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Conception et réalisation d'un interféromètre polarimétrique : application à la nanométrologie dimensionnelle

Abstract : To take into account growing requirements of nanotechnology, especially dimensional nanometrology, an original method of measuring and controlling position in the sub-nanometre scale was developed and implemented. This method is based on a Michelson interferometer combined with a polarimeter and an electronic control. The movement of the mobile mirror is connected to the polarization state at the output of the interferometer. Once the experience was implemented, we have demonstrated displacements with nanometric steps. The repeatability is at sub-nanometric scales for micrometric range back and forth displacements. The study of the influence of the polarization state at the output of the interferometer on the measurement and control of the position has been made. The other conventional sources of errors have also been studied to establish a complete error budget. Under a controlled environment, this method could be applied to millimetre range displacements, leading to many applications in nanotechnology.
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Submitted on : Thursday, June 6, 2013 - 8:34:44 AM
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Suan Xu. Conception et réalisation d'un interféromètre polarimétrique : application à la nanométrologie dimensionnelle. Optique [physics.optics]. Université de Versailles-Saint Quentin en Yvelines, 2009. Français. ⟨tel-00830893⟩

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