L. C. Allen, Electronegativity is the average one-electron energy of the valence-shell electrons in ground-state free atoms, Journal of the American Chemical Society, vol.111, issue.25, p.9003, 1989.
DOI : 10.1021/ja00207a003

R. D. Shannon, Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides, Acta Crystallographica Section A, vol.32, issue.5, p.751, 1976.
DOI : 10.1107/S0567739476001551

A. Maeland and W. Lahar, The hydride and fluoride analogy, Z. Phys. Chem, vol.179, issue.193, 1993.

C. Li, K. C. Soh, and P. Wu, Formability of ABO3 perovskites, Journal of Alloys and Compounds, vol.372, issue.1-2, p.40, 2004.
DOI : 10.1016/j.jallcom.2003.10.017

P. Depondt, Physique numérique " , chapitre III, Condensateur non linéaire et modèle de Landau, p.141

W. J. Merz, Single-Domain Crystals, Physical Review, vol.76, issue.8, p.1221, 1949.
DOI : 10.1103/PhysRev.76.1221

J. F. Scott, Applications of Modern Ferroelectrics, Science, vol.315, issue.5814, p.954, 2007.
DOI : 10.1126/science.1129564

J. G. Webster, The measurement, instrumentation, and sensors handbook, 1999.

G. Sebald, D. Guyomar, and A. , On thermoelectric and pyroelectric energy harvesting, Smart Materials and Structures, vol.18, issue.12, p.125006, 2009.
DOI : 10.1088/0964-1726/18/12/125006

R. B. Olsen and D. Evans, Pyroelectric energy conversion: Hysteresis loss and temperature sensitivity of a ferroelectric material, Journal of Applied Physics, vol.54, issue.10, p.5941, 1983.
DOI : 10.1063/1.331769

I. Kanno, Piezoelectric Deformable MEMS Mirror for Adaptive Optics Composed of PZT Thin Films, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., pp.156-157
DOI : 10.1109/OMEMS.2006.1708312

Y. I. Kim, W. Si, P. M. Woodward, E. Sutter, S. Park et al., N, Chemistry of Materials, vol.19, issue.3, p.618, 2007.
DOI : 10.1021/cm062480k
URL : https://hal.archives-ouvertes.fr/hal-00351249

Y. Zhang, T. Motohashi, Y. Masubuchi, S. Kikkawa, and J. , Local anionic ordering and anisotropic displacement in dielectric perovskite SrTaO2N, Journal of the Ceramic Society of Japan, vol.119, issue.1391, p.581, 2011.
DOI : 10.2109/jcersj2.119.581

R. L. Withers, Y. Liu, P. Woodward, and Y. Kim, Structurally frustrated polar nanoregions in BaTaO2N and the relationship between its high dielectric permittivity and that of BaTiO3, Applied Physics Letters, vol.92, issue.10, p.102907, 2008.
DOI : 10.1063/1.2890052

M. Yang, J. Oro-sole, J. A. Rodgers, A. B. Jorge, A. Fuertes et al., Anion order in perovskite oxynitrides, Nature Chemistry, vol.39, issue.1, p.47, 2011.
DOI : 10.1038/nchem.908

S. D. Skapin, D. Kolar, and D. Suvorov, Phase stability and equilibria in the La2O3???TiO2 system, Journal of the European Ceramic Society, vol.20, issue.8, p.1179, 2000.
DOI : 10.1016/S0955-2219(99)00270-8

F. Lichtenberg, D. Widmer, J. G. Bednorz, T. Williams, and A. Reller, Phase diagram of LaTiO x : from 2D layered ferroelectric insulator to 3D weak ferromagnetic semiconductor, Zeitschrift f???r Physik B Condensed Matter, vol.14, issue.2, p.211, 1991.
DOI : 10.1007/BF01324328

D. A. Maclean and J. E. Greedan, Crystal growth, electrical resistivity, and magnetic properties of lanthanum titanate and cerium titanate. Evidence for a metal-semiconductor transition, Inorganic Chemistry, vol.20, issue.4, p.1025, 1981.
DOI : 10.1021/ic50218a015

M. Eitel and J. E. Greedan, A high resolution neutron diffraction study of the perovskite LaTiO3, Journal of the Less Common Metals, vol.116, issue.1, p.95, 1986.
DOI : 10.1016/0022-5088(86)90220-1

F. X. Zhang, J. Lian, U. Becker, R. C. Ewing, L. M. Wang et al., Structural change of layered perovskite La2Ti2O7 at high pressures, Journal of Solid State Chemistry, vol.180, issue.2, p.571, 2007.
DOI : 10.1016/j.jssc.2006.11.022

