.. Électromécanique-de-supramems, Modélisation, Chapitre, vol.3, p.84

K. G. Jansky, Electrical Disturbances Apparently of Extraterrestrial Origin, Proceedings of the Institute of Radio Engineers, pp.1387-1398, 1933.

A. A. Penzias, Measurement of Cosmic Microwave Background Radiation Microwave Theory and Techniques, IEEE Transactions on, vol.16, issue.9, pp.608-611, 1968.

T. Phillips and D. Woody, Millimeter- And Submillimeter-Wave Receivers, Annual Review of Astronomy and Astrophysics, vol.20, issue.1, pp.285-321, 1982.
DOI : 10.1146/annurev.aa.20.090182.001441

J. M. Payne, Millimeter and Submillimeter Wavelength Radio Astronomy, Proc. IEEE, pp.993-1017, 1989.

J. W. Baars, Design parameters and measured performance of the IRAM 30-m Millimeter Radio Telescope, Proc. IEEE, pp.687-696, 1994.
DOI : 10.1109/5.284735

D. Downes, Large Southeren Array", An IRAM-ESO-OSO-NFRA Study project, 1995.

D. Yang and J. Cheng, Current Projects and next Initiatives for Radio Telescopes, Acta Astronomica Sinica, vol.44, pp.40-46, 1995.

J. E. Carlstrom, The Millimeter Array, Proceedings of the Seventh International Symposium on Space Terahertz Technology, pp.17-28, 1996.

M. Ishiguro, LMSA, Proceedings of the 19th International Conference on Infrared and Millimeter Waves, p.246, 1994.

T. L. Wilson, The Atacama Large Millimeter Array Infrared and Millimeter Waves, 15th International Conference on Terahertz Electronics. IRMMW- THz. Joint 32nd International Conference on, pp.591-593, 2007.
DOI : 10.1109/icimw.2007.4516642

P. Léna, 3ème édition revue et augmentée,"L'observation en astrophysique, pp.551-553, 2008.

. Van, A. Noise: Sources, Characterization, Measurement, 1971.
URL : https://hal.archives-ouvertes.fr/inria-00636785

S. Leclerco, Conception d'une caméra bolométrique pour la radioastronomie millimétrique à grand champ, Thèse de doctorat, CNRS, soutenue, 2004.

A. Monfardini, Kinetic Inductance Detectors development for mm-wave Astronomy, EAS Publications Series, vol.37, pp.95-99, 2009.
DOI : 10.1051/eas/0937011

J. R. Tucker and M. J. Feldman, Quantum detection at millimeter wavelengths, Reviews of Modern Physics, vol.57, issue.4, pp.1055-1113, 1985.
DOI : 10.1103/RevModPhys.57.1055

H. Qing, Low-noise micromachined SIS mixers for millimeter-wave imaging arrays, 1996.

N. R. Erickson, A 15 element focal plane array for 100 GHz, IEEE Transactions on Microwave Theory and Techniques, vol.40, issue.1, pp.1-11, 1992.
DOI : 10.1109/22.108317

J. M. Payne, Multibeam receiver for millimeter???wave radio astronomy, Review of Scientific Instruments, vol.59, issue.9, 1911.
DOI : 10.1063/1.1140050

A. R. Kerr, Some fundamental and practical limits on broadband matching to capacitive devices, and the implications for SIS mixer design, IEEE Transactions on Microwave Theory and Techniques, vol.43, issue.1, pp.2-13, 1995.
DOI : 10.1109/22.363015

W. M. Chen, Demonstration of a 93-GHz Communication System Based on a High-Sensitivity SIS Receiver, 2006 Joint 31st International Conference on Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, pp.289-307, 2006.
DOI : 10.1109/ICIMW.2006.368497

A. Navarrini, Development of DSB and SSB SIS Mixers for Radio Astronomy in the frequency band 250-370 GHz, Thèse de doctorat, 2002.

