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Compensation de la fréquence des résonateurs MEMS pour des applications de référence temps

Abstract : Present, Micro-Electro-Mechanical-Systems (MEMS) have become essential ineveryday technology products. Thanks to their size, performances andintegration, resonant microsystems have been enrolled in the diversification ofthe famous Moore's Law. However, the time based applications remain the market segmentwhere MEMS are unable to settle permanently. Indeed, the oscillator-based Quartz is thenumber one product on the market, a market estimated at 17 billions dollars, thanks to afrequency stability of a few parts per million over its lifetime.Given the link between the frequency of a MEMS resonator and its intrinsic dimensions,the various manufacturing steps induce a shift of this frequency from the target value. Wewill try to address this difference.In this context, we proposed a new method of correction across the wafer. This methodconsists of a final technological step after a first electrical measurement to quantify theshift. We will show that it is possible in one step, to reduce the Gaussian representing thefrequency variation within the wafer to a few parts per million. From this perspective, wehave developed two physical models that quantify the correction to achieve the objectives.Moreover, we set up a manufacturing process CMOS compatible with only 17 steps and2 photolithographic masks starting with a SOI wafer. This process has enabled theproduction of flexural mode resonators and bulk mode resonators, whose intrinsicperformances (f, Q) can compete with Quartz. Finally, we validated our concept and ourphysical models thanks to electrical characterization of our devices.Analysis of the results allowed us to develop a list of possible improvements to establish aroute to the industrialization of MEMS resonators. First, special attention will be focusedon the choice of substrate and the technology used to ensure perfect performances.Correction method requires a preliminary electrical measurement, this step must bedetailed and one have to ensure that it does not increase the overall cost. Although partiallystudied, the packaging of MEMS and integration are the points to consider in particularkeeping the specifications of the resonator itself.
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Submitted on : Tuesday, October 8, 2013 - 9:52:10 AM
Last modification on : Friday, December 11, 2020 - 8:28:05 AM
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Version validated by the jury (STAR)


  • HAL Id : tel-00838019, version 2




Yoan Civet. Compensation de la fréquence des résonateurs MEMS pour des applications de référence temps. Autre. Université de Grenoble, 2012. Français. ⟨NNT : 2012GRENT075⟩. ⟨tel-00838019v2⟩



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