J. Takahashi, K. Kakeyama, T. Hayashi, and J. , (Ln=La, Nd and Sm), Japanese Journal of Applied Physics, vol.30, issue.Part 1, No. 9B, p.2354, 1991.
DOI : 10.1143/JJAP.30.2354

?. F. Fompeyrine, J. W. Seo, and J. Locquet, Growth and characterization of ferroelectric LaTiO3??5 thin films, Journal of the European Ceramic Society, vol.19, issue.6-7, p.1493, 1999.
DOI : 10.1016/S0955-2219(98)00463-4

J. Zaanen, G. A. Sazatzky, and J. W. Allen, Band gaps and electronic structure of transition-metal compounds, Physical Review Letters, vol.55, issue.4, p.418, 1985.
DOI : 10.1103/PhysRevLett.55.418

S. Nanamatsu, M. Kimura, K. Doi, S. Matsushita, and N. Yamada, A new ferroelectric: La2Ti2o7, Ferroelectrics, vol.36, issue.5, p.511, 1974.
DOI : 10.1080/00150197408234143

S. Nanamatsu and M. Kimura, Single Crystal, Journal of the Physical Society of Japan, vol.36, issue.5, p.1495, 1974.
DOI : 10.1143/JPSJ.36.1495

Z. Shao, S. Saitzek, P. Roussel, O. Mentré, F. P. Gheorghiu et al., Structural and dielectric/ferroelectric properties of (La1???xNdx)2Ti2O7 synthesized by sol???gel route, Journal of Solid State Chemistry, vol.183, issue.7, p.1652, 2010.
DOI : 10.1016/j.jssc.2010.05.004

D. Logvinovich, L. Bocher, D. Sheptyakov, R. Figi, S. G. Ebbinghaus et al., Microstructure, surface composition and chemical stability of partly ordered LaTiO2N, Solid State Sciences, vol.11, issue.8, p.1513, 2009.
DOI : 10.1016/j.solidstatesciences.2009.05.024

K. G. Kanade, J. Baeg, B. B. Kale, S. M. Lee, S. Moon et al., Rose-red color oxynitride Nb2Zr6O17-xNxNb2Zr6O17-xNx: A visible light photocatalyst to hydrogen production, International Journal of Hydrogen Energy, vol.32, issue.18, p.4678, 2007.
DOI : 10.1016/j.ijhydene.2007.07.040

N. Nishimura, R. Biet, K. Maeda, L. Le-gendre, R. Abe et al., Effect of TiCl4 treatment on the photoelectrochemical properties of LaTiO2N electrodes for water splitting under visible light, Thin Solid Films, vol.518, issue.20, p.5855, 2010.
DOI : 10.1016/j.tsf.2010.05.094
URL : https://hal.archives-ouvertes.fr/hal-00511917

R. Aguiar, A. Weidenkaff, C. W. Schneider, A. Reller, and S. G. Ebbinghaus, Synthesis and properties of oxynitrides (La,Sr)Ti(O,N)3 thin films, Progress in Solid State Chemistry, vol.35, issue.2-4, p.291, 2007.
DOI : 10.1016/j.progsolidstchem.2007.01.033

A. Lita and J. E. Sanchez, Characterization of surface structure in sputtered Al films: Correlation to microstructure evolution, Journal of Applied Physics, vol.85, issue.2, pp.876-882, 1999.
DOI : 10.1063/1.369206

P. Sigmund, Thoery of sputtering, Phys. Rev, vol.184, issue.383, 1969.

H. Gnaser, R. Behrisch, and W. Eckstein, Energy and Angular Distributions of Sputtered Species, Topics Appl. Phys, vol.110, p.231, 2007.
DOI : 10.1007/978-3-540-44502-9_5

V. Rigato, M. Spolaore, and G. D. Mea, Correlation of boron and nitrogen contents with the flux of energetic Ar+ ions at the substrate during the deposition of BN coatings by RF magnetron sputtering, Surface and Coatings Technology, vol.97, issue.1-3, p.275, 1997.
DOI : 10.1016/S0257-8972(97)00380-0

X. H. Zhu, B. Guigues, A. Defay, C. Dubarry, and M. Aid, Low temperature perovskite crystallization of highly tunable dielectric Ba0.7Sr0.3TiO3 thick films deposited by ion beam sputtering on platinized silicon substrates, Journal of Applied Physics, vol.105, issue.4, p.44108, 2009.
DOI : 10.1063/1.3080247

