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Conception et fabrication d'un magnétomètre à jauge de contrainte

Abstract : This PhD thesis deals with the design, the technological implementation, and functional characterizations of a new type of monolothic 3D MEMS magnetometer. Other than for the classical approach used for 3D MEMS magnetometers, the sensor developed in this work is not based on the principle of Lorentz force, but takes advantage of magnetic material which is integrated into the MEMS device and experiences a torque when surrounded by a magnetic field. Signal detection is based on piezoresistive detection using gauges of monocrystalline silicon with nanometric section. The technological concept is also suitable for the fabrication of inertial sensors and thus a very promising approach for fabrication of inertial measurement units (IMUs). Sensor design mainly relies on a noise model. Besides technological limitations, mechanical, magnetic and thermal aspects are also taken into account. Two different methods for integration of magnetic material were explored. A first option consists in the integration of rare-earth magnets like SmCo and NdFeB, a second option is about the integration of exchange-bias coupled antiferromagnetic and ferromagnetic multilayers. The technologically challenging implentation of both approaches will be discussed with a special focus on magnetic properties of the used materials. A further part will be dedicated to the characterization of mechanical stress in thin layers, which may become problematic for the microsystems conceived in this work. Finally, sensor fabrication and fundamental characterizations will be presented as experimental proof of concept for the sensor.
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Submitted on : Thursday, November 29, 2012 - 10:22:19 AM
Last modification on : Thursday, November 19, 2020 - 1:00:31 PM
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  • HAL Id : tel-00744722, version 1



Dirk Ettelt. Conception et fabrication d'un magnétomètre à jauge de contrainte. Autre. Université de Grenoble, 2012. Français. ⟨NNT : 2012GRENT020⟩. ⟨tel-00744722⟩



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