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Réalisation de micro-chambres d'analyse chimique : microcapteurs de pH et microfluidiques associés

Abstract : This work presents the achievement of a chemical analysis system consisting of an array of micro-chambers containing pH microsensors based-on suspended gate field effect transistors particularly sensitive to charges contained in the space under the gate-bridge. The suspended-gate transistors were fabricated using surface microtechnology processes. A final insulating layer was chosen to allow the use of these transistors in solution as pH sensors. The integration of microfluidic channels made ​​of Polydiméthylsiloxane (PDMS) on the suspended-gate transistors, have allowed performing a set of pH measurements in both static or continuous flow, and working on the optimal conditions for sensors rinsing. The effect of the gap (area under the suspended bridge) height on pH sensitivity is also presented. Then, first measurements in small signal regime have been made on transistors with and without the (PDMS) microchannels. These have allowed us to observe their frequency particular behavior depending on the sensor environment and especially its pH, and to develop a new method for pH measuring.
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Submitted on : Monday, October 1, 2012 - 1:34:36 PM
Last modification on : Friday, January 8, 2021 - 3:42:58 AM
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  • HAL Id : tel-00737164, version 1


Abdelghani Kherrat. Réalisation de micro-chambres d'analyse chimique : microcapteurs de pH et microfluidiques associés. Electronique. Université Rennes 1, 2012. Français. ⟨NNT : 2012REN1S033⟩. ⟨tel-00737164⟩



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