CONTRIBUTION À L'UTILISATION DE MICROCAPTEURS CHIMIQUES À BASE DE MICROPOUTRES RÉSONANTES POUR LA DÉTECTION D'ESPÈCES CHIMIQUES EN MILIEU GAZEUX

Abstract : A new approach of chemical sensors is presented in this work. The physical effect used by this new type of sensor is based on perturbations of the sensitive coating properties : the sorption of specifics species by the sensitive layer modifies its physicochemical characteristics inducing frequency shift and also bending variation. An analytical modelling has led to optimize geometrical microcantilever parameters. To monitor the resonant frequency, the microcantilevers have been inserted in the retroaction loop of an amplifier to constitute an oscillator. Experimental results have shown the mass loading effect sensitivity. Then, ethanol detection has been realized and obtained results have been compared to theoretical modelling.
Complete list of metadatas

https://tel.archives-ouvertes.fr/tel-00827748
Contributor : Ludivine Fadel <>
Submitted on : Wednesday, May 29, 2013 - 4:25:14 PM
Last modification on : Thursday, January 11, 2018 - 6:21:06 AM

Identifiers

  • HAL Id : tel-00827748, version 1

Citation

Ludivine Fadel. CONTRIBUTION À L'UTILISATION DE MICROCAPTEURS CHIMIQUES À BASE DE MICROPOUTRES RÉSONANTES POUR LA DÉTECTION D'ESPÈCES CHIMIQUES EN MILIEU GAZEUX. Micro et nanotechnologies/Microélectronique. Université Sciences et Technologies - Bordeaux I, 2004. Français. ⟨tel-00827748⟩

Share

Metrics

Record views

342

Files downloads

427