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K. Royal, Analyse et d'Architecture de Systèmes ? Centre National de Recherche Scientifique LF ? Low frequency LNA ? Low Noise Amplifier MIM ? Metal-Insulator-Metal NASA ? National Aeronautics and Space Administration nPnT ? n-Pole n-Through PECVD ? Plasma-Enhanced Chemical Vapor Deposition PLL, Phase Lock Loop PNA ? Performance Network Analyzer PS ? Phase shifter R&D ? Research and Developement RF-MEMS ? Radio Frequency MicroElectroMechanical Systems RIE ? Reactive-Ion Etching