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Etude et réalisation d'une platine porte-échantillon aux performances nanométriques. Application à la microscopie en champ proche.

Ahmad Sinno 1
1 Instrumentation et modelisation des Systèmes et nanosystemes Avancés
LISV - Laboratoire d'Ingénierie des Systèmes de Versailles
Abstract : Despite the presence of high performance apparatus such as electronic and near-field microscopes, the capacity to measure nanoscale dimensions with uncertainties down to some nanometers constitutes a real technological obstacle for the mass production of millimeter scale components with nanoscale characteristics. The work realized during this thesis is intended to control at the nanoscale level, over a range of some millimeters, the position of a sample-holder, mainly aimed to microscopy. The system comprises a mechanical translation stage, an interferometric position measurement, high-frequency electronics, and a closed loop control. The displacement system has a dual stage actuator architecture where the first stage is a long-range translation stage, and the second is a piezoelectric actuator allowing rectifying the positioning errors of the first stage. The system allows millimeter range displacements in the X-Y plane with a resolution and repeatability at the nanoscale level. The device was integrated into an atomic force microscope and a scanning near-field optical microscope in order to obtain, at the same time, millimeter-sized and highly resolved images. Topographic and near-field optical images with length higher than 1 mm have been realized in order to show the performances of the system.
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Ahmad Sinno. Etude et réalisation d'une platine porte-échantillon aux performances nanométriques. Application à la microscopie en champ proche.. Micro et nanotechnologies/Microélectronique. Université de Versailles-Saint Quentin en Yvelines, 2010. Français. ⟨tel-00741942⟩

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