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Etude des propriétés électro-thermo-mécaniques de nanofils en silicium pour leur intégration dans les microsystèmes

Abstract : Remarkable nanoscale electro-thermo-mechanical properties of silicon nanowires are increasingly studies. This experimental thesis investigates such properties for top-down fabricated monocrystal silicon nanowires.A four points bending set-up and a MEMS actuator are developed to apply ex situ and in situ mechanical stress on nanowires. Those devices are characterised in a cryogenic environment within a microprobe station. Electrical properties and piezoresistivity are studied using those systems. Moreover, the 3ω method measures the thermal conductivity of these nanowires.From buckling of silicon nanowires, unexpected high compressive stress (>100 MPa) was identified in top silicon layers of SOI substrates. Drift-compensated measurements show that p type silicon nanowires present large piezoresistive coefficients which decrease with temperature. Additionally, the MEMS device demonstrates the possibility to detect ample MEMS movements with sub-ångström resolution using the nanowires as piezoresistive nanogauges. The thermal conductivity was found consistent with previously reported values for silicon nanowires, and expectedly decreases with temperature.
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Submitted on : Thursday, November 8, 2012 - 12:27:15 PM
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Pierre Allain. Etude des propriétés électro-thermo-mécaniques de nanofils en silicium pour leur intégration dans les microsystèmes. Autre [cond-mat.other]. Université Paris Sud - Paris XI, 2012. Français. ⟨NNT : 2012PA112242⟩. ⟨tel-00749756⟩

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