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Mechanics of functionnal thin films : instabilities and adhesion

Abstract : We have studied thin film instabilities and in particular buckling driver delamination of thin films on rigid substrates. In the first part we studied residual stress in molybdenum thin films deposited by magnetron sputtering. With these results we can deposit a film with high compressive stresses for delamination. In the second part, compressive stressed layers are used to induce buckling driven delamination of a stack with a weak interface. Propagation as well as morphology of delamination are studied. Parameters playing a role in the buckling morphology are identified and enable drawing of a phase diagram. The last part of the work is dedicated to the development of a numerical model coupling buckling of thin plate and cohesive zone in order to model buckling driven delamination. This model has been solved by finite elements method. Results are sound with experiments.
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Contributor : Jean-Yvon Faou Connect in order to contact the contributor
Submitted on : Tuesday, October 1, 2013 - 2:07:55 PM
Last modification on : Sunday, June 26, 2022 - 9:46:26 AM
Long-term archiving on: : Thursday, January 2, 2014 - 7:05:14 AM


  • HAL Id : tel-00868409, version 1


Jean-Yvon Faou. Mechanics of functionnal thin films : instabilities and adhesion. Mechanics of materials [physics.class-ph]. Université Pierre et Marie Curie - Paris VI, 2013. English. ⟨tel-00868409⟩



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