J. R. Tucker and M. J. Feldman, Quantum detection at millimeter wavelengths, Reviews of Modern Physics, vol.57, issue.4, pp.1055-1113, 1985.
DOI : 10.1103/RevModPhys.57.1055

B. Cetinoneri, Y. A. Atesal, M. Gabriel, and . Rebeiz, A Miniature DC-70 GHz SP4T Switch in 0.13-µm CMOS, IEEE MTT-S International Microwave Symposium Digest, pp.1093-1096, 2009.

S. F. Chao, A 50 to 94-GHz CMOS SPDT Switch Using Traveling-Wave Concept, IEEE Microwave and Wireless Components Letters, vol.17, issue.2, pp.130-132, 2007.
DOI : 10.1109/LMWC.2006.890339

H. Y. Chang and C. Y. Chan, A Low Loss High Isolation DC-60 GHz SPDT Traveling-Wave Switch With a Body Bias Technique in 90 nm CMOS Process, IEEE Microwave and Wireless Components Letters, vol.20, issue.2, pp.82-84, 2010.
DOI : 10.1109/LMWC.2009.2038518

R. Lai, J. Kuo, and H. Wang, A 60–110 GHz Transmission-Line Integrated SPDT Switch in 90 nm CMOS Technology, IEEE Microwave and Wireless Components Letters, vol.20, issue.2, pp.85-87, 2010.
DOI : 10.1109/LMWC.2009.2038519

H. Mizutani, Design Considerations for Traveling-Wave Single-Pole Multithrow MMIC Switch Using Fully Distributed FET, IEEE Transactions on Microwave Theory and Techniques, vol.55, issue.4, pp.664-671, 2007.
DOI : 10.1109/TMTT.2007.892801

H. Kamitsuna, DC to 50???GHz single-pole four-throw InP-HEMT switch IC with highly uniform performance, Electronics Letters, vol.45, issue.12, 2009.
DOI : 10.1049/el.2009.0472

I. Kallfass, Multiple-Throw Millimeter-Wave FET Switches for Frequencies from 60 up to 120 GHz, Proceedings of the 38 th European Microwave Conference, pp.1453-1456, 2008.
DOI : 10.1109/eumc.2008.4751740

Y. Tsukahara, 60 GHz High Isolation SPDT MMIC Switches Using Shunt pHEMT Resonator, IEEE MTT-S 2008 Microwave Symposium Digest, pp.1541-1544, 2008.

J. Oh, Epitaxial Layer Design for High Performance GaAs pHEMT SPDT MMIC Switches, ETRI Journal, vol.31, issue.3, pp.342-344, 2009.
DOI : 10.4218/etrij.09.0208.0348

E. Carey and S. Lidholm, Milimeter-Wave Integrated Cicruits, 2004.

R. Hajj, Conception et réalisation de fonction de filtrage dans les domaines millimétriques et sub-millimétriques, Thèse de doctorat

J. G. Yang, M. Kim, and K. Yang, An InGaAs PIN-diode based Broadband Travelingwave Switch with High-Isolation Characteristics, IEEE International Conference on Indium Phosphide & Related Materials, pp.207-209, 2009.
DOI : 10.1109/iciprm.2009.5012480

L. Samoska, A G-Band 160 GHz T/R Module Concept for Planetary Landing Radar, 2006 European Microwave Conference, pp.757-760, 2006.
DOI : 10.1109/EUMC.2006.281012

Y. S. Lee, A 50-110 GHz ohmic contact RF MEMS silicon switch with high isolation, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), pp.759-762, 2010.
DOI : 10.1109/MEMSYS.2010.5442295

T. Yamomoto, Millimeter-wave MEMS capacitive switch in vacuum-sealed in-line wafer level package, 2009 Asia Pacific Microwave Conference, pp.198-201, 2009.
DOI : 10.1109/APMC.2009.5385408

M. K. Kahtib, Fonctions de commutation à base de microcommutateurs MEMS RF appliquées à la conception de matrices de commutation, Thèse de doctorat, 2008.

