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A contribution to photonic MEMS : study of optical resonators and interferometers based on all-silicon Bragg reflectors

Abstract : This research work has been conducted to introduce a novel class of Fabry-Perot (FP) resonators : curved FP cavity based on coating-free Bragg mirrors of cylindrical shape, obtained by silicon micromachining. Another specificity is the rather large cavity lengths (L>200 µm) combined with high quality factor Q (up to 104), for the purpose of applications requiring cavity enhanced absorption spectroscopy, in which the product Q.L is a figure of merit. In this contest, the basic architecture has been modeled analytically to know the high order transverse modes supported by such cavities. Hence, the experimental conditions which lead to preferential excitation (or rejection) of these modes have been tested experimentally leading to the validation of our theoretical model and to a better understanding of the cavity behaviour. A second architecture, based on the curved FP together with a fiber rod lens has been developed for the purpose of providing stable designs. It was also modeled, fabricated and characterized leading to the expected performance improvements. On another side, a highlight on one of the potential applications that we identified for the curved cavities is presented by inserting the cavity into an electro-mechanical system. It consists of exciting and measuring tiny vibration through opto-mechanical coupling in a MEMS mechanical resonator embedding an FP cavity.Finally, as a complement to our study on resonators, we started exploring applications of optical interferometers based on similar micromachined silicon Bragg mirrors. For this purpose, an optical measurement microsystem was designed, fabricated and characterized ; it consists of an optical probe for surface profilometry in confined environments, based on an all-silicon Michelson interferometer
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Maurine Malak Karam. A contribution to photonic MEMS : study of optical resonators and interferometers based on all-silicon Bragg reflectors. Other. Université Paris-Est, 2011. English. ⟨NNT : 2011PEST1034⟩. ⟨tel-00769408⟩

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