X. Liu and D. Li, Influence of charged particle bombardment and sputtering parameters on the properties of HfO 2 films prepared by dc reactive magnetron sputtering, Applied Surface Science, vol.253, issue.4, p.2143, 2006.
DOI : 10.1016/j.apsusc.2006.04.013

?. D. Kim, G. H. Lee, S. Y. Lee, and D. Y. Kim, Atomic scale simulation of physical sputtering of silicon oxide and silicon nitride thin films, Journal of Crystal Growth, vol.286, issue.1, p.71, 2006.
DOI : 10.1016/j.jcrysgro.2005.09.045

?. Ahmed and Z. , Thèse de doctorat de l, Université de Rennes, vol.1, 2009.

S. G. Ebbinghaus, R. Aguiar, A. Weidenkaff, S. Gsell, and A. Reller, Topotactical growth of thick perovskite oxynitride layers by nitridation of single crystalline oxides, Solid State Sciences, vol.10, issue.6, p.709, 2008.
DOI : 10.1016/j.solidstatesciences.2007.03.011

J. Fompeyrine, J. Seo, and J. Locquet, Growth and characterization of ferroelectric LaTiO3??5 thin films, Journal of the European Ceramic Society, vol.19, issue.6-7, p.1493, 1999.
DOI : 10.1016/S0955-2219(98)00463-4

M. Kestigian, R. Ward, and J. Amer, The Lanthanum-Titanium-Oxygen System, Journal of the American Chemical Society, vol.77, issue.23, p.6199, 1955.
DOI : 10.1021/ja01628a035

N. Ishizawa, F. Marumo, S. Iwai, M. Kimura, and T. Kawamura, Compounds with perovskite-type slabs. V. A high-temperature modification of La2Ti2O7, Acta Crystallographica Section B Structural Crystallography and Crystal Chemistry, vol.38, issue.2, p.368, 1982.
DOI : 10.1107/S0567740882002994

J. Takahashi, K. Kageyama, T. Hayashi, and J. , (Ln=La, Nd and Sm), Japanese Journal of Applied Physics, vol.30, issue.Part 1, No. 9B, p.2354, 1991.
DOI : 10.1143/JJAP.30.2354

W. Bucheli, T. Dur-n, and R. Imenez, Perovskites, es s Sanz, and Alejandro Varez, p.5831, 2012.
DOI : 10.1021/ic300365q

.. Et-coplanaire, Dispositifs utilisés pour la caractérisation diélectrique en configuration MIM, p.113

E. Carlsson and S. Gevorgian, Conformal mapping of the field and charge distributions in multilayered substrate CPWs, IEEE Transactions on Microwave Theory and Techniques, vol.47, issue.8, p.1544, 1999.
DOI : 10.1109/22.780407

D. Gignac, Cours de microélectronique ? Techniques de fabrication, 2007.

Y. I. Kim, W. Si, P. M. Woodward, E. Sutter, S. Park et al., N, Chemistry of Materials, vol.19, issue.3, p.618, 2007.
DOI : 10.1021/cm062480k
URL : https://hal.archives-ouvertes.fr/hal-00351249

B. Pevzner, Master of Science in Electrical Engineering, Massachusetts Institute of Technology, 1995.

A. A. Ahmed, Z. A. Talib, M. Z. Hussein, and A. Zakaria, Zn???Al layered double hydroxide prepared at different molar ratios: Preparation, characterization, optical and dielectric properties, Journal of Solid State Chemistry, vol.191, p.271, 2012.
DOI : 10.1016/j.jssc.2012.03.013

Y. Lin, G. Wu, N. Qin, and D. Bao, Structure, dielectric, ferroelectric, and optical properties of (1???x)Ba(Zr0.2Ti0.8)O3???x(Ba0.7Ca0.3)TiO3 thin films prepared by sol???gel method, Thin Solid Films, vol.520, issue.7, p.2800, 2012.
DOI : 10.1016/j.tsf.2011.12.030

S. D. Skapin, S. Kunej, and D. Suvorov, Phase relations and electrical properties in the pseudo-ternary La2O3???TiO2???Mn2O3 system in air, Journal of the European Ceramic Society, vol.28, issue.16, p.3119, 2008.
DOI : 10.1016/j.jeurceramsoc.2008.05.022

?. B. Moeckly and Y. Zhang, Strontium titanate thin films for tunable YBa/sub 2/Cu/sub 3/O/sub 7/ microwave filters, IEEE Transactions on Appiled Superconductivity, vol.11, issue.1, p.450, 2001.
DOI : 10.1109/77.919380