S. Gong, H. Shen, and N. S. Barker, A 60-GHz 2-bit Switched-Line Phase Shifter Using SP4T RF-MEMS Switches, IEEE Transactions on Microwave Theory and Techniques, vol.59, issue.4, pp.894-900, 2011.
DOI : 10.1109/TMTT.2011.2112374

T. M. Vu, Fabrication and characterization of RF-MEMS switch in V-band, 2009 Asia Pacific Microwave Conference, pp.202-205
DOI : 10.1109/APMC.2009.5385326

S. Seok, Mechanical and Electrical Characterization of Benzocyclobutene Membrane Packaging, 2007 Proceedings 57th Electronic Components and Technology Conference, pp.1685-1689, 2007.
DOI : 10.1109/ECTC.2007.374021

URL : https://hal.archives-ouvertes.fr/hal-00284061

R. R. Mansour, A comparaison between RF MEMS Switches and Semiconductor Switches, Proceedings of the 2004 International Conference on MEMS, NANO and Smart Systems, 2004.

T. Haikilla, MEMS tuning and Matching circuits, and millimeter wave on wafer measurements, 2006.

F. Yasin, D. Nagel, and C. E. Korman, Noise in MEMS, IOP Science Measurement Science and Technology, pp.1-22, 2011.

P. Rantakari, Wide-band radio frequency micro electro-mechanical systems switches and switching networks using a gallium arsenide monolithic microwave-integrated circuits foundry process technology, IET Microwaves, Antennas & Propagation, vol.5, issue.8, pp.948-955, 2011.
DOI : 10.1049/iet-map.2010.0434

URL : http://dx.doi.org/10.1049/iet-map.2010.0434

E. W. Bryerton and E. R. Lai, A W-band low-noise amplifier with 22K noise temperature, 2009 IEEE MTT-S International Microwave Symposium Digest, pp.681-684, 2009.
DOI : 10.1109/MWSYM.2009.5165788

S. Gong, H. Shen, and N. S. Barker, Study of Broadband Cryogenic DC-Contact RF MEMS Switches, IEEE Transactions on Microwave Theory and Techniques, vol.57, issue.12, pp.3442-3449, 2009.
DOI : 10.1109/TMTT.2009.2033872

M. Li, Investigation of CMOS Varactors for High-GHz-Range Applications, Research Letters in Electronics, vol.47, issue.2-3, pp.1-4, 2009.
DOI : 10.1155/WCN/2006/93712

C. M. Ta, A 60-GHz Variable Delay Line On CMOS for Steerable Antenna In Wireless Communication Systems, IEEE Canadian Conference on Electrical and Computer Engineering, pp.1915-001918, 2008.

C. Lee, SiGe BiCMOS 65-GHz BPSK transmitter and 30 to 122 GHz LC-varactor VCOs with up to 21% tuning range, 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573), pp.179-182, 2004.
DOI : 10.1109/CSICS.2004.1392529

M. K. Kammerer, RF Characterization of Schottky Diodes in 65-nm CMOS, IEEE Transactions on Electron Devices, vol.57, issue.5, pp.1063-1068, 2010.
DOI : 10.1109/TED.2010.2043402

W. Gautier, RF-MEMS based Passive Components and Integration Concepts for Adaptive Millimetre Wave Front-Ends Faculté de génie et d'informatique à l'Université d, Thèse de doctorat

D. Chicherin, MEMS tunable metamaterials surfaces and their applications, Proceedings of Asia-pacific Microwave Conference 2010, pp.239-242, 2010.

H. K. Onnes, Disappearance of the Electrical Resistance of Mercury at Helium Temperatures, 1991.

V. L. Newhouse, Applied Superconductivity, p.285, 1964.

H. Zhang, Mechanical and Electrical Design of a Novel RF MEMS Switch for Cryogenic Applications, Proceedings of SPIE, vol.4931, pp.372-376, 2002.

