review B, vol.45, issue.17, pp.10009-10021, 1992.
DOI : 10.1103/PhysRevB.45.10009

C. D. Marshall, A. Tokmakoff, I. M. Fishman, C. B. Eom, J. M. Phillips et al., substrates using the transient grating method, Journal of Applied Physics, vol.73, issue.2, p.850, 1993.
DOI : 10.1063/1.353296

S. Zeuner, H. Lengfellner, and W. Prettl, films, Physical Review B, vol.51, issue.17, pp.11903-11908, 1994.
DOI : 10.1103/PhysRevB.51.11903

Y. V. Medvedev, Y. M. Nikolaenko, A. M. Grishin, and S. I. Khartsev, The diagnostics of thermal kinetic coefficients for the optimization of film bolometer properties, Technical Physics, vol.47, issue.1, p.114, 2002.
DOI : 10.1134/1.1435899

Y. M. Nikolaenko, Y. V. Medvedev, Y. A. Genenko, M. Ghafari, and H. Hahn, Interface thermal resistance of nanostructured FeCoCu film and Si substrate, physica status solidi (c), vol.40, issue.5, pp.1343-1346, 2006.
DOI : 10.1002/pssc.200563135

Y. M. Nikolaenko, Y. V. Medvedev, M. Ghafari, H. Hahn, and I. N. Chukanova, Thermal boundary resistance of a granular film-substrate interface, Technical Physics Letters, vol.32, issue.10, pp.904-907, 2006.
DOI : 10.1134/S1063785006100269

V. Jagtap, A. Scheuring, M. Longhin, A. Kreisler, and A. Dégardin, From Superconducting to Semiconducting YBCO Thin Film Bolometers: Sensitivity and Crosstalk Investigations for Future THz Imagers, IEEE Transactions on Applied Superconductivity, vol.19, issue.3, pp.287-292, 2009.
DOI : 10.1109/TASC.2009.2019285

URL : https://hal.archives-ouvertes.fr/hal-00446569

H. Muta, K. Kurosaki, and S. Yamanaka, Thermoelectric properties of reduced and La-doped single-crystalline SrTiO3, Journal of Alloys and Compounds, vol.392, issue.1-2, p.306, 2005.
DOI : 10.1016/j.jallcom.2004.09.005

A. Durán, F. Morales, L. Fuentes, and J. M. Siqueiros, :Pr, Journal of Physics: Condensed Matter, vol.20, issue.8, p.85219, 2008.
DOI : 10.1088/0953-8984/20/8/085219

Y. Suemune, from 4.5?? to 300??K, Journal of the Physical Society of Japan, vol.20, issue.1, p.174, 1965.
DOI : 10.1143/JPSJ.20.174

D. Oh, J. Ravichandran, C. Liang, W. Siemons, and B. Jalan, Thermal conductivity as a metric for the crystalline quality of SrTiO3 epitaxial layers, Applied Physics Letters, vol.98, issue.22, p.221904, 2011.
DOI : 10.1063/1.3579993

S. Wiedigen, T. Kramer, M. Feuchter, I. Knorr, and N. Nee, thin films, Applied Physics Letters, vol.100, issue.6, p.61904, 2012.
DOI : 10.1063/1.3682300

E. Breckenfeld, R. Wilson, J. Karthik, A. Damodaran, D. Cahill et al., Thin Films, Chemistry of Materials, vol.24, issue.2, p.331, 2012.
DOI : 10.1021/cm203042q

S. S. Todd and R. E. Lorenson, Heat Capacities at Low Temperatures and Entropies at 298.16??K. of Metatitanates of Barium and Strontium, Journal of the American Chemical Society, vol.74, issue.8, p.2043, 1952.
DOI : 10.1021/ja01128a054

A. M. Hofmeister, Thermal diffusivity of oxide perovskite compounds at elevated temperature, Journal of Applied Physics, vol.107, issue.10, p.103532, 2010.
DOI : 10.1063/1.3371815

R. David and . Lide, CRC Handbook of Chemistry and Physics, Internet version, Boca Raton, FL, 2005.

G. A. Slack, Crystals from 3?? to 300??K, Physical Review, vol.126, issue.2, p.427, 1962.
DOI : 10.1103/PhysRev.126.427

A. C. Victor and T. B. Douglas, Thermodynamic properties of magnesium oxide and beryllium oxide from 298 to 1200, J. Res. Nat. Bur. Stand. Sec. A, Phys. Ch, vol.67, issue.4, p.325, 1963.

