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Etude à l'échelle nanométrique par sonde locale de la fiabilité de diélectriques minces pour l'intégration dans les composants microélectroniques du futur

Abstract : In order to continue the scaling of the MOS transistor the replacement of the gate oxide layer by a high K/Metal gate was mandatory. From a reliability point of view, the introduction of these new materials could cause a lifetime reduction. To test the lifetime of the device a new technique using the C-AFM under Ultra High Vacuum is proposed. The experimental approach is based on a systematic comparison between the time to failure distribution obtained at device scale and at nanoscale. The comparison is reliable if we assume a contact surface of several nm² under the tip. Weibull distributions with a same slope and a same voltage acceleration factor have been found exhibiting a common origin of breakdown at both scales.We have reported a negative differential resistance phenomenon during Current-Voltage measurements. This degradation phenomenon has been modelled and explained by the growth of a conductive filament in the oxide layer. This model is also able to describe the breakdown of the oxide layer.Finally the bi layer gate stack of the 28nm node was studied. The first experimental proof confirming that the lifetime distribution of the bi-layer gate stack is a function of the lifetime of each layer taken separately is presented.
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Pierre Delcroix. Etude à l'échelle nanométrique par sonde locale de la fiabilité de diélectriques minces pour l'intégration dans les composants microélectroniques du futur. Autre. Université de Grenoble, 2012. Français. ⟨NNT : 2012GRENT080⟩. ⟨tel-00822926⟩

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