M. K. Wu, Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressure, Physical Review Letters, vol.58, issue.9, pp.908-910, 1987.
DOI : 10.1103/PhysRevLett.58.908

H. Maeda, Oxide Superconductor without a Rare Earth Element, Japanese Journal of Applied Physics, vol.27, issue.Part 2, No. 2, pp.209-210, 1988.
DOI : 10.1143/JJAP.27.L209

Y. S. Hijazi, Design of a superconducting MEM shunt switch for RF applications, IEEE Transactions on Appiled Superconductivity, vol.13, issue.2, pp.696-699, 2003.
DOI : 10.1109/TASC.2003.814004

H. Zhang, Mechanical and Electrical Design of a Novel RF MEMS Switch for Cryogenic Applications, Proceedings of SPIE, vol.4931, pp.372-376, 2002.

J. Zmuidzinas and P. L. Richards, Superconducting detectors and mixers for millimeter and submillimeter astrophysics, Proceedings of the IEEE, vol.92, issue.10, pp.1597-1600, 2004.
DOI : 10.1109/JPROC.2004.833670

V. Shaternik, Novel superconducting switching device for microwaves applications Physics and Engineering of Millimeter and Sub-Millimeter Waves, The fourth International Kharkov Symposium, pp.366-368, 2001.

Y. J. Feng, Microwave Swiching Effect of High Tc Y-Ba-Cu-O Superconductor, Millimeter Wave and Far-Infrared Technology, ICMWFT'90. International Conference, pp.8-11, 1990.

J. J. Yao, RF MEMS from a device perspective, Journal of Micromechanics and Microengineering, vol.10, issue.4, pp.9-38, 2000.
DOI : 10.1088/0960-1317/10/4/201

R. Borwick, Variable MEMS capacitors implemented into RF filter systems, IEEE Transactions on Microwave Theory and Techniques, vol.51, issue.1, pp.315-319, 2003.
DOI : 10.1109/TMTT.2002.806519

M. Schicke, Niobium SupraMEMS for Reconfigurable Millimeter Wave Filters, IEEE Transactions on Applied Superconductivity, vol.17, issue.2, pp.910-913, 2007.
DOI : 10.1109/TASC.2007.897874

K. Schuster and M. Schicke, Integrated Niobium Thin Film Air Bridges as Variable Capacitors for Superconducting GHz Electronic Circuits, IEEE Transactions on Applied Superconductivity, vol.13, issue.2, pp.135-137, 2003.

M. Schicke, Niobium SupraMEMS for Reconfigurable Millimeter Wave Filters, IEEE Transactions on Applied Superconductivity, vol.17, issue.2, pp.910-913, 2007.
DOI : 10.1109/TASC.2007.897874

O. Conor and . Mahony, Electromechanical Modelling of Low-Voltage RF MEMS Switches, DTIP of MEMS & MOEMS, pp.277-282, 2004.

K. Schuster and M. Schicke, Integrated Niobium Thin Film Air Bridges as Variable Capacitors for Superconducting GHz Electronic Circuits, IEEE Transactions on Applied Superconductivity, vol.13, issue.2, pp.135-137, 2003.

J. Trivisonno, Temperature Dependance of the Elastic Constants of Niobium and Lead in the Normal and Superconducting States, Physics Departement, vol.12, issue.12, pp.153-169, 1973.

J. Emsley, The Elements, 1997.

R. W. Herfst, P. G. Steeneken, and J. Schimtz, Time and voltage dependence of dielectric charging in RF MEMS capacitive switches, 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual, pp.417-421, 2007.
DOI : 10.1109/RELPHY.2007.369926

S. Gorthit, A. Mohanty, and A. Chatterjee, MEMS Parallel Plate Actuators: Pull-In, Pull- Out ant Other Transistions, Infoscience, 2008.