K. Itatani, T. Tsujimoto, and A. Kishimoto, Thermal and optical properties of transparent magnesium oxide ceramics fabricated by post hot-isostatic pressing, Journal of the European Ceramic Society, vol.26, issue.4-5, p.639, 2006.
DOI : 10.1016/j.jeurceramsoc.2005.06.011

A. Seko, F. Oba, A. Kuwabara, and I. Tanaka, pseudobinary system: A first-principles lattice dynamics study, Physical Review B, vol.72, issue.2, p.24107, 2005.
DOI : 10.1103/PhysRevB.72.024107

L. Lu, Y. Chenga, X. Chena, and J. Zhu, Thermodynamic properties of MgO under high pressure from first-principles calculations, Physica B: Condensed Matter, vol.370, issue.1-4, p.236, 2005.
DOI : 10.1016/j.physb.2005.09.017

C. J. Glassbrenner and G. A. Slack, Thermal Conductivity of Silicon and Germanium from 3??K to the Melting Point, Physical Review, vol.134, issue.4A, p.1058, 1964.
DOI : 10.1103/PhysRev.134.A1058

B. Abklks, D. S. Bkkrs, G. D. Cody, and J. P. Dismukes, Thermal Conductivity of Ge-Si Alloys at High Temperatures, Phys. Rev, vol.125, p.44, 1961.

L. M. Wang, J. Lai, J. Wu, Y. Kuo, and C. L. Chang, Effects of Ru substitution for Mn on La0.7Sr0.3MnO3 perovskites, Journal of Applied Physics, vol.102, issue.2, p.23915, 2007.
DOI : 10.1063/1.2761690

I. El-kassab, A. M. Ahmed, P. Mandal, K. Barner, A. Kattwinkel et al., Heat conductivity of La1???xSrxMnO3 surface layers, Physica B: Condensed Matter, vol.305, issue.3-4, p.233, 2001.
DOI : 10.1016/S0921-4526(01)00618-4

Y. K. Kuo, R. T. Jiang, and L. M. Wang, Anomalous Behavior in Ru, Chinese J. of Physics, vol.43, p.745, 2005.

H. Lee, H. Liu, C. Hsu, and Y. Liang, Preparation of La0.7Sr0.3MnO3/LaNiO3 magnetic oxide superlattice structure by rf sputtering, Thin Solid Films, vol.494, issue.1-2, p.325, 2006.
DOI : 10.1016/j.tsf.2005.08.161

M. N. Khlopkin, G. Kh, A. A. Panova, V. F. Shikov, D. A. Sinyavski? et al., Heat capacity of La1???x SrxMnO3 single crystals in different magnetic states, Physics of the Solid State, vol.42, issue.1, p.114, 2000.
DOI : 10.1134/1.1131177

M. Fardmanesh, Analytic thermal modeling for dc-to-midrange modulation frequency responses of thin-film high-T_c superconductive edge-transition bolometers, Applied Optics, vol.40, issue.7, pp.1080-1088, 2001.
DOI : 10.1364/AO.40.001080

M. Fardmanesh, A. Rothwarf, and K. J. Scoles, Low and midrange modulation frequency response for YBCO infrared detectors: interface effects on the amplitude and phase, IEEE Transactions on Appiled Superconductivity, vol.5, issue.1, pp.7-13, 1995.
DOI : 10.1109/77.384561

T. Hwang, S. E. Schwarz, and D. B. Rutledge, Microbolometers for infrared detection, Applied Physics Letters, vol.34, issue.11, p.773, 1979.
DOI : 10.1063/1.90669

Q. Hu and P. L. Richards, superconducting microbolometer, Applied Physics Letters, vol.55, issue.23, p.2444, 1989.
DOI : 10.1063/1.101998

P. L. Richards, Bolometers for infrared and millimeter waves, Journal of Applied Physics, vol.76, issue.1, p.1, 1994.
DOI : 10.1063/1.357128

S. Verghese, P. L. Richards, K. Char, and S. A. Sachtjen, Fabrication of an infrared bolometer with a high T/sub c/ superconducting thermometer, IEEE Transactions on Magnetics, vol.27, issue.2, pp.3077-3080, 1991.
DOI : 10.1109/20.133862

L. Méchin, J. Routoure, B. Guillet, F. Yang, S. Flament et al., Uncooled bolometer response of a low noise La 0.7 Sr 0.3 MnO 3 thin film, J. Appl. Phys, vol.87, p.204103, 2005.

L. Méchin, C. Adamo, S. Wu, B. Guillet, S. Lebargy et al., Epitaxial La0.7Sr0.3MnO3 thin films grown on SrTiO3 buffered silicon substrates by reactive molecular-beam epitaxy, physica status solidi (a), vol.103, issue.3, p.1090, 2012.
DOI : 10.1002/pssa.201127712

S. Wu, Bruit basse fréquence dans des couches minces La 0.7 Sr 0.3 MnO 3 gravées: vers la réalisation de microcapteurs performants, 2012.

A. Lisauskas, S. I. Khartsev, and A. Grishin, Tailoring the colossal magnetoresistivity: La0.7(Pb0.63Sr0.37)0.3MnO3 thin-film uncooled bolometer, Applied Physics Letters, vol.77, issue.5, p.756, 2000.
DOI : 10.1063/1.127109

K. C. Liddiard, Thin-film resistance bolometer IR detectors, Infrared Physics, vol.24, issue.1, pp.57-64, 1984.
DOI : 10.1016/0020-0891(84)90048-4

V. S. Jagtap, A. Scheuring, M. Longhin, A. J. Kreisler, and A. F. Dégardin, From Superconducting to Semiconducting YBCO Thin Film Bolometers: Sensitivity and Crosstalk Investigations for Future THz Imagers, IEEE Transactions on Applied Superconductivity, vol.19, issue.3, 2009.
DOI : 10.1109/TASC.2009.2019285

URL : https://hal.archives-ouvertes.fr/hal-00446569

X. Liu, H. Fang, and L. Liu, Study on new structure uncooled a-Si microbolometer for infrared detection, Microelectronics Journal, vol.38, issue.6-7, pp.735-739, 2007.
DOI : 10.1016/j.mejo.2007.04.018

T. Ma, Y. Liu, and T. Li, A (100) direction front-etched membrane structure for a micro-bolometer, J. Micromech. Microeng, vol.19, p.129901, 2009.

