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Incorporation de bore dans des films minces de "Diamond-Like Carbon" : élaboration par ablation laser pulsée et caractérisation

Abstract : This work deals with the study of boron doped diamond-like carbon thin films elaborated by femtosecond and nanosecond laser ablation. The first aim of this work consists in identifying the potential applications of these films for sensors (for example thermometers). The second aim consists in correlating the films structure and properties with the deposition processes. The first chapter focused on the constitutive elements of the films: boron and carbon. Moreover, it presents a "state of the art" about DLC thin films and the different elaboration techniques. The second chapter deals with the experimental methods used for the elaboration and the study of the thin films. The third chapter deals with the structural and morphological characterizations. It highlights the important difference of structure of the films deposited by ns and fs PLD. Moreover, it underlines the structural modification due to the boron. The fourth chapter presents the study of the electrical and mechanical properties, as well as the tribological behaviour of the films. The structure difference of the films results in large variations of resistivity but does not change much the friction coefficient. The last chapter underlines the structural heterogeneity of the pure DLC films and focuses on the specificities of their extreme surface. This one turns out to be less dense and more conductor than the global film. Keywords: Pulsed laser deposition, femtosecond laser, nanosecond laser, doped amorphous carbon, diamond-like carbon, boron, thin films, structural and analytical characterizations, electrical and mechanical properties, tribological behaviour.
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  • HAL Id : tel-00751337, version 1


Aurélien Sikora. Incorporation de bore dans des films minces de "Diamond-Like Carbon" : élaboration par ablation laser pulsée et caractérisation. Matériaux. Université Jean Monnet - Saint-Etienne, 2009. Français. ⟨tel-00751337⟩



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