X. Rottenberg, Distributed dielectric charging and its impact on RF MEMS devices, 34 th European Microwave Conference, pp.77-80, 2005.

Y. Xu and N. Aluru, Pull-in/out analysis of nano/microelectromechanical switches with defective oxide layers, Applied Physics Letters, vol.95, issue.7, pp.73112-73113, 2009.
DOI : 10.1063/1.3211111

L. Rocha, Analysis and Analytical Modeling of Static Pull-In With Application to MEMS-Based Voltage Reference and Process Monitoring, Journal of Microelectromechanical Systems, vol.13, issue.2, pp.342-354, 2004.
DOI : 10.1109/JMEMS.2004.824892

J. R. Gilbert, G. K. Ananthasuresh, and S. D. Senturia, Micromechanical Voltage Reference Using the Pull-In of a Beam, IEEE Instrumentation and Measurement Society, vol.50, pp.1504-1507, 2002.

S. Timoshenko, Théorie des vibrations, Librairie polytechnique Ch.Béranger, 2 end édition, 1954.

P. Martins, Caractérisation mécanique des matériaux pour les micros nanosystèmes procédés applicables aux épaisseurs submicroniques, Thèse de doctorat, Institut National des Sciences Appliquées de, 2009.

J. Eberhart, Méthodes physiques d'étude des minéraux et des matériaux solides, 1976.

J. Thorp, The dielectric properties of aluminium nitride substrates for microelectronics packaging, Journal of Materials Science, vol.127, issue.12, pp.4965-4971169, 1990.
DOI : 10.1007/BF00580114

P. E. Amstrong, Temperature Dependence of the Elastic Stiffness Coefficients of Niobium (Columbium), Transactions of the Metallurgical Society of Aime, vol.236, pp.1404-1408, 1966.

V. V-schpeizman, Low-temperature deformation of nanocrystalline niobium, Physics of the Solid State, vol.42, issue.6, pp.1066-1069, 2000.
DOI : 10.1134/1.1131349

X. Yuan, Temperature Acceleration of Dielectric Charging in RF MEMS Capacitive Switches, 2006 IEEE MTT-S International Microwave Symposium Digest, pp.47-50, 2006.
DOI : 10.1109/MWSYM.2006.249923

R. Daigler, Dependence of dielectric charging on film thickness and deposition conditions, 2008 Asia-Pacific Microwave Conference, pp.1-4, 2008.
DOI : 10.1109/APMC.2008.4958446

G. Papaioannou, Temperature study of the dielectric polarization effects of capacitive RF MEMS switches, IEEE Transactions on Microwave Theory and Techniques, vol.53, issue.11, 2005.
DOI : 10.1109/TMTT.2005.857336

J. Ruan, Analyse et modélisation de l'impact des décharges électrostatiques et des agressions électromécaniques sur les micros mutateurs microondes (MEMS RF), Thèse de doctorat, 2010.

S. Prasad and . Sumant, A Compact Model for Dielectric Charging in RF MEMS Capacitive Switches, Journal of RF and Microwave Computer-Aided Engineering, vol.19, issue.2, pp.197-203, 2008.

G. K. Fedder, Simulation of Microelectromechanical Systems, Thèse de doctorat, 1994.

F. Rey, Analyse des Structures et Milieux Continus, Mécanique des structures, Presses Polytechnique et Universitaires Romandes, pp.189-190, 2000.

H. Thonier, Conception et calcul des structures de batiment, Presses ponts et chaussés, pp.88-89, 1999.

D. Peroulis, Electromechanical considerations in developing low-voltage RF MEMS switches, IEEE Transactions on Microwave Theory and Techniques, vol.51, issue.1, pp.259-270, 2003.
DOI : 10.1109/TMTT.2002.806514

K. J. Rangra, Electrostatic low Actuation Voltage RF MEMS Switches for Telecommunications, Thèse de doctorat, 2005.

H. Jaafer, Design and Simulation of Microelectromechanical System Capacitive Shunt Switches, American J. of Engineering and Applied Sciences, pp.655-660, 2009.