M. M. Rana and D. P. Butler, High Responsivity <formula formulatype="inline"> <tex>${\rm a\!-\!Si}_{\rm x}{\rm Ge}_{1-{\rm x}}{\rm O}_{\rm y}:{\rm H}$</tex> </formula> Microbolometers, IEEE Sensors Journal, vol.7, issue.10, pp.1413-1419, 2007.
DOI : 10.1109/JSEN.2007.904881

E. Iborra, M. Clement, L. V. Herrero, and J. Sangrador, IR uncooled bolometers based on amorphous Ge/sub x/Si/sub 1-x/O/sub y/ on silicon micromachined structures, Journal of Microelectromechanical Systems, vol.11, issue.4, pp.322-328, 2002.
DOI : 10.1109/JMEMS.2002.800926

A. H. Ahmed and R. N. Tait, Characterization of an Amorphous<tex>$hbox Ge_xhbox Si_1-xhbox O_y$</tex>Microbolometer for Thermal Imaging Applications, IEEE Transactions on Electron Devices, vol.52, issue.8, pp.1900-1906, 2005.
DOI : 10.1109/TED.2005.852545

M. Moreno, A. Kosarev, A. Torres, and R. Ambrosio, Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer, Thin Solid Films, vol.515, issue.19, pp.7607-7610, 2007.
DOI : 10.1016/j.tsf.2006.11.172

L. Dong, R. Yue, and L. Liuff, An uncooled microbolometer infrared detector based on poly-SiGe thermistor, Sensors and Actuators A: Physical, vol.105, issue.3, pp.286-292, 2003.
DOI : 10.1016/S0924-4247(03)00232-2

M. Garcia, R. Ambrosio, A. Torres, and A. Kosarev, IR bolometers based on amorphous silicon germanium alloys, J. Non-Cryst. Solids, pp.338-340, 2004.

A. Torres, A. Kosarev, M. L. Garcia-cruz, and R. Ambrosio, Uncooled micro-bolometer based on amorphous germanium film, Journal of Non-Crystalline Solids, vol.329, issue.1-3, pp.179-183, 2003.
DOI : 10.1016/j.jnoncrysol.2003.08.037

H. Chi-anh, K. Shin, Y. Kim, S. Han, and . Moon, Characterization of uncooled bolometer with vanadium tungsten oxide infrared active layer, Sensors and Actuators A: Physical, vol.123, issue.124, pp.123-124, 2005.
DOI : 10.1016/j.sna.2005.04.024

C. Chen, X. Yi, X. Zhao, and B. Xiong, Characterizations of VO2-based uncooled microbolometer linear array, Sensors and Actuators A: Physical, vol.90, issue.3, pp.212-214, 2001.
DOI : 10.1016/S0924-4247(01)00495-2

A. J. Kreisler, V. S. Jagtap, and A. F. Dégardin, Infrared Response in the 95 to 300K Temperature Range of Detectors Based on Oxygen-depleted Y-Ba-Cu-O Thin Films, Physics Procedia, vol.36, pp.223-228, 2012.
DOI : 10.1016/j.phpro.2012.06.150

URL : https://hal.archives-ouvertes.fr/hal-00778835

S. A. Dayeh, D. P. Butler, and Z. Celik-butler, Micromachined infrared bolometers on flexible polyimide substrates, Sensors and Actuators A: Physical, vol.118, issue.1, pp.49-56, 2005.
DOI : 10.1016/j.sna.2004.07.009

H. K. Lee, J. B. Yoon, E. Yoon, S. B. Ju, Y. J. Yong et al., A High Fill-Factor Infrared Bolometer using Micromachined Multilevel Electrothermal Structures, IEEE T. Electr. Dev, vol.46, pp.1489-1491, 1999.

L. Méchin, C. Adamo, S. Wu, B. Guillet, S. Lebargy et al., Epitaxial La0.7Sr0.3MnO3 thin films grown on SrTiO3 buffered silicon substrates by reactive molecular-beam epitaxy, physica status solidi (a), vol.103, issue.3, p.1090, 2012.
DOI : 10.1002/pssa.201127712

A. Hammouche, E. Siebert, and A. Hammou, Crystallographic, thermal and electrochemical properties of the system La1???xSrxMnO3 for high temperature solid electrolyte fuel cells, Materials Research Bulletin, vol.24, issue.3, p.367, 1989.
DOI : 10.1016/0025-5408(89)90223-7