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Etude des procédés de fabrication de microdispositifs électromagnétiques sur supports souples pour l'imagerie médicale (IRM) et le contrôle non destructif des matériaux

Abstract : In this work, development of microcoil manufacturing processes on flexible substrates are presented. The devices are dedicated to 2 specific applications : the Non-Destructive Testing (NDT) and the Magnetic Resonance Imaging (MRI). Coils elaborated on flexible substrate fit any shape of surface sample thus improving the device sensibility. The impact of the technology on the performances of the elaborate microdevices is studied for two types of microcoils: planar and three-dimensional. The manufactoring process that has been used involves the copper micromolding. To improve copper/substrate (Peek or Kapton) adhesion a plasma treatment is performed before the seed-layer deposition. Microsolenoids are obtained after only 2 micromolding steps, one of them involving gray-tone lithography. In order to decrease the sample/coil distance, via through the susbtrate were realized by polymer laser ablation and filled by copper electrodeposition. Thus the electrical connections are made on the susbtrate back side. For NDT, 40 turn planar microcoils (L ≈ 1µH ; tracks width : 5 µm) and 13 turn microsolenoids (L<1nH) have been realized and characterized. The mesured electrical performances are excellent (quality factor Q ≈ 25) and higher than those obtained with devices carried out on oxidized silicon (Q ≈ 5). For MRI, surface coil sizes are in the 3 - 5 mm range. At 64 MHz, the Q factor of the 15 mm antenna is equal to 80 which is an excellent result. The first image in the world of a subcutanous model tumor induced in a mouse has been obtained by using a deformed micro-antenna.
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https://tel.archives-ouvertes.fr/tel-00793956
Contributor : Marion Woytasik <>
Submitted on : Sunday, February 24, 2013 - 2:14:02 PM
Last modification on : Thursday, December 10, 2020 - 12:32:59 PM
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  • HAL Id : tel-00793956, version 1

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Marion Woytasik. Etude des procédés de fabrication de microdispositifs électromagnétiques sur supports souples pour l'imagerie médicale (IRM) et le contrôle non destructif des matériaux. Génie des procédés. Université Pierre et Marie Curie - Paris VI, 2005. Français. ⟨tel-00793956⟩

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