M. Lishchynska, Spring Constant Models for Analysis and Design of MEMS Plates on Straight or Meander Tethers, Sensor Letters, vol.4, issue.2, pp.200-205, 2006.
DOI : 10.1166/sl.2006.011

J. M. Duchamp, Etude et conception de structures périodiques, type lignes de transmission non linéaire, pour des applications de multiplication de fréquences en bande V, Thèse de doctorat, 2004.

W. Meissner and R. Ochsenfeld, Ein neuer Effekt bei Eintritt der Supraleitf???higkeit, Die Naturwissenschaften, vol.21, issue.44, p.787, 1933.
DOI : 10.1007/BF01504252

G. Chattopadhyay and J. Zmuidzinas, A dual-polarized slot antenna for millimeter waves, IEEE Transactions on Antennas and Propagation, vol.46, issue.5, pp.736-737, 1998.
DOI : 10.1109/8.668920

URL : http://authors.library.caltech.edu/3294/1/CHAieeetap98.pdf

J. Bardeen, L. Cooper, and J. Schrieffer, Theory of Superconductivity, Physical Review, vol.108, issue.5, pp.1175-1204, 1957.
DOI : 10.1103/PhysRev.108.1175

P. Xavier, Etude de la réponse Hyperfréquence des vortex dans des couches minces Supraconductrices à Haute température critique, Thèse de doctorat, 1994.

J. Kermorvant, Dissipation par effet Joule en régime hyperfréquence dans les supraconducteurs à haute température critique, Thèse de doctorat, 2010.

R. Alper and R. Herman, Theory of the Origin and Relative Abundance Distribution of the Elements, Rev.Mod.Phys, vol.22, issue.2, pp.152-212, 1950.

A. V. Pronin, Direct observation of the superconducting energy gap developing in the conductivity spectra of niobium, Physical Review B, vol.57, issue.22, pp.14416-14421, 1998.
DOI : 10.1103/PhysRevB.57.14416

C. Tong and K. Wu, Propagation characteristics of thin film superconducting microstrip line for terahertz applications, Electronics Letters, vol.27, issue.24, pp.2299-2300, 1991.
DOI : 10.1049/el:19911421

D. S. Linden, Modifield two ?fluid Model for Superconductor Surface Impedance, IEEE Transactions on Applied Superconductivity, vol.4, issue.3, 1994.
DOI : 10.1109/77.317828

H. Piel and G. Muller, The Microwave Surface Impedance of High-Tc Superconductors, IEEE Transactions on Magnetics, vol.27, issue.2, 1991.

P. A. Rizzi, Microwave Engineering: Passive Circuits, 1988.

W. H. Chang, The inductance of a superconducting strip transmission line, Journal of Applied Physics, vol.50, issue.12, pp.8129-8134, 1979.
DOI : 10.1063/1.325953

C. K. Teh, M. Kitagawa, and Y. Okabe, Inductance calculation of 3D superconducting structures with ground plane, Superconductor Science and Technology, vol.12, issue.11, pp.921-924, 1999.
DOI : 10.1088/0953-2048/12/11/368

D. Sheen, Current distribution, resistance, and inductance for superconducting strip transmission lines, «Validation of a Simple Electromechanical Model of Superconducting MEMS used in Radio-Astronomy », 1st International Conference on Superconducting Electronics, pp.108-115, 1991.
DOI : 10.1109/77.84617

N. Alcheikh, P. Xavier, J. Duchamp, and K. Schuster, Variable Capacitance and Pull-in Voltage Analysis of Electrically Actuated Meander-Suspended Superconducting MEMS», Comsol International Conference, 2010.