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Intégration sur silicium et caractérisation de films minces de polyuréthane nanocomposite pour le développement de micro-actionneurs MEMS électrostrictifs

Abstract : This thesis is part of the general development of MEMS microactuators, low cost and simple technology for future applications in the domain of microfluidics. The motivation of this work is to evaluate the feasibility of an electrostrictive microactuator based on electroactive nanocomposite polymer thin films. Polyurethane, loaded with carbon or iron carbide nanoparticles is chosen to be integrated in a conventional silicon MEMS process. The first chapter provides a state of the art of MEMS actuators, presents the different families of electroactive polymers and defines what is electrostriction. The second chapter is devoted to the integration of polyurethane thin films on silicon and to the development of different mechanical and electrical test structures. The emphasis is on identifying and overcoming technological barriers. Chapter three presents the mechanical and electrical characterization methods and the obtained results for pure and nanocomposites films. The fourth and final chapter concerns the realization and the static and dynamic characterizations of first MEMS demonstrators.
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Submitted on : Friday, October 25, 2013 - 12:08:31 PM
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  • HAL Id : tel-00876878, version 1

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Michael Roussel. Intégration sur silicium et caractérisation de films minces de polyuréthane nanocomposite pour le développement de micro-actionneurs MEMS électrostrictifs. Autre. INSA de Lyon, 2012. Français. ⟨NNT : 2012ISAL0135⟩. ⟨tel-00876878⟩

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